July 2007 Archives by author

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Starting: Mon Jul 2 05:59:42 PDT 2007
Ending: Tue Jul 31 17:43:16 PDT 2007
Messages: 40

• Problem tylanbpsg SNF 2007-07-17 15:04:01: The tube didn't come out at step 100   khanh at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-26 15:59:19: Too many white particles on the wafers   khanh at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-04 20:02:26: Found that MFS alarm does not stop.   kimsora at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-06 22:28:14: The tube did not come out.   kimsora at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-10 09:53:35: Wafers became hazy after LTO400 deposition   kimsora at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-04 01:40:22: Metal-contam vacuum wand is chipped   king at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-05 10:37:31: SiH4 alarm- PUMP11 running.....   latta at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-19 09:11:24: needs loader board replacement   latta at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-02 05:59:42: Tube pull   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2007-07-03 07:20:32: Test needed   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-03 14:46:09: uniformity across boat 20%   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-10 09:53:35: Wafers became hazy after LTO400 deposition   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-03 14:46:09: uniformity across boat 20%   maurice at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-18 10:14:06: slowpump not closing   maurice at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-26 15:59:19: Too many white particles on the wafers   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-26 17:47:07: particles   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-26 17:47:07: particles   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-31 15:30:03: Haze   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2007-07-31 17:43:15: bchui:no haze   maurice at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-02 05:59:42: Tube pull   mdickey at snf.stanford.edu
• Comment tylanbpsg SNF 2007-07-03 07:20:32: Test needed   mdickey at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-05 07:24:15: Sheath   mdickey at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-05 07:24:15: Sheath   mdickey at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-04 20:02:26: Found that MFS alarm does not stop.   mdickey at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-04 01:40:22: Metal-contam vacuum wand is chipped   mdickey at snf.stanford.edu
• Problem tylanbpsg SNF 2007-06-18 12:09:54: MFS alarm   mdickey at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-09 10:25:09: purge fault   mdickey at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-09 10:25:09: purge fault   mdickey at snf.stanford.edu
• Comment tylanbpsg SNF 2007-07-20 06:29:45: Boat loader   mdickey at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-18 11:59:43: Investigating TGO sensor problem   mtang at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-25 09:19:13: Boat loader update   mtang at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-05 10:37:31: SiH4 alarm- PUMP11 running.....   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2007-06-18 12:19:28: SiH4 MFS alarm during loading   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-06 22:28:14: The tube did not come out.   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-18 10:14:06: slowpump not closing   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-19 09:11:24: needs loader board replacement   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2007-07-17 15:04:01: The tube didn't come out at step 100   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2007-07-20 06:29:45: Boat loader   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-25 09:19:13: Boat loader update   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2007-07-18 11:59:43: Investigating TGO sensor problem   tberg at snf.stanford.edu

Last message date: Tue Jul 31 17:43:16 PDT 2007
Archived on: Fri Jan 11 13:15:27 PST 2013

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