From vipin at snf.stanford.edu Wed May 3 18:04:09 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 3 May 2006 18:04:09 -0700 Subject: Problem tylanbpsg SNF 2006-05-03 18:04:08: problem Message-ID: LTO non-metal boat broke due to stress fracture. From mdickey at snf.stanford.edu Thu May 4 07:03:13 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 4 May 2006 07:03:13 -0700 Subject: Problem tylanbpsg SNF 2006-05-03 18:04:08: problem Message-ID: Non-metal boat replaced From duygu at snf.stanford.edu Sat May 6 09:33:31 2006 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Sat, 6 May 2006 09:33:31 -0700 Subject: Problem tylanbpsg SNF 2006-05-06 09:33:22: pump problem, mfs alarm at step 20 Message-ID: From mdickey at snf.stanford.edu Mon May 8 08:19:09 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 8 May 2006 08:19:09 -0700 Subject: Problem tylanbpsg SNF 2006-05-06 09:33:22: pump problem, mfs alarm at step 20 Message-ID: Replaced broken sheath, ready for use when temp stabalizes From maurice at snf.stanford.edu Mon May 8 16:47:47 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 May 2006 16:47:47 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-08 16:47:47: Tube not venting Message-ID: From mdickey at snf.stanford.edu Tue May 9 09:29:52 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 9 May 2006 09:29:52 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-08 16:47:47: Tube not venting Message-ID: Replaced door gasket and tube vented properly. Doing a couple of boat out tests From maurice at snf.stanford.edu Tue May 9 14:41:10 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 May 2006 14:41:10 -0700 Subject: Problem tylanbpsg SNF 2006-05-09 14:41:10: high uniformity Message-ID: Khanh reports high uniformity non metal boat, 26 slots, all slots full t,c,b,l,r wafer 10, 818, 756, 755, 780, 803 7.7% wafer15, 631, 564, 560, 581, 603 12.1% From aokyay at snf.stanford.edu Wed May 10 01:00:24 2006 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Wed, 10 May 2006 01:00:24 -0700 Subject: Problem tylanbpsg SNF 2006-05-10 01:00:24: non-uniformity Message-ID: LTO400 10min deposition wafers loaded in the full, 26-slot, non-metal boat ~100% non-uniformity Top side of the wafer ~400A Bottom side ~800A From maurice at snf.stanford.edu Wed May 10 14:40:51 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 May 2006 14:40:51 -0700 Subject: Comment tylanbpsg SNF 2006-05-10 14:40:50: uniformity test Message-ID: 20min LTO400 non metal boat, 26 slots, all slots full t,c,b,l,r wafer 3: 1720, 1661, 1936, 1874, 1759 15% wafer 13: 1603, 1533, 1842, 1698, 1584 18.7% wafer 24: 1793, 1903, 1792, 1941, 1829 7.9% From maurice at snf.stanford.edu Thu May 11 09:30:35 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 May 2006 09:30:35 -0700 Subject: Comment tylanbpsg SNF 2006-05-11 09:30:35: Uniformity test Message-ID: 20min LTO400 non metal boat, 26 slots, all slots full t,c,b,l,r wafer 3: 1299, 1528, 1113, 1393, 1262 wafer8: 1315, 1557, 1105, 1384, 1198 wafer 13: 1136, 1579, 1186, 1407, 1205 wafer 24: 1526, 1761, 1380, 1746, 1395 From maurice at snf.stanford.edu Thu May 11 10:19:26 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 May 2006 10:19:26 -0700 Subject: Comment tylanbpsg SNF 2006-05-11 10:19:25: injectors rotated Message-ID: Mike rotated injectors / \ From maurice at snf.stanford.edu Fri May 12 11:28:52 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 May 2006 11:28:52 -0700 Subject: Comment tylanbpsg SNF 2006-05-12 11:28:19: Uniformity after injector rotation Message-ID: 20min LTO400 non metal boat, 26 slots, all slots full t,c,b,l,r wafer 3: 1400, 1528, 1630, 1267, 1643 ~25% wafer 8: 1442, 1356, 1593, 1458, 1577 ~16% wafer 13: 1504, 1510, 1659, 1469, 1634 ~12% wafer 24: 1652, 1640, 1841, 1685,1825 ~10 From ericp at snf.stanford.edu Sun May 14 18:58:39 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 14 May 2006 18:58:39 -0700 Subject: Problem tylanbpsg SNF 2006-05-14 18:58:38: SiH4 out Message-ID: The same SiH4 bottle hits this one too, so BPSG is down due to lack of SiH4. From pethe at snf.stanford.edu Sun May 14 19:17:09 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Sun, 14 May 2006 19:17:09 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-14 19:17:09: No silane flow Message-ID: From tberg at snf.stanford.edu Mon May 15 06:24:31 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 May 2006 06:24:31 -0700 Subject: Problem tylanbpsg SNF 2006-05-14 18:58:38: SiH4 out Message-ID: SiH4 back on From tberg at snf.stanford.edu Mon May 15 06:24:48 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 May 2006 06:24:48 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-14 19:17:09: No silane flow Message-ID: Silane back on From aokyay at snf.stanford.edu Mon May 15 16:00:20 2006 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Mon, 15 May 2006 16:00:20 -0700 Subject: Comment tylanbpsg SNF 2006-05-15 16:00:20: PH3 mfc zero drifted Message-ID: From jrjain at snf.stanford.edu Sun May 21 21:18:59 2006 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 21 May 2006 21:18:59 -0700 Subject: Problem tylanbpsg SNF 2006-05-21 21:18:57: Oxide Buildup and Flaking Message-ID: Significant oxide buildup and cracking/flaking is on the boats, cantilevers, and baffles. The flaking is great enough that large quantities of oxide (much more than average) freely fall off, even when the tube is out and stationary. It appears that all three (boats, cantilevers, and baffles) are in need of cleaning. From mdickey at snf.stanford.edu Mon May 22 07:12:44 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 22 May 2006 07:12:44 -0700 Subject: Problem tylanbpsg SNF 2006-05-21 21:18:57: Oxide Buildup and Flaking Message-ID: Vacuumed up loose particles and replaced broken boat top Note to users: when putting the top of the boat down on the load station, do so carefully. We are seeing a lot of of breaks on the pins From tberg at snf.stanford.edu Mon May 22 07:45:46 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 May 2006 07:45:46 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-22 07:45:45: shutdown for water and air tie ins Message-ID: From tberg at snf.stanford.edu Mon May 22 09:04:21 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 May 2006 09:04:21 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-22 07:45:45: shutdown for water and air tie ins Message-ID: tie in completed From kevhuang at snf.stanford.edu Thu May 25 13:32:17 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Thu, 25 May 2006 13:32:17 -0700 Subject: Problem tylanbpsg SNF 2006-05-25 13:32:16: MFS alarm Message-ID: during N2 purge after deposition; SiH4, PH3 LED flashing From libei at snf.stanford.edu Sat May 27 05:48:52 2006 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Sat, 27 May 2006 05:48:52 -0700 Subject: Problem tylanbpsg SNF 2006-05-27 05:48:51: pump11 ends by itself Message-ID: After I loaded and run pump11, the tube goes to "end" and made a noise. Tried several times, but the same thing happened. From vipin at snf.stanford.edu Sat May 27 16:21:58 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Sat, 27 May 2006 16:21:58 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-27 16:21:57: problem Message-ID: Does not pump down. During hard pump the pressure doesn't drop. Can hear a sucking noise near the cantilever area. From mdickey at snf.stanford.edu Tue May 30 08:04:21 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 30 May 2006 08:04:21 -0700 Subject: Shutdown tylanbpsg SNF 2006-05-27 16:21:57: problem Message-ID: Replaced broken sheath and injectors...back in pump From mdickey at snf.stanford.edu Tue May 30 08:04:33 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 30 May 2006 08:04:33 -0700 Subject: Problem tylanbpsg SNF 2006-05-27 05:48:51: pump11 ends by itself Message-ID: Noted From mdickey at snf.stanford.edu Tue May 30 08:04:45 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 30 May 2006 08:04:45 -0700 Subject: Problem tylanbpsg SNF 2006-05-25 13:32:16: MFS alarm Message-ID: noted