From iwjung at snf.stanford.edu Sun Jul 2 16:30:42 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Sun, 2 Jul 2006 16:30:42 -0700 Subject: Comment tylanbpsg SNF 2006-07-02 16:30:42: mfs alarm at end of run Message-ID: The deposition was okay but there was a mfs alarm at the end of run. From dwburns at snf.stanford.edu Sun Jul 9 05:34:03 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sun, 9 Jul 2006 05:34:03 -0700 Subject: Problem tylanbpsg SNF 2006-07-09 05:34:03: PH3 Alarms Incessantly Message-ID: SiH4/PH3 flow controller light flashes and PH3 reads 0.1 sccm when alarm triggers; occurred prior to and after run. From mdickey at snf.stanford.edu Mon Jul 10 05:59:53 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Jul 2006 05:59:53 -0700 Subject: Shutdown tylanbpsg SNF 2006-07-10 05:59:52: Pull and clean Message-ID: Down for pull and clean From mdickey at snf.stanford.edu Mon Jul 10 13:53:26 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Jul 2006 13:53:26 -0700 Subject: Comment tylanbpsg SNF 2006-07-10 13:53:25: Test Message-ID: Sydyrm id in coat, will need test afterwards From mdickey at snf.stanford.edu Mon Jul 10 14:04:14 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Jul 2006 14:04:14 -0700 Subject: Comment tylanbpsg SNF 2006-07-10 14:04:13: language Message-ID: Sydrym means "System" in maintenance lingo From latta at snf.stanford.edu Tue Jul 11 15:22:48 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Jul 2006 15:22:48 -0700 Subject: Comment tylanbpsg SNF 2006-07-02 16:30:42: mfs alarm at end of run Message-ID: noted From latta at snf.stanford.edu Tue Jul 11 15:23:31 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Jul 2006 15:23:31 -0700 Subject: Problem tylanbpsg SNF 2006-05-09 14:41:10: high uniformity Message-ID: New test completed. See comments. From latta at snf.stanford.edu Tue Jul 11 15:23:51 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Jul 2006 15:23:51 -0700 Subject: Shutdown tylanbpsg SNF 2006-07-10 05:59:52: Pull and clean Message-ID: completed From latta at snf.stanford.edu Tue Jul 11 15:24:20 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Jul 2006 15:24:20 -0700 Subject: Comment tylanbpsg SNF 2006-07-10 13:53:25: Test Message-ID: test results posted o`in comments. From latta at snf.stanford.edu Tue Jul 11 15:25:30 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Jul 2006 15:25:30 -0700 Subject: Comment tylanbpsg SNF 2006-07-10 14:04:13: language Message-ID: Oh... thanks for the lesson in maintspeak...... From latta at snf.stanford.edu Tue Jul 11 15:32:00 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Jul 2006 15:32:00 -0700 Subject: Comment tylanbpsg SNF 2006-07-11 15:32:00: Uniformity results after pull & clean Message-ID: Nonmetal Boat Front- 1952, 2105, 2058, 2157, 2142 avr = 2088 Center 1477, 1520, 1720, 1605, 1733, avr = 1611 Back 1470. 1498, 1681, 1731, 1599 avr = 1586 Metal Boat Front 1991, 2222, 1729, 2131, 2015 avr = 2018 Back 2467, 2941, 2229, 2556, 2731 avr = 2584 From rwoo at snf.stanford.edu Wed Jul 19 20:58:57 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 19 Jul 2006 20:58:57 -0700 Subject: Problem tylanbpsg SNF 2006-07-19 20:58:57: non-metal boat broken Message-ID: On the non-metal boat source end, the piece that has the slots to hold the wafers (the one on the wall side of the boat) is broken and wiggles when loading and unloading wafers. The piece looks like it will fall off soon. From dwburns at snf.stanford.edu Thu Jul 20 03:13:18 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Thu, 20 Jul 2006 03:13:18 -0700 Subject: Comment tylanbpsg SNF 2006-07-20 03:13:17: Soft pump doesn't appear operable Message-ID: Step 40 of recipe LTO400 has a soft pump for the first minute+ as indicated by the panel controller light, followed by the opening of the gate valve with its controller light coming on. During the soft pump portion, the tube pressure continues upward until the gate valve opens, at which time the tube pressure drops dramatically. It doesn't appear that the soft pump is operable, and that this may be the case for quite awhile. From axiu at snf.stanford.edu Thu Jul 20 10:58:36 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Thu, 20 Jul 2006 10:58:36 -0700 Subject: Problem tylanbpsg SNF 2006-07-20 10:58:35: MFS alarmed then stoped by pushing ack Message-ID: back panel shows PH3 leakage for a few second From mdickey at snf.stanford.edu Thu Jul 20 13:18:09 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 20 Jul 2006 13:18:09 -0700 Subject: Problem tylanbpsg SNF 2006-07-20 10:58:35: MFS alarmed then stoped by pushing ack Message-ID: Noted...PH3 leak after run is normal intermittent problem. From mdickey at snf.stanford.edu Thu Jul 20 13:18:27 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 20 Jul 2006 13:18:27 -0700 Subject: Comment tylanbpsg SNF 2006-07-20 03:13:17: Soft pump doesn't appear operable Message-ID: Soft pump operation is fine. From mdickey at snf.stanford.edu Thu Jul 20 13:18:40 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 20 Jul 2006 13:18:40 -0700 Subject: Problem tylanbpsg SNF 2006-07-19 20:58:57: non-metal boat broken Message-ID: Boat bottom replaced. From mdickey at snf.stanford.edu Thu Jul 20 13:18:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 20 Jul 2006 13:18:54 -0700 Subject: Problem tylanbpsg SNF 2006-07-09 05:34:03: PH3 Alarms Incessantly Message-ID: Noted From maurice at snf.stanford.edu Mon Jul 24 14:50:50 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Jul 2006 14:50:50 -0700 Subject: Shutdown tylanbpsg SNF 2006-07-24 14:50:46: pump11 won't run Message-ID: problem reported by kevhuang when coral was down: fial leak check pump11 won't run From seymour at snf.stanford.edu Mon Jul 24 11:39:55 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Jul 2006 11:39:55 -0700 Subject: Shutdown tylanbpsg SNF 2006-07-24 07:15:48: Burn box down Message-ID: repaired faulty wire for element heater circut. burn box up to temp From ratiug at snf.stanford.edu Sun Jul 23 14:13:23 2006 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sun, 23 Jul 2006 14:13:23 -0700 Subject: Problem tylanbpsg SNF 2006-07-23 14:13:22: leak fail Message-ID: problem reported by kevhuang when coral was down: fial leak check pump11 won't run From tberg at snf.stanford.edu Mon Jul 24 07:15:49 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Jul 2006 07:15:49 -0700 Subject: Shutdown tylanbpsg SNF 2006-07-24 07:15:48: Burn box down Message-ID: So tool is down From seymour at snf.stanford.edu Mon Jul 24 15:24:17 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Jul 2006 15:24:17 -0700 Subject: Shutdown tylanbpsg SNF 2006-07-24 14:50:46: pump11 won't run Message-ID: during the nitride pump chande the pump cabinet circuit breaker tripped. The MFS460 controllers came back up in manual., not allowing the vac valve to be under auto control. Mike returned the MFS460 to auto. From maurice at snf.stanford.edu Mon Jul 24 15:26:16 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Jul 2006 15:26:16 -0700 Subject: Problem tylanbpsg SNF 2006-07-23 14:13:22: leak fail Message-ID: during the nitride pump chande the pump cabinet circuit breaker tripped. The MFS460 controllers came back up in manual., not allowing the vac valve to be under auto control. Mike returned the MFS460 to auto. From rwoo at snf.stanford.edu Wed Jul 26 22:25:38 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 26 Jul 2006 22:25:38 -0700 Subject: Problem tylanbpsg SNF 2006-07-26 22:25:38: low vacuum in metal wand Message-ID: The vacuum in the metal wand is really low - it is not enough to reliably pick up a wafer. The problem appears to be that the black tube is pinched off at several points due to the tube being burnt. The burn marks are near where the tube begins to coil on the wand end of the tube. This likely means that the LTO tube has been contaminated with burnt rubber. From mdickey at snf.stanford.edu Thu Jul 27 14:38:08 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 27 Jul 2006 14:38:08 -0700 Subject: Problem tylanbpsg SNF 2006-07-26 22:25:38: low vacuum in metal wand Message-ID: hose replaced. Nothing on the cantilever