From rohits at snf.stanford.edu Wed Aug 1 00:52:00 2007 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Wed, 1 Aug 2007 00:52:00 -0700 Subject: Problem tylanbpsg SNF 2007-08-01 00:51:59: Boat fork sheath broken Message-ID: Found the quartz sheath on the LTO boat fork broken. Used it anyway for the metal side boat cover handling. From rohits at snf.stanford.edu Wed Aug 1 01:01:43 2007 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Wed, 1 Aug 2007 01:01:43 -0700 Subject: Problem tylanbpsg SNF 2007-08-01 01:01:42: haze/particles on some wafers Message-ID: Ran LTO400 for 00:04:20, 13 wafer load in metal-side boat. Found a hazy stripe (visible to naked eye and prominent under black lamp illumination) on 2 out of 8 wafers. In both cases, the stripe extended from the wafer bottom towards center (flat down). Wafers were loaded flat up and polished side facing into the furnace. Examination of the stripe under optical microscope dark field reveals many particles. Dep rate was as expected. Measured 5 monitor wafers on litho nanospec (5 pt) Overall avg = 1003A, s/d=51A. Intra wafer s/d ranged from 44 - 58A. similar intra-wafer thickness pattern on all wafers. Eg. T/C/B/L/R: 1005/1015/1023/968/1089 From mdickey at snf.stanford.edu Wed Aug 1 08:34:24 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 1 Aug 2007 08:34:24 -0700 Subject: Problem tylanbpsg SNF 2007-08-01 00:51:59: Boat fork sheath broken Message-ID: reaplaced From rohits at snf.stanford.edu Wed Aug 1 10:41:19 2007 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:41:19 -0700 Subject: Comment tylanbpsg SNF 2007-08-01 10:41:18: clarification to my problem report of 08/01 - haze location Message-ID: The location of the hazy streak was from the wafer top toward the center when inspected with the flat down. The wafers were loaded with flat up during the deposition. Sorry for the ambiguity in the wording of the problem report From maurice at snf.stanford.edu Wed Aug 1 10:41:56 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:41:56 -0700 Subject: Comment tylanbpsg SNF 2007-08-01 10:41:52: New boat installed Message-ID: Both boats (tops and bottoms) replaced. Injectors inspected with flashlight from loader...looks out. Running LTO400 test to check for haze. From maurice at snf.stanford.edu Wed Aug 1 14:31:23 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Aug 2007 14:31:23 -0700 Subject: Comment tylanbpsg SNF 2007-08-01 14:31:23: No Haze after boats replaced Message-ID: Test after clean boats installed looked good. No Haze. LTO400 00:04:20 expected 1000 ang actual~960 8 test wafers in metal boat( 13 wafers in boat including dummies) From king at snf.stanford.edu Wed Aug 1 23:56:56 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 1 Aug 2007 23:56:56 -0700 Subject: Problem tylanbpsg SNF 2007-08-01 23:56:56: Still some particles in LTO Message-ID: We used LTO400 for 4'20" and in the 13wf metal boat configuration, and had some mostly minor streaks of particles coming up from the bottom of the boat during deposition. One wafer was worse than the others. From okilic at snf.stanford.edu Fri Aug 3 19:48:13 2007 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Fri, 3 Aug 2007 19:48:13 -0700 Subject: Problem tylanbpsg SNF 2007-08-03 19:48:12: MFS alarm in pump Message-ID: Running Pump11, getting MFS alarm. Tried to put tube in manually to be sure it is all the way in, still didn't help. From tberg at snf.stanford.edu Mon Aug 6 06:10:04 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 06:10:04 -0700 Subject: Shutdown tylanbpsg SNF 2007-08-06 06:10:03: Pull and clean Message-ID: From tberg at snf.stanford.edu Mon Aug 6 13:04:41 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:04:41 -0700 Subject: Shutdown tylanbpsg SNF 2007-08-06 06:10:03: Pull and clean Message-ID: Pull and clean completed needs test From tberg at snf.stanford.edu Mon Aug 6 13:04:58 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:04:58 -0700 Subject: Comment tylanbpsg SNF 2007-08-01 10:41:52: New boat installed Message-ID: noted From tberg at snf.stanford.edu Mon Aug 6 13:05:15 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:05:15 -0700 Subject: Comment tylanbpsg SNF 2007-07-31 17:43:15: bchui:no haze Message-ID: See other comments From tberg at snf.stanford.edu Mon Aug 6 13:05:38 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:05:38 -0700 Subject: Problem tylanbpsg SNF 2007-08-01 01:01:42: haze/particles on some wafers Message-ID: Pull and clean completed From tberg at snf.stanford.edu Mon Aug 6 13:05:51 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:05:51 -0700 Subject: Problem tylanbpsg SNF 2007-07-31 15:30:03: Haze Message-ID: noted From tberg at snf.stanford.edu Mon Aug 6 13:06:05 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:06:05 -0700 Subject: Comment tylanbpsg SNF 2007-08-01 10:41:18: clarification to my problem report of 08/01 - haze location Message-ID: noted From tberg at snf.stanford.edu Mon Aug 6 13:06:22 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:06:22 -0700 Subject: Problem tylanbpsg SNF 2007-08-03 19:48:12: MFS alarm in pump Message-ID: quartz broken From tberg at snf.stanford.edu Mon Aug 6 13:06:41 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2007 13:06:41 -0700 Subject: Comment tylanbpsg SNF 2007-08-01 14:31:23: No Haze after boats replaced Message-ID: see next comment From maurice at snf.stanford.edu Mon Aug 6 15:24:18 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Aug 2007 15:24:18 -0700 Subject: Comment tylanbpsg SNF 2007-08-06 15:24:18: Testing Message-ID: Running test after Pull/clean. From maurice at snf.stanford.edu Mon Aug 6 17:22:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Aug 2007 17:22:28 -0700 Subject: Comment tylanbpsg SNF 2007-08-06 15:24:18: Testing Message-ID: LTO400 test after pull and clean expected 4100 Ang in center of metal boat actual 4100 With in wafer uniformity normal. Source zone temp ~27 degress high in middle of 20min dep No particels From maurice at snf.stanford.edu Mon Aug 6 17:23:00 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Aug 2007 17:23:00 -0700 Subject: Problem tylanbpsg SNF 2007-08-01 23:56:56: Still some particles in LTO Message-ID: Tube pulled and cleaned. No particles on fist test. From king at snf.stanford.edu Fri Aug 10 20:31:56 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 10 Aug 2007 20:31:56 -0700 Subject: Problem tylanbpsg SNF 2007-08-10 20:31:56: Bad Temperature Control Message-ID: LTO400 recipe cannot hold a flat or steady temperature profile. Roughly at L=377C; C=401C; S=420C. Source end continues to heat even when power is 0% (could wires be crossed?). Would shut down except it's Friday. From king at snf.stanford.edu Fri Aug 10 20:55:24 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 10 Aug 2007 20:55:24 -0700 Subject: Problem tylanbpsg SNF 2007-08-10 20:55:23: Boat can't be pulled manually Message-ID: After it comes out a couple of inches it reverses and goes right back in. From mdickey at snf.stanford.edu Mon Aug 13 12:48:59 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 13 Aug 2007 12:48:59 -0700 Subject: Problem tylanbpsg SNF 2007-08-10 20:55:23: Boat can't be pulled manually Message-ID: Ran LTO400 and no boat out problem From robinhmb at yahoo.com Mon Aug 13 13:50:57 2007 From: robinhmb at yahoo.com (Robin King) Date: Mon, 13 Aug 2007 13:50:57 -0700 (PDT) Subject: Problem tylanbpsg SNF 2007-08-10 20:55:23: Boat can't be pulled manually In-Reply-To: <20070813194859.B86754C77A@smtp1.stanford.edu> Message-ID: <189041.66038.qm@web58712.mail.re1.yahoo.com> It happens when the tube is idling vented and the boat assembly is operated manually with the OUT key-- it comes out an inch or two and reverses back in while you're still pushing OUT. Has happened a few times; not a critical problem and maybe intermittent. --- mdickey at snf.stanford.edu wrote: > Ran LTO400 and no boat out problem > > ____________________________________________________________________________________ Take the Internet to Go: Yahoo!Go puts the Internet in your pocket: mail, news, photos & more. http://mobile.yahoo.com/go?refer=1GNXIC From king at snf.stanford.edu Mon Aug 13 15:46:32 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 13 Aug 2007 15:46:32 -0700 Subject: Shutdown tylanbpsg SNF 2007-08-13 15:46:31: Message-ID: From mtang at snf.stanford.edu Wed Aug 15 15:50:08 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 15 Aug 2007 15:50:08 -0700 Subject: Comment tylanbpsg SNF 2007-08-15 15:50:08: Temperature control problem Message-ID: System is undergoing temperature calibration since yesterday morning. Low temperatures have been known to take a long time. Will check on the status again tomorrow. From mtang at snf.stanford.edu Mon Aug 20 09:17:36 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 20 Aug 2007 09:17:36 -0700 Subject: Comment tylanbpsg SNF 2007-08-20 09:17:35: Update Message-ID: Troubleshooting continues. Checking heating elements. From rissman at snf.stanford.edu Tue Aug 21 09:19:59 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 21 Aug 2007 09:19:59 -0700 Subject: Comment tylanbpsg SNF 2007-08-21 09:19:59: update Message-ID: Cleaned and tightened tc connections. Undergoing temperature recalibration. From tberg at snf.stanford.edu Wed Aug 22 06:17:00 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Aug 2007 06:17:00 -0700 Subject: Comment tylanbpsg SNF 2007-08-22 06:17:00: Temp Cal in progress Message-ID: Temp cal in progress- moving ahead From mtang at snf.stanford.edu Wed Aug 22 09:14:29 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 22 Aug 2007 09:14:29 -0700 Subject: Shutdown tylanbpsg SNF 2007-08-13 15:46:31: Message-ID: Tube has been calibrated. Temperatures look stable at 400 C. Test cycle was successful this morning. Test/qual run this afternoon, but system is available for use for an adventurous person. From maurice at snf.stanford.edu Wed Aug 22 17:17:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Aug 2007 17:17:43 -0700 Subject: Problem tylanbpsg SNF 2007-08-22 17:17:42: broken side rail on non metal boat Message-ID: From king at snf.stanford.edu Wed Aug 22 22:27:30 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 22 Aug 2007 22:27:30 -0700 Subject: Problem tylanbpsg SNF 2007-08-22 22:27:29: SIH4 MFC is flakey Message-ID: Setpoint was 155sccm but the stuck MFC read about 6.6. Put the clock on hold and after a few minutes it came on, but with with big fluctuations from 200 to 0 and back again for another minute before settling down. Unfortunately our desired dep time was close to a minute. I let it run and it seemed steady for a few minutes. Recommend more tests before running real work... good luck. From king at snf.stanford.edu Thu Aug 23 00:06:21 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 23 Aug 2007 00:06:21 -0700 Subject: Problem tylanbpsg SNF 2007-08-23 00:06:21: In addition to the SiH4 problem Message-ID: the OT alarm LEDs were lit on the front panel (believe this is OT for a controller as the measured tube temp was OK). Also, the little positioning pegs on the lid of the metal boat were missing so be careful. From mdickey at snf.stanford.edu Thu Aug 23 07:29:59 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 23 Aug 2007 07:29:59 -0700 Subject: Comment tylanbpsg SNF 2007-08-23 07:29:58: Boat replaced Message-ID: Replaced non-metal bottom boat From maurice at snf.stanford.edu Thu Aug 23 08:47:10 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:47:10 -0700 Subject: Problem tylanbpsg SNF 2007-08-10 20:31:56: Bad Temperature Control Message-ID: Heat element connections tightened and Temp cal completed From maurice at snf.stanford.edu Thu Aug 23 08:47:26 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:47:26 -0700 Subject: Comment tylanbpsg SNF 2007-08-15 15:50:08: Temperature control problem Message-ID: Heat element connections tightened and Temp cal completed From maurice at snf.stanford.edu Thu Aug 23 08:47:38 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:47:38 -0700 Subject: Comment tylanbpsg SNF 2007-08-20 09:17:35: Update Message-ID: Heat element connections tightened and Temp cal completed From maurice at snf.stanford.edu Thu Aug 23 08:47:58 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:47:58 -0700 Subject: Comment tylanbpsg SNF 2007-08-21 09:19:59: update Message-ID: Heat element connections tightened and Temp cal completed From maurice at snf.stanford.edu Thu Aug 23 08:48:19 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:48:19 -0700 Subject: Comment tylanbpsg SNF 2007-08-22 06:17:00: Temp Cal in progress Message-ID: Heat element connections tightened and Temp cal completed From maurice at snf.stanford.edu Thu Aug 23 08:48:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:48:49 -0700 Subject: Problem tylanbpsg SNF 2007-08-22 17:17:42: broken side rail on non metal boat Message-ID: Mike Replaced non-metal bottom boat From maurice at snf.stanford.edu Thu Aug 23 08:49:16 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Aug 2007 08:49:16 -0700 Subject: Comment tylanbpsg SNF 2007-08-23 07:29:58: Boat replaced Message-ID: logged From tura at snf.stanford.edu Thu Aug 23 12:13:22 2007 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 23 Aug 2007 12:13:22 -0700 Subject: Comment tylanbpsg SNF 2007-08-23 12:13:21: SiH4 flow was OK Message-ID: I ran LTO400 for 5min. The SiH4 flow was stable at 147.5 (setpoint: 155) except for the first ~15 seconds of the step. Temperatures were also pretty good. From gth at snf.stanford.edu Fri Aug 24 02:12:59 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 24 Aug 2007 02:12:59 -0700 Subject: Comment tylanbpsg SNF 2007-08-24 02:12:59: obtained lower thickness Message-ID: expected 2500 A obtained 1250 A on LTO400, 12 min order of loading from the front side D - Dummy P - Prime S - Space D-D-P-D-P-D-D Correct order (I think Maurice told me this, not sure) D-D-S-P-S-P-S-D-D re-running the LTO with the correct order, would update soon From maurice at snf.stanford.edu Fri Aug 24 09:02:09 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Aug 2007 09:02:09 -0700 Subject: Comment tylanbpsg SNF 2007-08-24 02:12:59: obtained lower thickness Message-ID: User ran every slot...this cuts thickness rate in half...as we expected User will now run wafers in every other slot... From maurice at snf.stanford.edu Fri Aug 24 09:02:19 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Aug 2007 09:02:19 -0700 Subject: Comment tylanbpsg SNF 2007-08-23 12:13:21: SiH4 flow was OK Message-ID: logged From maurice at snf.stanford.edu Fri Aug 24 09:03:16 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Aug 2007 09:03:16 -0700 Subject: Problem tylanbpsg SNF 2007-08-22 22:27:29: SIH4 MFC is flakey Message-ID: system has not sho this problem for two days.