Problem tylanbpsg SNF 2006-07-26 22:25:38: low vacuum in metal wand

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Wed Jul 26 22:25:38 PDT 2006


The vacuum in the metal wand is really low - it is not enough to reliably pick up a wafer.  The problem appears to be that the black tube is pinched off at several points due to the tube being burnt.  The burn marks are near where the tube begins to coil on the wand end of the tube.  This likely means that the LTO tube has been contaminated with burnt rubber.




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