From tberg at snf.stanford.edu Tue Jan 2 12:35:40 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Jan 2007 12:35:40 -0800 Subject: Comment tylanbpsg SNF 2007-01-02 12:35:40: Ran lto 400 for flow check Message-ID: From mtang at snf.stanford.edu Wed Jan 3 09:20:09 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 3 Jan 2007 09:20:09 -0800 Subject: Problem tylanbpsg SNF 2007-01-03 09:20:09: Phosphine gas is not turned on Message-ID: Phosphine mix gas line is undergoing additional testing, following annual maintenance checks. Do not use process recipes requiring phosphine mix until further notice. From seymour at snf.stanford.edu Wed Jan 3 14:20:31 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 3 Jan 2007 14:20:31 -0800 Subject: Problem tylanbpsg SNF 2007-01-03 09:20:09: Phosphine gas is not turned on Message-ID: phosphine has been turned on From seymour at snf.stanford.edu Wed Jan 3 14:21:11 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 3 Jan 2007 14:21:11 -0800 Subject: Problem tylanbpsg SNF 2007-01-03 14:21:11: phosphine needs testing after shutdown tests Message-ID: From maurice at snf.stanford.edu Thu Jan 4 16:28:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Jan 2007 16:28:49 -0800 Subject: Problem tylanbpsg SNF 2007-01-03 14:21:11: phosphine needs testing after shutdown tests Message-ID: ran PSG400 to ckeck flow. 20 min dep flowed ok From maurice at snf.stanford.edu Wed Jan 10 11:59:08 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Jan 2007 11:59:08 -0800 Subject: Problem tylanbpsg SNF 2006-12-15 12:05:40: PSG400 does not look normal Message-ID: eata ran PSG400 program on 1/8/07 and reports that doping was normal From khanh at snf.stanford.edu Wed Jan 10 18:35:14 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Wed, 10 Jan 2007 18:35:14 -0800 Subject: Problem tylanbpsg SNF 2007-01-10 18:35:13: Values up and down (~300A different) vary from wafer to wafer. Message-ID: This happened at metal boat, 13 wafers configuration. I did 2 times on 1/3/07 and 1/8/07, they both gave me the same problem.. Here is what I got from recently measurements: Ave. Front 1134 2nd 960 3rd 1210 4th 940 5th 1080 From maurice at snf.stanford.edu Thu Jan 11 13:18:22 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Jan 2007 13:18:22 -0800 Subject: Comment tylanbpsg SNF 2007-01-02 12:35:40: Ran lto 400 for flow check Message-ID: logged From maurice at snf.stanford.edu Fri Jan 12 15:51:42 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Jan 2007 15:51:42 -0800 Subject: Comment tylanbpsg SNF 2007-01-12 15:51:41: LTO hi/lo readings Message-ID: I ran two tests. One with 13 wafers and on with 26 wafer. Both runs agree with Khanh's run. The thickness values alternate hi/ lo. Are the injector pointing in the same direction as usual? Are the injector holes the same size as usual? From kimsora at snf.stanford.edu Sun Jan 14 00:29:47 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sun, 14 Jan 2007 00:29:47 -0800 Subject: Problem tylanbpsg SNF 2007-01-14 00:29:47: It failed the base pressure check. Message-ID: Ran LTO400 and PSG400. Base Pressure was 90. From khanh at snf.stanford.edu Mon Jan 15 10:59:12 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Mon, 15 Jan 2007 10:59:12 -0800 Subject: Problem tylanbpsg SNF 2007-01-15 10:59:10: Program loading problem Message-ID: After loading LTO400 into the system, it showed up 0 error, but the last line displayed "tube11 I/O errors". On the panel at the LTO the program show LTO400 but then later on it 's gone. Loading pump11 was O.K. One user had the same problem with me on tylan7 From mtang at snf.stanford.edu Tue Jan 16 09:13:35 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 16 Jan 2007 09:13:35 -0800 Subject: Shutdown tylanbpsg SNF 2007-01-16 09:13:35: Tycom problem Message-ID: From tberg at snf.stanford.edu Tue Jan 16 10:07:57 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Jan 2007 10:07:57 -0800 Subject: Shutdown tylanbpsg SNF 2007-01-16 09:13:35: Tycom problem Message-ID: Tycom working again From tberg at snf.stanford.edu Tue Jan 16 13:40:23 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Jan 2007 13:40:23 -0800 Subject: Problem tylanbpsg SNF 2007-01-15 10:59:10: Program loading problem Message-ID: OK now From mtang at snf.stanford.edu Thu Jan 18 09:15:37 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 18 Jan 2007 09:15:37 -0800 Subject: Shutdown tylanbpsg SNF 2007-01-18 09:15:36: Tycom problem Message-ID: From tberg at snf.stanford.edu Fri Jan 19 12:01:43 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Jan 2007 12:01:43 -0800 Subject: Shutdown tylanbpsg SNF 2007-01-18 09:15:36: Tycom problem Message-ID: Tycom back up From mdickey at snf.stanford.edu Mon Jan 22 05:55:33 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 22 Jan 2007 05:55:33 -0800 Subject: Shutdown tylanbpsg SNF 2007-01-22 05:55:32: Pull and clean Message-ID: Down for pull and clean From maurice at snf.stanford.edu Mon Jan 22 16:24:16 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Jan 2007 16:24:16 -0800 Subject: Problem tylanbpsg SNF 2007-01-14 00:29:47: It failed the base pressure check. Message-ID: logged From latta at snf.stanford.edu Tue Jan 23 19:10:43 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 23 Jan 2007 19:10:43 -0800 Subject: Shutdown tylanbpsg SNF 2007-01-22 05:55:32: Pull and clean Message-ID: Test after clean and new injectors completed. Ok to use, but keep an eye on leak rate. Didn't fail, but got up to 124mT. From latta at snf.stanford.edu Tue Jan 23 19:11:35 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 23 Jan 2007 19:11:35 -0800 Subject: Problem tylanbpsg SNF 2007-01-10 18:35:13: Values up and down (~300A different) vary from wafer to wafer. Message-ID: With new injector problem not seen. Some non-uniformity, though.... From maurice at snf.stanford.edu Wed Jan 24 10:53:00 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 Jan 2007 10:53:00 -0800 Subject: Comment tylanbpsg SNF 2007-01-24 10:52:59: test results Message-ID: front boat slot #3 c=1850 t=1992 b=1985 r=2125 L=2111 slot#11 c=1741 t=1866b=1801 r=1878 L=1894 slot#24 c=1782 t=1941 b=1763 r=1994 L=1858 rear boat #11 c=1672 t=1655 b=1813 r=1715 L=1818 #12 c=1669 t=1678 b=1780 r=1719 L=1761 #13 c=1680 t=1756 b=1789 r=1741 L=1825 #14 c=996 t=671 b=1624 r=1044 L=1398 #15 c=12443 t=2643 b=2100 r=2336 L=2608 Wafers 14 and 15 of rear boat were very non-uniform...looks like 14 was not sitting straight. All other test wafers look normal. We will run another test on the rear boat soon (tube is booked up). From kimsora at snf.stanford.edu Wed Jan 24 20:51:54 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Wed, 24 Jan 2007 20:51:54 -0800 Subject: Problem tylanbpsg SNF 2007-01-24 20:51:54: psg400 base pressure check failed! Message-ID: tried two times. but, every time it failed. From maurice at snf.stanford.edu Thu Jan 25 11:24:25 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Jan 2007 11:24:25 -0800 Subject: Comment tylanbpsg SNF 2007-01-25 11:24:25: metal boat replaced Message-ID: From maurice at snf.stanford.edu Thu Jan 25 11:24:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Jan 2007 11:24:41 -0800 Subject: Comment tylanbpsg SNF 2007-01-12 15:51:41: LTO hi/lo readings Message-ID: logged From skoh at snf.stanford.edu Thu Jan 25 15:35:40 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Thu, 25 Jan 2007 15:35:40 -0800 Subject: Problem tylanbpsg SNF 2007-01-25 15:35:39: Leg on metal boat's cover broken Message-ID: Leg on the right was broken From maurice at snf.stanford.edu Thu Jan 25 16:42:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Jan 2007 16:42:43 -0800 Subject: Problem tylanbpsg SNF 2007-01-24 20:51:54: psg400 base pressure check failed! Message-ID: Eric P cleaned door seal and it passed. From maurice at snf.stanford.edu Mon Jan 29 18:18:48 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Jan 2007 18:18:48 -0800 Subject: Problem tylanbpsg SNF 2007-01-25 15:35:39: Leg on metal boat's cover broken Message-ID: new boat From maurice at snf.stanford.edu Mon Jan 29 18:19:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Jan 2007 18:19:02 -0800 Subject: Comment tylanbpsg SNF 2007-01-25 11:24:25: metal boat replaced Message-ID: logged