From maurice at snf.stanford.edu Wed Oct 4 15:08:45 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Oct 2006 15:08:45 -0700 Subject: Comment tylanbpsg SNF 2006-10-04 15:08:44: non-metal boat replaced Message-ID: non-metal boat and wafers replaced users had put metal wafers in the non metal boat and then deposited 3.6 microns From tberg at snf.stanford.edu Thu Oct 5 06:12:49 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 Oct 2006 06:12:49 -0700 Subject: Problem tylanbpsg SNF 2006-09-21 10:11:34: LTO450 >100leak in step 45, twice, aborted run Message-ID: No problem since From mdickey at snf.stanford.edu Mon Oct 9 06:44:29 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 9 Oct 2006 06:44:29 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-09 06:44:28: Pull and clean Message-ID: Down for pull and clean From maurice at snf.stanford.edu Tue Oct 10 17:43:05 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 10 Oct 2006 17:43:05 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-09 06:44:28: Pull and clean Message-ID: test complete lto400 00:20:00 1978 Ang From kuanlinc at snf.stanford.edu Wed Oct 11 06:40:48 2006 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Wed, 11 Oct 2006 06:40:48 -0700 Subject: Comment tylanbpsg SNF 2006-10-11 06:40:48: Not enough dummies Message-ID: Too many uncleanable nonmetal dummies. Have dumped in 6:1 BOE for 4 hrs but still see stains on them. I've put them in the box by the log book. From maurice at snf.stanford.edu Thu Oct 12 12:19:00 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Oct 2006 12:19:00 -0700 Subject: Problem tylanbpsg SNF 2006-10-12 12:18:59: user reports non uniformity Message-ID: In non metal boat running 13 wafers axiu reports 625 ang in slot 2, 1019 in slot 13 1731 in slot 25 From maurice at snf.stanford.edu Thu Oct 12 12:20:38 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Oct 2006 12:20:38 -0700 Subject: Comment tylanbpsg SNF 2006-10-04 15:08:44: non-metal boat replaced Message-ID: logged From maurice at snf.stanford.edu Thu Oct 12 13:57:09 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Oct 2006 13:57:09 -0700 Subject: Comment tylanbpsg SNF 2006-10-12 13:57:09: running a uniformity test Message-ID: From maurice at snf.stanford.edu Thu Oct 12 16:58:12 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Oct 2006 16:58:12 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-12 16:58:08: dep rate lo Message-ID: LTO400 00:30:00 expected 3000ang deposited only 449 ang pressure and flows and temp looked ok pressure=258.3 O2=136 SiH4= 155 temp=400 From maurice at snf.stanford.edu Fri Oct 13 14:14:29 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Oct 2006 14:14:29 -0700 Subject: Comment tylanbpsg SNF 2006-10-13 14:14:27: LTO test: lo dep rate Message-ID: In non metal boat running 26 wafers expected 1500 ang 330 ang in slot 3, 412 in slot 12 459 in slot 13 610 in slot 24 From maurice at snf.stanford.edu Fri Oct 13 16:46:20 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Oct 2006 16:46:20 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-12 16:58:08: dep rate lo Message-ID: Dep rate is low. Uniformity is very bad. I am yellow lighting system for the weekend. Some users may have sacraficial layers they want to deposit. Mike will take the system down monday morning From king at snf.stanford.edu Sat Oct 14 02:41:44 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 14 Oct 2006 02:41:44 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-14 02:41:44: broken rail quartz Message-ID: Ran a test run on the metal boat and unloaded wafers (came out mediocre but useable). While the assembly pushed back in there was a small "clink" sound. Inspected but didn't see anything wrong. Loaded process wafers and then the tube wouldn't pump- gross leak. Discovered the broken quartz. Also, before loading the first/successful test run some discoloration was visible on the inside of the quartz rails or on the ceramic rails. Lots of dark speckles like Si particles on the outside. There's a small but significant indent in the tube edge/sealing sealing surface at the bottom that should be looked at. Maybe Eric P could shut off the heat to save the seal and for maintenance. From mdickey at snf.stanford.edu Mon Oct 16 08:33:24 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 16 Oct 2006 08:33:24 -0700 Subject: Comment tylanbpsg SNF 2006-10-16 08:33:23: Broken quartz Message-ID: Replaced broken injectors and cantilever sheath. Addressing base pressure and leak rate issues From mdickey at snf.stanford.edu Mon Oct 16 08:33:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 16 Oct 2006 08:33:54 -0700 Subject: Comment tylanbpsg SNF 2006-10-16 08:33:23: Broken quartz Message-ID: Replaced From mdickey at snf.stanford.edu Mon Oct 16 08:34:05 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 16 Oct 2006 08:34:05 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-14 02:41:44: broken rail quartz Message-ID: Replaced From mdickey at snf.stanford.edu Mon Oct 16 08:34:23 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 16 Oct 2006 08:34:23 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-16 08:34:22: Leak rate Message-ID: Down for leak rate issues From maurice at snf.stanford.edu Tue Oct 17 17:12:50 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Oct 2006 17:12:50 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-16 08:34:22: Leak rate Message-ID: Mike pulled Tube and replaced cantilevers LTO400 deprate bake to normal 00:20:00 gave ~1700ang From maurice at snf.stanford.edu Tue Oct 17 17:15:16 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Oct 2006 17:15:16 -0700 Subject: Problem tylanbpsg SNF 2006-10-12 12:18:59: user reports non uniformity Message-ID: tube pulled From maurice at snf.stanford.edu Tue Oct 17 17:15:29 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Oct 2006 17:15:29 -0700 Subject: Comment tylanbpsg SNF 2006-10-13 14:14:27: LTO test: lo dep rate Message-ID: logged From maurice at snf.stanford.edu Tue Oct 17 17:15:39 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Oct 2006 17:15:39 -0700 Subject: Comment tylanbpsg SNF 2006-10-12 13:57:09: running a uniformity test Message-ID: logged From king at snf.stanford.edu Thu Oct 19 19:27:30 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 19 Oct 2006 19:27:30 -0700 Subject: Comment tylanbpsg SNF 2006-10-19 19:27:30: FYI, venting problem, cleared up Message-ID: Last night the N2 MFC alarmed repeatedly and it wouldn't vent to atmosphere at the end of the recipe. Aborted and cycled the gate valve a number of times and eventually it worked. It's not clear if the problem was a sticking gate valve or a bad MFC but it seems to be working for the moment. Good to keep an eye on this. Coral was down. From kevhuang at snf.stanford.edu Mon Oct 23 12:33:09 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 23 Oct 2006 12:33:09 -0700 Subject: Comment tylanbpsg SNF 2006-10-23 12:33:08: quartz fork broken Message-ID: one finger of the fork is broken (it's still on the fork but it's actually broken) From tberg at snf.stanford.edu Thu Oct 26 14:06:55 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 26 Oct 2006 14:06:55 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-26 14:06:54: Broken Injector and Cantilever sheath Message-ID: From mdickey at snf.stanford.edu Fri Oct 27 10:53:56 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 27 Oct 2006 10:53:56 -0700 Subject: Shutdown tylanbpsg SNF 2006-10-26 14:06:54: Broken Injector and Cantilever sheath Message-ID: Replaced injectors and sheath. From mdickey at snf.stanford.edu Fri Oct 27 10:54:24 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 27 Oct 2006 10:54:24 -0700 Subject: Problem tylanbpsg SNF 2006-10-27 10:54:24: Test Message-ID: Ann will do a 3 minute deposition test From tberg at snf.stanford.edu Mon Oct 30 06:36:25 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Oct 2006 06:36:25 -0800 Subject: Comment tylanbpsg SNF 2006-10-19 19:27:30: FYI, venting problem, cleared up Message-ID: Quartz changed From tberg at snf.stanford.edu Tue Oct 31 06:21:16 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 31 Oct 2006 06:21:16 -0800 Subject: Comment tylanbpsg SNF 2006-10-23 12:33:08: quartz fork broken Message-ID: replaced From kimsora at snf.stanford.edu Tue Oct 31 16:04:28 2006 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Tue, 31 Oct 2006 16:04:28 -0800 Subject: Problem tylanbpsg SNF 2006-10-31 16:04:27: MFS alarm Message-ID: the ph3 value is 0.1 when it should be 0. From king at snf.stanford.edu Tue Oct 31 21:28:07 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 31 Oct 2006 21:28:07 -0800 Subject: Comment tylanbpsg SNF 2006-10-31 21:28:06: Below ATM always indicated Message-ID: Light is on when tube is open.