Problem tylanbpsg SNF 2005-06-19 18:32:47: low silane flow

hopcroft at snf.stanford.edu hopcroft at snf.stanford.edu
Sun Jun 19 18:32:48 PDT 2005


Little or no silane flow- MFC reads 0-25 with repeated errors. Pressure valve on the gas line shows vacuum. Maybe gas line didn't come back after power failure?




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