Problem tylanbpsg SNF 2007-01-10 18:35:13: Values up and down (~300A different) vary from wafer to wafer.

khanh at snf.stanford.edu khanh at snf.stanford.edu
Wed Jan 10 18:35:14 PST 2007


This happened at metal boat, 13 wafers configuration.
I did 2 times on 1/3/07 and 1/8/07, they both gave me the same problem..
Here is what I got from recently measurements:
                     Ave.
Front         1134
2nd            960
3rd             1210
4th              940
5th              1080




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