From mdickey at snf.stanford.edu Mon Jul 2 05:59:42 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 2 Jul 2007 05:59:42 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-02 05:59:42: Tube pull Message-ID: Down for pull and clean From mdickey at snf.stanford.edu Tue Jul 3 07:20:32 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 3 Jul 2007 07:20:32 -0700 Subject: Comment tylanbpsg SNF 2007-07-03 07:20:32: Test needed Message-ID: Pull and clean is done. Coat is done. Maurice and I will be doing the testing after today's morning meeting From maurice at snf.stanford.edu Tue Jul 3 14:40:44 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Jul 2007 14:40:44 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-02 05:59:42: Tube pull Message-ID: pulled, cleaned, coated and tested From maurice at snf.stanford.edu Tue Jul 3 14:43:32 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Jul 2007 14:43:32 -0700 Subject: Comment tylanbpsg SNF 2007-07-03 07:20:32: Test needed Message-ID: test complete LTO400 00:20:00 expected 4200 ang actual 4065 ok uniformity ~20% normally ~9% Should get better as tube is coated From maurice at snf.stanford.edu Tue Jul 3 14:46:11 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Jul 2007 14:46:11 -0700 Subject: Problem tylanbpsg SNF 2007-07-03 14:46:09: uniformity across boat 20% Message-ID: test complete LTO400 00:20:00 expected 4200 ang actual 4065 ok uniformity across boat ~20% normally ~9% Should get better as tube is coated From king at snf.stanford.edu Wed Jul 4 01:40:23 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 4 Jul 2007 01:40:23 -0700 Subject: Problem tylanbpsg SNF 2007-07-04 01:40:22: Metal-contam vacuum wand is chipped Message-ID: Can't load/unload wafers with it. From kimsora at snf.stanford.edu Wed Jul 4 20:02:27 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Wed, 4 Jul 2007 20:02:27 -0700 Subject: Problem tylanbpsg SNF 2007-07-04 20:02:26: Found that MFS alarm does not stop. Message-ID: Pump11 stopped at step 10. MFS alarm keeps ringing. From mdickey at snf.stanford.edu Thu Jul 5 07:24:16 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Jul 2007 07:24:16 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-05 07:24:15: Sheath Message-ID: Cantilever has a broken sheath. In the process of replacing it From mdickey at snf.stanford.edu Thu Jul 5 08:13:00 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Jul 2007 08:13:00 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-05 07:24:15: Sheath Message-ID: Sheaths replaced. Back in pump program and ready to use From mdickey at snf.stanford.edu Thu Jul 5 08:13:14 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Jul 2007 08:13:14 -0700 Subject: Problem tylanbpsg SNF 2007-07-04 20:02:26: Found that MFS alarm does not stop. Message-ID: Pump was off because of broken sheath From mdickey at snf.stanford.edu Thu Jul 5 08:13:24 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Jul 2007 08:13:24 -0700 Subject: Problem tylanbpsg SNF 2007-07-04 01:40:22: Metal-contam vacuum wand is chipped Message-ID: Wand tip replaced From mdickey at snf.stanford.edu Thu Jul 5 08:13:45 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 5 Jul 2007 08:13:45 -0700 Subject: Problem tylanbpsg SNF 2007-06-18 12:09:54: MFS alarm Message-ID: noted From latta at snf.stanford.edu Thu Jul 5 10:37:32 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 Jul 2007 10:37:32 -0700 Subject: Problem tylanbpsg SNF 2007-07-05 10:37:31: SiH4 alarm- PUMP11 running..... Message-ID: From seymour at snf.stanford.edu Thu Jul 5 13:33:31 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Jul 2007 13:33:31 -0700 Subject: Problem tylanbpsg SNF 2007-07-05 10:37:31: SiH4 alarm- PUMP11 running..... Message-ID: adjusted silane mfc zero. From kimsora at snf.stanford.edu Fri Jul 6 22:28:14 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Fri, 6 Jul 2007 22:28:14 -0700 Subject: Problem tylanbpsg SNF 2007-07-06 22:28:14: The tube did not come out. Message-ID: At step 100 of LTO400, the boat did not come out. A couple of days ago, I saw another person who had the same problem. From seymour at snf.stanford.edu Mon Jul 9 09:55:09 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Jul 2007 09:55:09 -0700 Subject: Problem tylanbpsg SNF 2007-06-18 12:19:28: SiH4 MFS alarm during loading Message-ID: adjusted silane and all MFS460 mfc zeros did auto zero routin From seymour at snf.stanford.edu Mon Jul 9 09:57:43 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Jul 2007 09:57:43 -0700 Subject: Problem tylanbpsg SNF 2007-07-06 22:28:14: The tube did not come out. Message-ID: N2 purge not flowing found faulty connection on monoblock. N2 purge flows ok tube in pump recipe. From mdickey at snf.stanford.edu Mon Jul 9 10:25:10 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 9 Jul 2007 10:25:10 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-09 10:25:09: purge fault Message-ID: Need to trouble shoot N2 purge fault From mdickey at snf.stanford.edu Mon Jul 9 12:15:12 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 9 Jul 2007 12:15:12 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-09 10:25:09: purge fault Message-ID: Ray reconnected loose control valve wire From kimsora at snf.stanford.edu Tue Jul 10 09:53:35 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Tue, 10 Jul 2007 09:53:35 -0700 Subject: Problem tylanbpsg SNF 2007-07-10 09:53:35: Wafers became hazy after LTO400 deposition Message-ID: I ran 20 min LTO 400 two times. After the first run, the wafers looked okay. But, after the second run, all wafers became hazy. From maurice at snf.stanford.edu Tue Jul 10 16:47:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 10 Jul 2007 16:47:59 -0700 Subject: Problem tylanbpsg SNF 2007-07-10 09:53:35: Wafers became hazy after LTO400 deposition Message-ID: Sora ran a LTO400 test and it came out hazy free From maurice at snf.stanford.edu Tue Jul 10 16:48:17 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 10 Jul 2007 16:48:17 -0700 Subject: Problem tylanbpsg SNF 2007-07-03 14:46:09: uniformity across boat 20% Message-ID: logged From khanh at snf.stanford.edu Tue Jul 17 15:04:01 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Tue, 17 Jul 2007 15:04:01 -0700 Subject: Problem tylanbpsg SNF 2007-07-17 15:04:01: The tube didn't come out at step 100 Message-ID: From maurice at snf.stanford.edu Wed Jul 18 10:14:06 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Jul 2007 10:14:06 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-18 10:14:06: slowpump not closing Message-ID: From mtang at snf.stanford.edu Wed Jul 18 11:59:44 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 18 Jul 2007 11:59:44 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-18 11:59:43: Investigating TGO sensor problem Message-ID: Potential problem with the sensor in the gas vault. System wilkl be down until further notice. From tberg at snf.stanford.edu Thu Jul 19 06:53:30 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Jul 2007 06:53:30 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-18 11:59:43: Investigating TGO sensor problem Message-ID: Sensor is OK now From latta at snf.stanford.edu Thu Jul 19 09:11:24 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:11:24 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-19 09:11:24: needs loader board replacement Message-ID: Due 20 July. From mdickey at snf.stanford.edu Fri Jul 20 06:29:45 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Jul 2007 06:29:45 -0700 Subject: Comment tylanbpsg SNF 2007-07-20 06:29:45: Boat loader Message-ID: Still trouble shooting boat loader problem From mtang at snf.stanford.edu Wed Jul 25 09:19:14 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 25 Jul 2007 09:19:14 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-25 09:19:13: Boat loader update Message-ID: Ray has just received drawings and suggestions from the vendor and is working on it right now. More updates to follow... From seymour at snf.stanford.edu Thu Jul 26 11:11:08 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Jul 2007 11:11:08 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-18 10:14:06: slowpump not closing Message-ID: slopump closes From seymour at snf.stanford.edu Thu Jul 26 11:11:40 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Jul 2007 11:11:40 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-19 09:11:24: needs loader board replacement Message-ID: loader board replaced From seymour at snf.stanford.edu Thu Jul 26 11:12:05 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Jul 2007 11:12:05 -0700 Subject: Problem tylanbpsg SNF 2007-07-17 15:04:01: The tube didn't come out at step 100 Message-ID: loader backs out now From seymour at snf.stanford.edu Thu Jul 26 11:13:02 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Jul 2007 11:13:02 -0700 Subject: Comment tylanbpsg SNF 2007-07-20 06:29:45: Boat loader Message-ID: its a real boat loader at this time From seymour at snf.stanford.edu Thu Jul 26 11:14:54 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Jul 2007 11:14:54 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-25 09:19:13: Boat loader update Message-ID: ran lto400 as my BOT test loader came out to load then went in furnace ran its gas cycle then boat came out. I loaded and started the pump11 recipe. tube up to run From khanh at snf.stanford.edu Thu Jul 26 15:59:20 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Thu, 26 Jul 2007 15:59:20 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-26 15:59:19: Too many white particles on the wafers Message-ID: Using prog#LTO400, 00:05:00 on metal boat. From maurice at snf.stanford.edu Thu Jul 26 17:46:54 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 26 Jul 2007 17:46:54 -0700 Subject: Shutdown tylanbpsg SNF 2007-07-26 15:59:19: Too many white particles on the wafers Message-ID: Particles may be coming from boats. I have started a 45 coat run. Girish has agreed to run a test run after the coat program. If it is still bad he will red light the system. From maurice at snf.stanford.edu Thu Jul 26 17:47:07 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 26 Jul 2007 17:47:07 -0700 Subject: Problem tylanbpsg SNF 2007-07-26 17:47:07: particles Message-ID: Particles may be coming from boats. I have started a 45 coat run. Girish has agreed to run a test run after the coat program. If it is still bad he will red light the system. From maurice at snf.stanford.edu Fri Jul 27 09:02:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 27 Jul 2007 09:02:43 -0700 Subject: Problem tylanbpsg SNF 2007-07-26 17:47:07: particles Message-ID: Girish reports no particles after coating tube From maurice at snf.stanford.edu Tue Jul 31 15:30:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 31 Jul 2007 15:30:04 -0700 Subject: Problem tylanbpsg SNF 2007-07-31 15:30:03: Haze Message-ID: Sora Kim reports haze on her wafers. On 3 runs (1 run yesterday, two runs today) From maurice at snf.stanford.edu Tue Jul 31 17:43:16 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 31 Jul 2007 17:43:16 -0700 Subject: Comment tylanbpsg SNF 2007-07-31 17:43:15: bchui:no haze Message-ID: Ben Chui saw no haze on his run (after Sora Kim's run)