From vipin at snf.stanford.edu Wed Aug 2 02:40:16 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 2 Aug 2006 02:40:16 -0700 Subject: Problem tylanbpsg SNF 2006-08-02 02:40:15: problem Message-ID: Very poor deposition rate: 1 um in 2&1/2 hours. From kevhuang at snf.stanford.edu Wed Aug 2 15:24:53 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Wed, 2 Aug 2006 15:24:53 -0700 Subject: Comment tylanbpsg SNF 2006-08-02 15:24:52: deposition rate OK Message-ID: 55 min. LTO400 gave about 1 um From maurice at snf.stanford.edu Wed Aug 2 15:26:50 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Aug 2006 15:26:50 -0700 Subject: Problem tylanbpsg SNF 2006-08-02 02:40:15: problem Message-ID: From riteshj at snf.stanford.edu Fri Aug 4 17:50:52 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Fri, 4 Aug 2006 17:50:52 -0700 Subject: Problem tylanbpsg SNF 2006-08-04 17:50:52: MFS alarm when i run pump11 recipe Message-ID: the mfs alarm goes off as soon as I run pump11 recipe, right now have aborted the recipe and tube is not pumped down From mdickey at snf.stanford.edu Mon Aug 7 06:03:01 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 7 Aug 2006 06:03:01 -0700 Subject: Shutdown tylanbpsg SNF 2006-08-07 06:03:00: tube pull Message-ID: Down for pull and clean From mdickey at snf.stanford.edu Mon Aug 7 13:38:10 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 7 Aug 2006 13:38:10 -0700 Subject: Comment tylanbpsg SNF 2006-08-07 13:38:09: test Message-ID: System needs test and coat when temp is stabilized From maurice at snf.stanford.edu Mon Aug 7 17:37:53 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Aug 2006 17:37:53 -0700 Subject: Shutdown tylanbpsg SNF 2006-08-07 06:03:00: tube pull Message-ID: Pulled, cleaned, coated and tested Dep rate and uniformity normal (I'll post it tomorrow) From maurice at snf.stanford.edu Mon Aug 7 17:38:39 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Aug 2006 17:38:39 -0700 Subject: Comment tylanbpsg SNF 2006-08-07 13:38:09: test Message-ID: dep rate and uniformity normal From maurice at snf.stanford.edu Mon Aug 7 17:39:01 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Aug 2006 17:39:01 -0700 Subject: Comment tylanbpsg SNF 2006-08-02 15:24:52: deposition rate OK Message-ID: logged From aokyay at snf.stanford.edu Sun Aug 20 00:08:06 2006 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sun, 20 Aug 2006 00:08:06 -0700 Subject: Problem tylanbpsg SNF 2006-08-20 00:08:05: PH3 leak Message-ID: MFC reading .2 From me342e at snf.stanford.edu Sun Aug 20 10:52:18 2006 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Sun, 20 Aug 2006 10:52:18 -0700 Subject: Problem tylanbpsg SNF 2006-08-20 10:52:17: boat will not come out & mfs alarms Message-ID: the boat would not open for recipe lto400. also multiple mfs alarms continue, mostly with the sih4 mfc... boat would not move for either automated or manual control, but in slow mode you could hear the motor loading working. From tberg at snf.stanford.edu Mon Aug 21 06:22:59 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Aug 2006 06:22:59 -0700 Subject: Problem tylanbpsg SNF 2006-08-04 17:50:52: MFS alarm when i run pump11 recipe Message-ID: noited From mdickey at snf.stanford.edu Mon Aug 21 06:57:33 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 21 Aug 2006 06:57:33 -0700 Subject: Problem tylanbpsg SNF 2006-08-20 10:52:17: boat will not come out & mfs alarms Message-ID: TIghtened loose clutch cable...Boats out fine now From ratiug at snf.stanford.edu Tue Aug 22 22:37:58 2006 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Tue, 22 Aug 2006 22:37:58 -0700 Subject: Problem tylanbpsg SNF 2006-08-22 22:37:58: loading holder Message-ID: one quart cover slided down and the front end was broken. From mdickey at snf.stanford.edu Wed Aug 23 07:08:59 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Aug 2006 07:08:59 -0700 Subject: Problem tylanbpsg SNF 2006-08-22 22:37:58: loading holder Message-ID: Broken boat fork sheath replaced From kuanlinc at snf.stanford.edu Fri Aug 25 15:24:36 2006 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Fri, 25 Aug 2006 15:24:36 -0700 Subject: Comment tylanbpsg SNF 2006-08-25 15:24:36: Flaky cantilever Message-ID: The cantilever is becoming flaky. Needs to be cleaned. From libei at snf.stanford.edu Sat Aug 26 05:47:17 2006 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Sat, 26 Aug 2006 05:47:17 -0700 Subject: Problem tylanbpsg SNF 2006-08-26 05:47:13: nonmetal dummies dropped Message-ID: I dropped one box of nonmetal dummy wafers. There are no more back up in the cart. I am sorry.