From maurice at snf.stanford.edu Wed Oct 5 16:58:40 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 5 Oct 2005 16:58:40 -0700 Subject: Shutdown tylanbpsg SNF 2005-10-05 16:58:40: 24 volt hardware interlock Message-ID: Reactor shutoff 5 times over a two hour period. Could not finish a run From maurice at snf.stanford.edu Wed Oct 5 17:01:55 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 5 Oct 2005 17:01:55 -0700 Subject: Shutdown tylanbpsg SNF 2005-10-05 16:58:40: 24 volt hardware interlock Message-ID: this shutdown was for Epi From tberg at snf.stanford.edu Thu Oct 6 06:31:48 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 6 Oct 2005 06:31:48 -0700 Subject: Comment tylanbpsg SNF 2005-09-27 00:29:14: Next user: Please check for wafers in the tube Message-ID: Noted From yue at snf.stanford.edu Mon Oct 17 11:52:36 2005 From: yue at snf.stanford.edu (yue at snf.stanford.edu) Date: Mon, 17 Oct 2005 11:52:36 -0700 Subject: Problem tylanbpsg SNF 2005-10-17 11:52:35: very dirty tube Message-ID: looks like somebody broke a wafer inside. lots of wafer dusts at both ends of the tube. From tberg at snf.stanford.edu Mon Oct 17 12:29:04 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Oct 2005 12:29:04 -0700 Subject: Comment tylanbpsg SNF 2005-10-17 12:29:02: Changed Metal end bottom Message-ID: From tberg at snf.stanford.edu Mon Oct 17 12:52:03 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Oct 2005 12:52:03 -0700 Subject: Comment tylanbpsg SNF 2005-10-17 12:29:02: Changed Metal end bottom Message-ID: Actually changed non-metal boat From tberg at snf.stanford.edu Mon Oct 17 12:52:48 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Oct 2005 12:52:48 -0700 Subject: Comment tylanbpsg SNF 2005-10-17 12:52:48: Changed Non -metal side Message-ID: Sorry, i actually changed non-metal side From axiu at snf.stanford.edu Thu Oct 20 05:15:38 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 20 Oct 2005 05:15:38 -0700 Subject: Problem tylanbpsg SNF 2005-10-20 05:15:38: step40 go to step95 Message-ID: From axiu at snf.stanford.edu Thu Oct 20 05:57:18 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 20 Oct 2005 05:57:18 -0700 Subject: Problem tylanbpsg SNF 2005-10-20 05:57:17: step40 go to step95 Message-ID: From axiu at snf.stanford.edu Thu Oct 20 05:59:59 2005 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 20 Oct 2005 05:59:59 -0700 Subject: Comment tylanbpsg SNF 2005-10-20 05:59:59: step40 go to step 95 Message-ID: From tberg at snf.stanford.edu Thu Oct 20 06:15:34 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Oct 2005 06:15:34 -0700 Subject: Problem tylanbpsg SNF 2005-10-20 05:57:17: step40 go to step95 Message-ID: Same comment, we only need one From tberg at snf.stanford.edu Thu Oct 20 06:15:53 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Oct 2005 06:15:53 -0700 Subject: Comment tylanbpsg SNF 2005-10-20 05:59:59: step40 go to step 95 Message-ID: Same comment From tberg at snf.stanford.edu Thu Oct 20 06:16:09 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Oct 2005 06:16:09 -0700 Subject: Comment tylanbpsg SNF 2005-10-17 12:52:48: Changed Non -metal side Message-ID: noted From mdickey at snf.stanford.edu Thu Oct 20 09:03:31 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 20 Oct 2005 09:03:31 -0700 Subject: Shutdown tylanbpsg SNF 2005-10-20 09:03:31: pull and clean Message-ID: System is down for a pull and clean due to cracked tube From maurice at snf.stanford.edu Thu Oct 20 16:59:34 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Oct 2005 16:59:34 -0700 Subject: Problem tylanbpsg SNF 2005-10-17 11:52:35: very dirty tube Message-ID: tube pulled From maurice at snf.stanford.edu Thu Oct 20 17:00:01 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Oct 2005 17:00:01 -0700 Subject: Problem tylanbpsg SNF 2005-10-20 05:15:38: step40 go to step95 Message-ID: tube pulled From maurice at snf.stanford.edu Thu Oct 20 17:00:23 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Oct 2005 17:00:23 -0700 Subject: Problem tylanbpsg SNF 2005-09-23 14:43:59: MFS alarm during the last 8 min. Message-ID: logged From maurice at snf.stanford.edu Fri Oct 21 13:56:03 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 21 Oct 2005 13:56:03 -0700 Subject: Shutdown tylanbpsg SNF 2005-10-20 09:03:31: pull and clean Message-ID: Test complete. Uniformity is high...~15% across wafer. The test was done with the tube uncoated. Uniformity should get better afer the tube is coated.