From gladys at snf.stanford.edu Thu Sep 1 18:30:27 2005 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Thu, 1 Sep 2005 18:30:27 -0700 Subject: Problem tylanbpsg SNF 2005-09-01 18:30:26: Thickness uniformity across the wafer had gone bad Message-ID: that you need to do 2 runs: 1st dep with flats up and 2nd dep with flats down. Doing this trick gives you a good uniformity across the wafer. From gladys at snf.stanford.edu Thu Sep 1 18:32:34 2005 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Thu, 1 Sep 2005 18:32:34 -0700 Subject: Problem tylanbpsg SNF 2005-09-01 18:32:34: white powder on the dummies Message-ID: There's white powdery material on the dummies when I opened the tube for my run. From maurice at snf.stanford.edu Fri Sep 2 09:51:37 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Sep 2005 09:51:37 -0700 Subject: Shutdown tylanbpsg SNF 2005-09-02 09:51:37: White powder on wafers Message-ID: From maurice at snf.stanford.edu Fri Sep 2 10:55:37 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Sep 2005 10:55:37 -0700 Subject: Problem tylanbpsg SNF 2005-09-01 18:32:34: white powder on the dummies Message-ID: Powder may be from earlier runs in the week. Current runs show no powder. Dep rate is normal. Uniformity is between 7 and 14%. Not unusual. But it is a little toward the higher side of normal. As always, we tell users that is they need better uniformity, to rotate wafers 180 degree after half of the deposition. This can often get them into the 2% uniformity range. From maurice at snf.stanford.edu Fri Sep 2 17:31:32 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Sep 2005 17:31:32 -0700 Subject: Shutdown tylanbpsg SNF 2005-09-02 09:51:37: White powder on wafers Message-ID: Powder may be from earlier runs in the week. Current runs show no powder. Dep rate is normal. Uniformity is between 7 and 14%. Not unusual. But it is a little toward the higher side of normal. As always, we tell users that is they need better uniformity, to rotate wafers 180 degree after half of the deposition. This can often get them into the 2% uniformity range. From harshal at snf.stanford.edu Wed Sep 7 16:06:48 2005 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Wed, 7 Sep 2005 16:06:48 -0700 Subject: Problem tylanbpsg SNF 2005-09-07 16:06:47: high process pressure and frequent failure at leak check step. Message-ID: i ran PSg400 re4cie yesterday for two runs and in both cases the process pressure was too high, 610 for first run (8% PSG) and 540 for second run (4% PSG). also it failed the leak check before each run and had to rerun the process. From seymour at snf.stanford.edu Tue Sep 13 10:55:17 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 13 Sep 2005 10:55:17 -0700 Subject: Comment tylanbpsg SNF 2005-09-13 10:55:17: PH3 MFC changed Message-ID: replaced MFC pumped line turned on N2 to purge system. introced PH3 and checked operation. Looked good. Needs test. From tberg at snf.stanford.edu Thu Sep 15 08:01:16 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2005 08:01:16 -0700 Subject: Problem tylanbpsg SNF 2005-09-07 16:06:47: high process pressure and frequent failure at leak check step. Message-ID: Noted From mdickey at snf.stanford.edu Wed Sep 21 05:51:17 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Sep 2005 05:51:17 -0700 Subject: Shutdown tylanbpsg SNF 2005-09-21 05:51:16: tube pull Message-ID: down for tube pull and clean From tberg at snf.stanford.edu Wed Sep 21 07:59:16 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 21 Sep 2005 07:59:16 -0700 Subject: Problem tylanbpsg SNF 2005-09-01 18:30:26: Thickness uniformity across the wafer had gone bad Message-ID: Noted From maurice at snf.stanford.edu Wed Sep 21 17:44:30 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 21 Sep 2005 17:44:30 -0700 Subject: Comment tylanbpsg SNF 2005-09-13 10:55:17: PH3 MFC changed Message-ID: logged From maurice at snf.stanford.edu Wed Sep 21 17:47:32 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 21 Sep 2005 17:47:32 -0700 Subject: Comment tylanbpsg SNF 2005-09-21 17:47:31: test good Message-ID: uniformity 8 to 11% without coating tube. Should get better after tube is coated. From mdickey at snf.stanford.edu Thu Sep 22 07:08:24 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 22 Sep 2005 07:08:24 -0700 Subject: Comment tylanbpsg SNF 2005-09-21 17:47:31: test good Message-ID: noted From mdickey at snf.stanford.edu Thu Sep 22 07:08:47 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 22 Sep 2005 07:08:47 -0700 Subject: Shutdown tylanbpsg SNF 2005-09-21 05:51:16: tube pull Message-ID: Tube is back up and ready for use From hopcroft at snf.stanford.edu Thu Sep 22 15:19:32 2005 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Thu, 22 Sep 2005 15:19:32 -0700 Subject: Comment tylanbpsg SNF 2005-09-22 15:19:32: tube in use Thurs. 22SEP Message-ID: I'm using the lto tube running PUMP11 From harshal at snf.stanford.edu Fri Sep 23 14:44:01 2005 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Fri, 23 Sep 2005 14:44:01 -0700 Subject: Problem tylanbpsg SNF 2005-09-23 14:43:59: MFS alarm during the last 8 min. Message-ID: MFS alarm came on in the last 8 min of the run (step 105). SiH4/PH3 light blinking on the front panel. From maurice at snf.stanford.edu Mon Sep 26 09:45:50 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Sep 2005 09:45:50 -0700 Subject: Comment tylanbpsg SNF 2005-09-22 15:19:32: tube in use Thurs. 22SEP Message-ID: logged From pethe at snf.stanford.edu Tue Sep 27 00:29:14 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Tue, 27 Sep 2005 00:29:14 -0700 Subject: Comment tylanbpsg SNF 2005-09-27 00:29:14: Next user: Please check for wafers in the tube Message-ID: Next User :Please check the tube for real wafers in the tube