From tberg at snf.stanford.edu Tue Jan 3 12:56:41 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Jan 2006 12:56:41 -0800 Subject: Comment tylanbpsg SNF 2006-01-03 12:56:40: gases purgged out Message-ID: Gases purged out to install blanks in VMB From maurice at snf.stanford.edu Tue Jan 3 17:36:39 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Jan 2006 17:36:39 -0800 Subject: Shutdown tylanbpsg SNF 2006-01-03 17:36:38: first test:no dep Message-ID: From maurice at snf.stanford.edu Tue Jan 3 17:39:00 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Jan 2006 17:39:00 -0800 Subject: Comment tylanbpsg SNF 2006-01-03 17:39:00: first test no dep Message-ID: LTO400 for 00:20:00 no dep repeating test From maurice at snf.stanford.edu Wed Jan 4 13:14:55 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Jan 2006 13:14:55 -0800 Subject: Comment tylanbpsg SNF 2006-01-04 13:14:54: 2nd test: no dep Message-ID: LTO400 for 00:20:00 no deposition From maurice at snf.stanford.edu Wed Jan 4 14:52:33 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Jan 2006 14:52:33 -0800 Subject: Comment tylanbpsg SNF 2006-01-04 14:52:33: 3rd test very thin Message-ID: LTO400 for 00:20:00 expected 1900A deposited 336A process pressure 234.9mTorr (inormally ~285) gas flows look good from Tycom From tberg at snf.stanford.edu Thu Jan 5 06:29:36 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 Jan 2006 06:29:36 -0800 Subject: Comment tylanbpsg SNF 2006-01-05 06:29:35: Running Dummy run Message-ID: From maurice at snf.stanford.edu Thu Jan 5 16:01:30 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Jan 2006 16:01:30 -0800 Subject: Comment tylanbpsg SNF 2006-01-05 16:01:29: 4th test Message-ID: expected 1900A deposited 376A From maurice at snf.stanford.edu Thu Jan 5 16:18:18 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Jan 2006 16:18:18 -0800 Subject: Comment tylanbpsg SNF 2006-01-05 16:18:17: Running 2 hr dummy run Message-ID: From maurice at snf.stanford.edu Fri Jan 6 09:54:30 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 09:54:30 -0800 Subject: Comment tylanbpsg SNF 2006-01-06 09:54:30: 5th test thin Message-ID: expected 1900 deposited 341 Ray working on SiH4 MFC From tberg at snf.stanford.edu Fri Jan 6 13:53:30 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Jan 2006 13:53:30 -0800 Subject: Comment tylanbpsg SNF 2006-01-06 13:53:29: Flow base cleaned and calibrated Message-ID: From maurice at snf.stanford.edu Fri Jan 6 15:48:22 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Jan 2006 15:48:22 -0800 Subject: Comment tylanbpsg SNF 2006-01-06 15:48:22: 6th test too thick Message-ID: expected 1900A deposited 3510A From seymour at snf.stanford.edu Mon Jan 9 08:29:30 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Jan 2006 08:29:30 -0800 Subject: Comment tylanbpsg SNF 2006-01-09 08:29:29: LTO thickness problem Message-ID: I compaired BPSG flows and resultiing process pressures with N2 in the lines and with silane in the lines. When BPSG pressures is corrected for base pressure offset compaired to Poly the results were same. ( 170 mT and 172 mT ). Please check thickness on another test to see if BPSG is higher then expected. From maurice at snf.stanford.edu Mon Jan 9 14:12:55 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Jan 2006 14:12:55 -0800 Subject: Shutdown tylanbpsg SNF 2006-01-03 17:36:38: first test:no dep Message-ID: expected 4400 deposited 4115 From maurice at snf.stanford.edu Mon Jan 9 14:13:24 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Jan 2006 14:13:24 -0800 Subject: Comment tylanbpsg SNF 2006-01-03 12:56:40: gases purgged out Message-ID: logged From maurice at snf.stanford.edu Mon Jan 9 14:13:36 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Jan 2006 14:13:36 -0800 Subject: Comment tylanbpsg SNF 2006-01-03 17:39:00: first test no dep Message-ID: logged From maurice at snf.stanford.edu Mon Jan 9 14:13:49 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Jan 2006 14:13:49 -0800 Subject: Comment tylanbpsg SNF 2006-01-04 13:14:54: 2nd test: no dep Message-ID: logged From tberg at snf.stanford.edu Wed Jan 11 13:43:58 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:43:58 -0800 Subject: Comment tylanbpsg SNF 2006-01-04 14:52:33: 3rd test very thin Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 13:44:13 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:44:13 -0800 Subject: Comment tylanbpsg SNF 2006-01-05 06:29:35: Running Dummy run Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 13:44:24 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:44:24 -0800 Subject: Comment tylanbpsg SNF 2006-01-05 16:01:29: 4th test Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 13:44:39 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:44:39 -0800 Subject: Comment tylanbpsg SNF 2006-01-05 16:18:17: Running 2 hr dummy run Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 13:45:50 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:45:50 -0800 Subject: Comment tylanbpsg SNF 2006-01-06 09:54:30: 5th test thin Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 13:46:04 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:46:04 -0800 Subject: Comment tylanbpsg SNF 2006-01-06 13:53:29: Flow base cleaned and calibrated Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 13:46:17 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:46:17 -0800 Subject: Comment tylanbpsg SNF 2006-01-06 15:48:22: 6th test too thick Message-ID: noted From tberg at snf.stanford.edu Wed Jan 11 13:46:31 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Jan 2006 13:46:31 -0800 Subject: Comment tylanbpsg SNF 2006-01-09 08:29:29: LTO thickness problem Message-ID: noted From seymour at snf.stanford.edu Tue Jan 24 16:04:37 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 24 Jan 2006 16:04:37 -0800 Subject: Shutdown tylanbpsg SNF 2006-01-24 16:04:37: run aborted Message-ID: I looked at system. Found the gatevinter when trying to pump down. checked door closure and it was good. Pump was off. I reset overload on breaker and pump started. Waited a couple of mins and tried gatevalve again and got the same interlock report. Ran out of time. From mdickey at snf.stanford.edu Wed Jan 25 07:57:57 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 25 Jan 2006 07:57:57 -0800 Subject: Shutdown tylanbpsg SNF 2006-01-24 16:04:37: run aborted Message-ID: Replaced broken sheath From mdickey at snf.stanford.edu Mon Jan 30 07:07:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 30 Jan 2006 07:07:54 -0800 Subject: Shutdown tylanbpsg SNF 2006-01-30 07:07:54: tube pull Message-ID: down for pull and clean From mdickey at snf.stanford.edu Mon Jan 30 13:42:13 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 30 Jan 2006 13:42:13 -0800 Subject: Comment tylanbpsg SNF 2006-01-30 13:42:13: Test Message-ID: System is in coat....will need test after. There are 2 new style boats now. From maurice at snf.stanford.edu Tue Jan 31 16:38:08 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 31 Jan 2006 16:38:08 -0800 Subject: Shutdown tylanbpsg SNF 2006-01-30 07:07:54: tube pull Message-ID: pulled cleaned coated tested New boats installed. Dep rate is unchanged. Uniformity is much better. More uniformity data to follow From maurice at snf.stanford.edu Tue Jan 31 16:38:50 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 31 Jan 2006 16:38:50 -0800 Subject: Comment tylanbpsg SNF 2006-01-30 13:42:13: Test Message-ID: complete. From gladys at snf.stanford.edu Tue Jan 31 16:57:02 2006 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Tue, 31 Jan 2006 16:57:02 -0800 Subject: Comment tylanbpsg SNF 2006-01-31 16:57:02: new boats Message-ID: Are these new boats be designated as the front one be for nonmetal wafers and the rear one be for metal contaminated wafers? What if I have 24 metal contaminated wafers (EE410) or 24 non metal wafers? Should I use both boats then? There's only 13 slots per boat.