From maurice at snf.stanford.edu Wed Nov 1 10:31:01 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Nov 2006 10:31:01 -0800 Subject: Problem tylanbpsg SNF 2006-10-27 10:54:24: Test Message-ID: Ann's test had a normal deposition rate From maurice at snf.stanford.edu Wed Nov 1 10:31:50 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Nov 2006 10:31:50 -0800 Subject: Comment tylanbpsg SNF 2006-10-11 06:40:48: Not enough dummies Message-ID: dummies added From latta at snf.stanford.edu Wed Nov 1 14:04:24 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 14:04:24 -0800 Subject: Problem tylanbpsg SNF 2006-11-01 14:04:24: PH3 leak during step 95... Message-ID: From kevhuang at snf.stanford.edu Fri Nov 3 15:55:47 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Fri, 3 Nov 2006 15:55:47 -0800 Subject: Problem tylanbpsg SNF 2006-11-03 15:55:45: MFS alarm during step 95 of LTO400 Message-ID: From king at snf.stanford.edu Fri Nov 3 17:19:19 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 3 Nov 2006 17:19:19 -0800 Subject: Problem tylanbpsg SNF 2006-11-03 17:19:19: MFC SiH4/PH3 alarm error again Message-ID: It seems unsafe to have alarms that people have to ignore. Can we get this fixed? Thanks. From king at snf.stanford.edu Fri Nov 3 17:23:10 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 3 Nov 2006 17:23:10 -0800 Subject: Comment tylanbpsg SNF 2006-11-03 17:23:09: Re MFC alarm Message-ID: BTW, it came on when the LTO pump program was stopped and the tube started venting, not in the middle of a run. From tberg at snf.stanford.edu Mon Nov 6 07:06:27 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Nov 2006 07:06:27 -0800 Subject: Problem tylanbpsg SNF 2006-11-03 15:55:45: MFS alarm during step 95 of LTO400 Message-ID: Already entered From tberg at snf.stanford.edu Mon Nov 6 07:06:49 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Nov 2006 07:06:49 -0800 Subject: Problem tylanbpsg SNF 2006-11-03 17:19:19: MFC SiH4/PH3 alarm error again Message-ID: Already entered From tberg at snf.stanford.edu Mon Nov 6 07:07:14 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Nov 2006 07:07:14 -0800 Subject: Problem tylanbpsg SNF 2006-10-31 16:04:27: MFS alarm Message-ID: Already entered From king at snf.stanford.edu Wed Nov 8 22:45:17 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 8 Nov 2006 22:45:17 -0800 Subject: Comment tylanbpsg SNF 2006-11-08 22:45:16: SiH4/PH3 MFC Message-ID: Alarming on ofidaner's run at step 95. FYI. From robinhmb at yahoo.com Thu Nov 9 04:05:23 2006 From: robinhmb at yahoo.com (Robin King) Date: Thu, 9 Nov 2006 04:05:23 -0800 (PST) Subject: Comment tylanbpsg SNF 2006-11-08 22:45:16: SiH4/PH3 MFC In-Reply-To: <20061109064517.CD0964CC0F@smtp3.stanford.edu> Message-ID: <20061109120523.35670.qmail@web54713.mail.yahoo.com> Alarmed on my run too. --- king at snf.stanford.edu wrote: > Alarming on ofidaner's run at step 95. FYI. > > ____________________________________________________________________________________ Do you Yahoo!? Everyone is raving about the all-new Yahoo! Mail beta. http://new.mail.yahoo.com From tberg at snf.stanford.edu Fri Nov 10 08:43:43 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 10 Nov 2006 08:43:43 -0800 Subject: Comment tylanbpsg SNF 2006-11-03 17:23:09: Re MFC alarm Message-ID: noted From tberg at snf.stanford.edu Fri Nov 10 08:44:03 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 10 Nov 2006 08:44:03 -0800 Subject: Comment tylanbpsg SNF 2006-11-08 22:45:16: SiH4/PH3 MFC Message-ID: noted From seymour at snf.stanford.edu Fri Nov 10 08:53:13 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Nov 2006 08:53:13 -0800 Subject: Problem tylanbpsg SNF 2006-11-01 14:04:24: PH3 leak during step 95... Message-ID: changed PH3 MFC and leak checked system From kimsora at snf.stanford.edu Fri Nov 10 21:54:53 2006 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Fri, 10 Nov 2006 21:54:53 -0800 Subject: Problem tylanbpsg SNF 2006-11-10 21:54:52: PH3 gas does not come out. Message-ID: I ran PSG400. MFS alarmed at the deposition step due to the lack of PH3 gas. I got a very thin layer with thickness of 700A, which was supposed to be 5000A. From tberg at snf.stanford.edu Mon Nov 13 06:59:27 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Nov 2006 06:59:27 -0800 Subject: Problem tylanbpsg SNF 2006-11-10 21:54:52: PH3 gas does not come out. Message-ID: PH3 Valve turned on From tberg at snf.stanford.edu Mon Nov 13 07:00:17 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Nov 2006 07:00:17 -0800 Subject: Comment tylanbpsg SNF 2006-11-13 07:00:16: Still has intermittant PH3 leak alarms Message-ID: From maurice at snf.stanford.edu Wed Nov 15 10:15:48 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Nov 2006 10:15:48 -0800 Subject: Comment tylanbpsg SNF 2006-11-15 10:15:48: status 11/15/06 Message-ID: Many of you have noticed the PH3 mfc alarming at the end of runs in BPSG. There was a zero drift... the mfc should have been reading zero flow but sometimes is would drift to 0.1 or 0.2. There was never any gas flowing but the programmer is set to alarm if the mfc sees a flow when it should not see one. Last week the mfc was replaced but this did not solve the problem. Our local vendor (Tylan/Tystar?) is currently burning a new eprom that we hope will eliminate the problem. We will update you when we have more info on this annoying problem. -m From tberg at snf.stanford.edu Wed Nov 15 12:31:00 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 15 Nov 2006 12:31:00 -0800 Subject: Comment tylanbpsg SNF 2006-11-15 12:31:00: Eprom is here. Will install tomorrow Message-ID: From tberg at snf.stanford.edu Thu Nov 16 06:23:25 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Nov 2006 06:23:25 -0800 Subject: Shutdown tylanbpsg SNF 2006-11-16 06:23:24: changing eprom Message-ID: From mdickey at snf.stanford.edu Thu Nov 16 08:37:12 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Nov 2006 08:37:12 -0800 Subject: Comment tylanbpsg SNF 2006-11-16 08:37:11: Test Message-ID: Eprom changed...running LTO400 for a test From tberg at snf.stanford.edu Thu Nov 16 09:34:40 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Nov 2006 09:34:40 -0800 Subject: Shutdown tylanbpsg SNF 2006-11-16 06:23:24: changing eprom Message-ID: EPROM changed From tberg at snf.stanford.edu Thu Nov 16 09:34:55 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Nov 2006 09:34:55 -0800 Subject: Comment tylanbpsg SNF 2006-11-16 08:37:11: Test Message-ID: test completed From tberg at snf.stanford.edu Thu Nov 16 09:35:17 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Nov 2006 09:35:17 -0800 Subject: Comment tylanbpsg SNF 2006-11-15 12:31:00: Eprom is here. Will install tomorrow Message-ID: Installed Eprom From gyama at snf.stanford.edu Tue Nov 21 14:41:05 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 21 Nov 2006 14:41:05 -0800 Subject: Comment tylanbpsg SNF 2006-11-21 14:41:04: LTO450 failed leak ck 2x after long hold in Message-ID: step 35 From tberg at snf.stanford.edu Tue Nov 21 14:50:35 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 21 Nov 2006 14:50:35 -0800 Subject: Comment tylanbpsg SNF 2006-11-13 07:00:16: Still has intermittant PH3 leak alarms Message-ID: gone From robinhmb at yahoo.com Mon Nov 27 16:23:11 2006 From: robinhmb at yahoo.com (Robin King) Date: Mon, 27 Nov 2006 16:23:11 -0800 (PST) Subject: reservation cancelled Message-ID: <39935.55829.qm@web58715.mail.re1.yahoo.com> It's available until 7:30 pm; time enough for a clean and quick run. ____________________________________________________________________________________ Do you Yahoo!? Everyone is raving about the all-new Yahoo! Mail beta. http://new.mail.yahoo.com From maurice at snf.stanford.edu Tue Nov 28 16:50:26 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Nov 2006 16:50:26 -0800 Subject: Comment tylanbpsg SNF 2006-11-28 16:50:25: quartz tube broken on tong/fork thingy Message-ID: From mdickey at snf.stanford.edu Wed Nov 29 07:38:04 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 29 Nov 2006 07:38:04 -0800 Subject: Comment tylanbpsg SNF 2006-11-28 16:50:25: quartz tube broken on tong/fork thingy Message-ID: Boat fork sheath thinga ma jiggy replaced From axiu at snf.stanford.edu Wed Nov 29 22:00:50 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Wed, 29 Nov 2006 22:00:50 -0800 Subject: Problem tylanbpsg SNF 2006-11-29 22:00:50: Non metal boat broken Message-ID: From mdickey at snf.stanford.edu Thu Nov 30 08:24:23 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 30 Nov 2006 08:24:23 -0800 Subject: Problem tylanbpsg SNF 2006-11-29 22:00:50: Non metal boat broken Message-ID: Boat has been replaced