From gladys at snf.stanford.edu  Mon Nov  7 16:22:48 2005
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mon, 7 Nov 2005 16:22:48 -0800
Subject: Problem tylanbpsg SNF 2005-11-07 16:22:45: failed leak check 3 times
Message-ID: <mailman.847.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Wed Nov  9 07:04:52 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 9 Nov 2005 07:04:52 -0800
Subject: Problem tylanbpsg SNF 2005-11-07 16:22:45: failed leak check 3 times
Message-ID: <mailman.848.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

Leak check is good now



From fengj at snf.stanford.edu  Fri Nov 18 18:38:18 2005
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Fri, 18 Nov 2005 18:38:18 -0800
Subject: Problem tylanbpsg SNF 2005-11-18 18:38:17: broken wafer pieces
Message-ID: <mailman.849.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

found them on the metal side before loading my wafers



From mdickey at snf.stanford.edu  Mon Nov 21 10:46:34 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 21 Nov 2005 10:46:34 -0800
Subject: Problem tylanbpsg SNF 2005-11-18 18:38:17: broken wafer pieces
Message-ID: <mailman.850.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

vacuumed up loose particles



From fengj at snf.stanford.edu  Tue Nov 22 23:41:07 2005
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Tue, 22 Nov 2005 23:41:07 -0800
Subject: Comment tylanbpsg SNF 2005-11-22 23:41:06: Failed leak check twice
Message-ID: <mailman.851.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

Recipe was LTO450P. Passed in the third try.



From iwjung at snf.stanford.edu  Sat Nov 26 11:54:06 2005
From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu)
Date: Sat, 26 Nov 2005 11:54:06 -0800
Subject: Problem tylanbpsg SNF 2005-11-26 11:54:05: mfs alarm ph3 at .5 
Message-ID: <mailman.852.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Mon Nov 28 07:53:18 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 28 Nov 2005 07:53:18 -0800
Subject: Comment tylanbpsg SNF 2005-11-22 23:41:06: Failed leak check twice
Message-ID: <mailman.853.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

Noted



From seymour at snf.stanford.edu  Mon Nov 28 08:26:06 2005
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 28 Nov 2005 08:26:06 -0800
Subject: Problem tylanbpsg SNF 2005-11-26 11:54:05: mfs alarm ph3 at .5 
Message-ID: <mailman.854.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

checked PH3 zero reading, it was .3 at times. I did the MFS460 auto zero routine and the PH3 was now reading a steady 0. 



From iwjung at snf.stanford.edu  Tue Nov 29 18:34:47 2005
From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu)
Date: Tue, 29 Nov 2005 18:34:47 -0800
Subject: Problem tylanbpsg SNF 2005-11-29 18:34:47: mfs alarm o2 valve 0.1 
Message-ID: <mailman.855.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

No deposition after run!!!



From tberg at snf.stanford.edu  Wed Nov 30 06:59:46 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 30 Nov 2005 06:59:46 -0800
Subject: Problem tylanbpsg SNF 2005-11-29 18:34:47: mfs alarm o2 valve 0.1 
Message-ID: <mailman.856.1357938894.25992.tylanbpsg-pcs@snf.stanford.edu>

Mike rezeroed the O2 and the system