From fengj at snf.stanford.edu Sun May 1 03:00:15 2005 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sun, 1 May 2005 03:00:15 -0700 Subject: Shutdown tylanbpsg SNF 2005-05-01 03:00:14: Tube won't come out, wafers still in tube Message-ID: From mdickey at snf.stanford.edu Mon May 2 07:05:06 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 2 May 2005 07:05:06 -0700 Subject: Shutdown tylanbpsg SNF 2005-05-01 03:00:14: Tube won't come out, wafers still in tube Message-ID: zero'f the N2 mfc.....tube vents fine now From mdickey at snf.stanford.edu Mon May 2 07:05:24 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 2 May 2005 07:05:24 -0700 Subject: Problem tylanbpsg SNF 2005-04-30 22:11:13: N2 Purge MFS Alarmed at Step 110 Message-ID: zero'd the mfc....working fine now From maurice at snf.stanford.edu Tue May 10 10:23:58 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 10 May 2005 10:23:58 -0700 Subject: Shutdown tylanbpsg SNF 2005-05-10 10:23:56: top of cage broken Message-ID: top of caged boat broken From mdickey at snf.stanford.edu Tue May 10 10:38:52 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 10 May 2005 10:38:52 -0700 Subject: Shutdown tylanbpsg SNF 2005-05-10 10:23:56: top of cage broken Message-ID: Top replaced From dwburns at snf.stanford.edu Sun May 22 07:58:07 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sun, 22 May 2005 07:58:07 -0700 Subject: Problem tylanbpsg SNF 2005-05-22 07:58:06: Tycom is frozen; can't load process recipe or pump program Message-ID: Tycom reads: "host task in progress" though looks quite dead. From dwburns at snf.stanford.edu Sun May 22 13:54:51 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sun, 22 May 2005 13:54:51 -0700 Subject: Problem tylanbpsg SNF 2005-05-22 13:54:50: Tycom system reset, and LTO was successfully run. Message-ID: From tberg at snf.stanford.edu Mon May 23 06:45:09 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 May 2005 06:45:09 -0700 Subject: Problem tylanbpsg SNF 2005-05-22 07:58:06: Tycom is frozen; can't load process recipe or pump program Message-ID: Host task means system is automatically polling all tubes From tberg at snf.stanford.edu Mon May 23 06:45:30 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 May 2005 06:45:30 -0700 Subject: Problem tylanbpsg SNF 2005-05-22 13:54:50: Tycom system reset, and LTO was successfully run. Message-ID: Noted From mdickey at snf.stanford.edu Tue May 31 06:40:28 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 31 May 2005 06:40:28 -0700 Subject: Shutdown tylanbpsg SNF 2005-05-31 06:40:27: Pull and clean Message-ID: Down for pull and clean