From mdickey at snf.stanford.edu Mon Apr 2 06:02:53 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 2 Apr 2007 06:02:53 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-02 06:02:52: Tube pull Message-ID: Down for pull and clean From mdickey at snf.stanford.edu Tue Apr 3 12:47:47 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 3 Apr 2007 12:47:47 -0700 Subject: Comment tylanbpsg SNF 2007-04-03 12:47:46: Test and coat Message-ID: A test will be needed after the coat recipe is done From maurice at snf.stanford.edu Tue Apr 3 15:48:35 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Apr 2007 15:48:35 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-02 06:02:52: Tube pull Message-ID: Tube pulled cleaned and coated. Khanh is running a test. From maurice at snf.stanford.edu Tue Apr 3 15:48:50 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Apr 2007 15:48:50 -0700 Subject: Comment tylanbpsg SNF 2007-02-07 12:51:28: where are the non metal dummies?? Message-ID: logged From maurice at snf.stanford.edu Tue Apr 3 15:49:13 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Apr 2007 15:49:13 -0700 Subject: Problem tylanbpsg SNF 2007-04-03 15:49:13: User running a test Message-ID: Tube pulled cleaned and coated. Khanh is running a test. From maurice at snf.stanford.edu Tue Apr 3 15:49:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Apr 2007 15:49:29 -0700 Subject: Comment tylanbpsg SNF 2007-03-26 13:24:21: Message-ID: logged From maurice at snf.stanford.edu Tue Apr 3 15:49:39 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Apr 2007 15:49:39 -0700 Subject: Comment tylanbpsg SNF 2007-03-02 16:32:08: No clean dummies when trying to change Message-ID: logged From maurice at snf.stanford.edu Tue Apr 3 15:49:50 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Apr 2007 15:49:50 -0700 Subject: Comment tylanbpsg SNF 2007-01-24 10:52:59: test results Message-ID: logged From maurice at snf.stanford.edu Tue Apr 3 15:49:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Apr 2007 15:49:59 -0700 Subject: Comment tylanbpsg SNF 2007-03-05 14:00:02: thickness result Message-ID: logged From khanh at snf.stanford.edu Tue Apr 3 19:06:04 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Tue, 3 Apr 2007 19:06:04 -0700 Subject: Problem tylanbpsg SNF 2007-04-03 19:06:04: Test Result Message-ID: Did run a test. Expected 450A and got on 375A. From maurice at snf.stanford.edu Mon Apr 9 09:30:11 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Apr 2007 09:30:11 -0700 Subject: Problem tylanbpsg SNF 2007-04-03 19:06:04: Test Result Message-ID: user reports dep rate is normal From maurice at snf.stanford.edu Mon Apr 9 09:30:17 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Apr 2007 09:30:17 -0700 Subject: Problem tylanbpsg SNF 2007-04-03 15:49:13: User running a test Message-ID: user reports dep rate is normal From maurice at snf.stanford.edu Mon Apr 9 09:30:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Apr 2007 09:30:28 -0700 Subject: Comment tylanbpsg SNF 2007-04-03 12:47:46: Test and coat Message-ID: complete From filip at snf.stanford.edu Fri Apr 13 20:33:53 2007 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 13 Apr 2007 20:33:53 -0700 Subject: Problem tylanbpsg SNF 2007-04-13 20:33:51: non-metal boat broke Message-ID: The back wall of the bottom piece of the boat fell off while I was unloading wafers. I took the whole boat out and placed it by the tube. No non-metal runs until boat is replaced. From chozone at snf.stanford.edu Mon Apr 16 22:49:58 2007 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Mon, 16 Apr 2007 22:49:58 -0700 Subject: Problem tylanbpsg SNF 2007-04-16 22:49:58: No cover for the non-metal boat Message-ID: From chozone at snf.stanford.edu Tue Apr 17 02:42:34 2007 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Tue, 17 Apr 2007 02:42:34 -0700 Subject: Problem tylanbpsg SNF 2007-04-17 02:42:34: Put the non-metal cover from the orange color box Message-ID: From maurice at snf.stanford.edu Tue Apr 17 10:01:17 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Apr 2007 10:01:17 -0700 Subject: Problem tylanbpsg SNF 2007-04-16 22:49:58: No cover for the non-metal boat Message-ID: In orange box From maurice at snf.stanford.edu Tue Apr 17 10:01:38 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Apr 2007 10:01:38 -0700 Subject: Problem tylanbpsg SNF 2007-04-13 20:33:51: non-metal boat broke Message-ID: bottom replaced From maurice at snf.stanford.edu Fri Apr 20 11:14:06 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 Apr 2007 11:14:06 -0700 Subject: Problem tylanbpsg SNF 2007-04-17 02:42:34: Put the non-metal cover from the orange color box Message-ID: logged From mmessana at snf.stanford.edu Sat Apr 21 15:03:34 2007 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Sat, 21 Apr 2007 15:03:34 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-21 15:03:33: MFS Alarm Message-ID: PUMP11 program won't run. From ericp at snf.stanford.edu Sat Apr 21 18:04:12 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 21 Apr 2007 18:04:12 -0700 Subject: Comment tylanbpsg SNF 2007-04-21 18:04:11: LTO problem is broken cantellever sheath Message-ID: Jia and I just looked at LTO: Just as happened a week or so ago, the reason LTO won't pump is because the cantellever sheath is cracked. I had thought it was mechanical stress, but could this be caused by thermal stress? From tberg at snf.stanford.edu Mon Apr 23 06:35:16 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Apr 2007 06:35:16 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-23 06:35:16: Down for pull and clean Message-ID: From tberg at snf.stanford.edu Mon Apr 23 06:35:46 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Apr 2007 06:35:46 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-21 15:03:33: MFS Alarm Message-ID: Sheath broken taking it down for pull and clean From tberg at snf.stanford.edu Mon Apr 23 06:35:57 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Apr 2007 06:35:57 -0700 Subject: Comment tylanbpsg SNF 2007-04-21 18:04:11: LTO problem is broken cantellever sheath Message-ID: noted From maurice at snf.stanford.edu Tue Apr 24 15:53:21 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Apr 2007 15:53:21 -0700 Subject: Comment tylanbpsg SNF 2007-04-24 15:53:20: testing Message-ID: From maurice at snf.stanford.edu Tue Apr 24 17:41:31 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Apr 2007 17:41:31 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-23 06:35:16: Down for pull and clean Message-ID: pulled, cleaned, coated and tested. Green! From kevhuang at snf.stanford.edu Thu Apr 26 12:15:20 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Thu, 26 Apr 2007 12:15:20 -0700 Subject: Problem tylanbpsg SNF 2007-04-26 12:15:19: dots in LTO under microscope Message-ID: From fengj at snf.stanford.edu Fri Apr 27 14:40:10 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Fri, 27 Apr 2007 14:40:10 -0700 Subject: Problem tylanbpsg SNF 2007-04-27 14:40:10: Be careful with the LTO disk Message-ID: The LTO disk has been broken a little bit at the upper edge. Please be gentle when handling this disk. Maurice will take care of it on Monday. From king at snf.stanford.edu Fri Apr 27 23:21:28 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 27 Apr 2007 23:21:28 -0700 Subject: Problem tylanbpsg SNF 2007-04-27 23:21:27: Huge thickness gradient across boat Message-ID: Ran our standard 2 minute LTO400 deposition in the 12 wafer metal boat. Expected 450A. The front got about 150A and the back got about 425A. Front refractive index was 1.5; back was 1.47. Next user Jia noticed the temp had dropped by 50C in the front, on a LTO300 recipe and also got no deposition. Problem could be temp and/or injectors. From fengj at snf.stanford.edu Sat Apr 28 00:46:54 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 28 Apr 2007 00:46:54 -0700 Subject: Problem tylanbpsg SNF 2007-04-28 00:46:53: Abnormal deposition Message-ID: 1. As Robin mentioned above, I tried LTO300 deposition for 2.5 min and got a film thickness <20 A. TEMPL was around 50 degrees lower than 300. 2. Then I redid the same thing and TEMPL was 275. I got a film thickness of 283 A. But the edge of the wafer looks milky. Under dark field microscope, there is a spread of particles from the edge of the wafer towards the center. Eric suggests that there may also be a problem with the injector. From grahamab at snf.stanford.edu Sat Apr 28 15:03:46 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 28 Apr 2007 15:03:46 -0700 Subject: Problem tylanbpsg SNF 2007-04-28 15:03:46: was boated out for 1.5hrs due to lab shutdown Message-ID: From grahamab at snf.stanford.edu Sat Apr 28 15:21:40 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 28 Apr 2007 15:21:40 -0700 Subject: Problem tylanbpsg SNF 2007-04-28 15:21:39: no dep Message-ID: I wasn't terribly concerned about uniformity from front to back of boat and went ahead with dep. 2 hour dep resulted in essentially zero oxide deposition. From grahamab at snf.stanford.edu Sat Apr 28 15:36:16 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 28 Apr 2007 15:36:16 -0700 Subject: Comment tylanbpsg SNF 2007-04-28 15:36:15: no dep more info Message-ID: Forgot to include this before. LTO400, nonmetal boat. From kevhuang at snf.stanford.edu Sun Apr 29 17:22:17 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sun, 29 Apr 2007 17:22:17 -0700 Subject: Problem tylanbpsg SNF 2007-04-29 17:22:16: non-uniform deposition Message-ID: metal boat, LTO400, 90min. gave deposition of around 1.3 um in the middle of the boat, the next wafer toward to outside of the tube gave 1 um and the next wafer toward the service area gave 1.5 um. No particles this time though. From vipin at snf.stanford.edu Mon Apr 30 09:21:19 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Mon, 30 Apr 2007 09:21:19 -0700 Subject: Problem tylanbpsg SNF 2007-04-30 09:21:18: Slow dep rate Message-ID: Tried depositing 2.00 um of LTO. Got ~2000A deposition From vipin at snf.stanford.edu Mon Apr 30 12:00:18 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Mon, 30 Apr 2007 12:00:18 -0700 Subject: Problem tylanbpsg SNF 2007-04-30 12:00:17: Bad dep Message-ID: Very slow dep rate. 1/10th of expected. From robinhmb at yahoo.com Mon Apr 30 12:33:53 2007 From: robinhmb at yahoo.com (Robin King) Date: Mon, 30 Apr 2007 12:33:53 -0700 (PDT) Subject: tylanbpsg-- should be a shutdown In-Reply-To: <20070430190018.91EF44C8D5@smtp1.stanford.edu> Message-ID: <27919.4963.qm@web58710.mail.re1.yahoo.com> Hi, I think we should put the tube put on shutdown and get it fixed, as it seems to be a real problem. --- vipin at snf.stanford.edu wrote: > Very slow dep rate. 1/10th of expected. > > __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From khanh at snf.stanford.edu Mon Apr 30 12:36:46 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Mon, 30 Apr 2007 12:36:46 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-30 12:36:45: Dep. rate not uniform and too low Message-ID: