From rwoo at snf.stanford.edu Fri Jun 1 21:15:05 2007 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Fri, 1 Jun 2007 21:15:05 -0700 Subject: Problem tylanbpsg SNF 2007-06-01 21:15:05: pressure reading off Message-ID: The base and leak pressure consistently read 0. Since it seems unlikely that they are actually exactly 0, I suspect that the meter is mis-calibrated. This is a problem because some recipes such as LTO450P use a pressure setpoint in the deposition step. Also right now it is impossible to monitor the variation in the leak rate from run to run. From rwoo at snf.stanford.edu Fri Jun 1 23:47:18 2007 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Fri, 1 Jun 2007 23:47:18 -0700 Subject: Comment tylanbpsg SNF 2007-06-01 23:47:18: not enough non-metal dummies Message-ID: When changing dummies, I first had to strip wafers that were already in the tube because there were not enough extra non-metal dummies. From mdickey at snf.stanford.edu Tue Jun 5 06:44:10 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 5 Jun 2007 06:44:10 -0700 Subject: Problem tylanbpsg SNF 2007-06-01 21:15:05: pressure reading off Message-ID: Adjusted baritron. Reading between 4-11 m.t. at base From maurice at snf.stanford.edu Wed Jun 6 10:34:27 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jun 2007 10:34:27 -0700 Subject: Problem tylanbpsg SNF 2007-05-16 06:12:39: Thermocouple bad Message-ID: from 5/16/07...Not sure how this was addressed...but is is not an issue now From maurice at snf.stanford.edu Wed Jun 6 10:34:52 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jun 2007 10:34:52 -0700 Subject: Comment tylanbpsg SNF 2007-05-23 14:44:47: Silane flow Message-ID: logged From maurice at snf.stanford.edu Wed Jun 6 10:35:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jun 2007 10:35:05 -0700 Subject: Comment tylanbpsg SNF 2007-05-25 15:15:54: Test after Silane check and temp cal Message-ID: logged From maurice at snf.stanford.edu Wed Jun 6 10:35:17 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jun 2007 10:35:17 -0700 Subject: Comment tylanbpsg SNF 2007-05-28 02:13:55: TEST_LTO400 & PSG400 Message-ID: logged From tberg at snf.stanford.edu Thu Jun 7 06:17:11 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Jun 2007 06:17:11 -0700 Subject: Comment tylanbpsg SNF 2007-05-30 07:52:00: Injector Message-ID: noted From tberg at snf.stanford.edu Thu Jun 7 06:17:50 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Jun 2007 06:17:50 -0700 Subject: Comment tylanbpsg SNF 2007-05-30 13:37:51: Test Message-ID: Test OK From king at snf.stanford.edu Thu Jun 7 20:18:54 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 7 Jun 2007 20:18:54 -0700 Subject: Shutdown tylanbpsg SNF 2007-06-07 20:18:53: LTO Shutdown - cantilever sheath is broken Message-ID: Found tube vented and a big crack in the sheath under the non-metal boat. From mdickey at snf.stanford.edu Fri Jun 8 07:36:45 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 8 Jun 2007 07:36:45 -0700 Subject: Shutdown tylanbpsg SNF 2007-06-07 20:18:53: LTO Shutdown - cantilever sheath is broken Message-ID: Replaced both cantilever sheaths From maurice at snf.stanford.edu Tue Jun 12 16:36:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 Jun 2007 16:36:05 -0700 Subject: Comment tylanbpsg SNF 2007-06-12 16:36:05: Glass broken on tongs Message-ID: Glass broken on tongs (the metal handled thing use to lift the boat covers) From mdickey at snf.stanford.edu Wed Jun 13 13:00:39 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Jun 2007 13:00:39 -0700 Subject: Comment tylanbpsg SNF 2007-06-12 16:36:05: Glass broken on tongs Message-ID: Boat fork sheath replaced From maurice at snf.stanford.edu Wed Jun 13 16:10:17 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Jun 2007 16:10:17 -0700 Subject: Shutdown tylanbpsg SNF 2007-06-13 16:10:16: load zone running away Message-ID: Robin was running LTO400. Right before deposition step she checked temps. TEMPL=506 with 69% power (target is 400). We watched load zone go to 518 then aborted the run. Breaker is off. From tberg at snf.stanford.edu Thu Jun 14 08:02:55 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 08:02:55 -0700 Subject: Shutdown tylanbpsg SNF 2007-06-13 16:10:16: load zone running away Message-ID: RESET tcu boar monitored temp ok From tberg at snf.stanford.edu Thu Jun 14 08:03:10 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2007 08:03:10 -0700 Subject: Comment tylanbpsg SNF 2007-06-01 23:47:18: not enough non-metal dummies Message-ID: noted From kevhuang at snf.stanford.edu Thu Jun 14 19:22:58 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Thu, 14 Jun 2007 19:22:58 -0700 Subject: Problem tylanbpsg SNF 2007-06-14 19:22:58: temperature at 450 Message-ID: for LTO400 program From kevhuang at snf.stanford.edu Mon Jun 18 12:09:55 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 18 Jun 2007 12:09:55 -0700 Subject: Problem tylanbpsg SNF 2007-06-18 12:09:54: MFS alarm Message-ID: during venting after ending pump11 recipe From kevhuang at snf.stanford.edu Mon Jun 18 12:19:28 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 18 Jun 2007 12:19:28 -0700 Subject: Problem tylanbpsg SNF 2007-06-18 12:19:28: SiH4 MFS alarm during loading Message-ID: From maurice at snf.stanford.edu Mon Jun 18 17:18:55 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Jun 2007 17:18:55 -0700 Subject: Problem tylanbpsg SNF 2007-06-18 17:18:55: L=468 LTO400 Message-ID: LTO400 In deposition step: L=468 C=403 S=412 From khanh at snf.stanford.edu Mon Jun 18 18:12:48 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Mon, 18 Jun 2007 18:12:48 -0700 Subject: Shutdown tylanbpsg SNF 2007-06-18 18:12:47: The temp. of load zone was high and dep. rate was so low. Message-ID: I ran LTO400, 00:01:00, and expected 200A. But somehow, I got only 15A for all 6 wfs (start from slot 2) in metal boat. The temp. zones at dep. step (step 55) were: L 463C C 404C S 413 From tberg at snf.stanford.edu Tue Jun 19 08:22:00 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Jun 2007 08:22:00 -0700 Subject: Comment tylanbpsg SNF 2007-06-19 08:21:58: Running Temp Cal Message-ID: From seymour at snf.stanford.edu Wed Jun 20 10:01:08 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Jun 2007 10:01:08 -0700 Subject: Comment tylanbpsg SNF 2007-06-20 10:01:07: T/C calibration in progress Message-ID: changing TCU board. From tberg at snf.stanford.edu Thu Jun 21 12:58:04 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Jun 2007 12:58:04 -0700 Subject: Comment tylanbpsg SNF 2007-06-20 10:01:07: T/C calibration in progress Message-ID: TCU replaced and temp cal performed From tberg at snf.stanford.edu Thu Jun 21 12:58:52 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Jun 2007 12:58:52 -0700 Subject: Comment tylanbpsg SNF 2007-06-19 08:21:58: Running Temp Cal Message-ID: Completed running test From maurice at snf.stanford.edu Thu Jun 21 13:38:56 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 21 Jun 2007 13:38:56 -0700 Subject: Problem tylanbpsg SNF 2007-06-14 19:22:58: temperature at 450 Message-ID: temp control board replaced and temp cal run From maurice at snf.stanford.edu Thu Jun 21 13:39:16 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 21 Jun 2007 13:39:16 -0700 Subject: Problem tylanbpsg SNF 2007-06-18 17:18:55: L=468 LTO400 Message-ID: temp control board replaced and temp cal run From tberg at snf.stanford.edu Thu Jun 21 13:58:59 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Jun 2007 13:58:59 -0700 Subject: Shutdown tylanbpsg SNF 2007-06-18 18:12:47: The temp. of load zone was high and dep. rate was so low. Message-ID: Ran Temp Cal and a test of LTO400 no problems flows and temps looked OK From tberg at snf.stanford.edu Thu Jun 21 14:03:16 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Jun 2007 14:03:16 -0700 Subject: Comment tylanbpsg SNF 2007-06-21 14:03:16: TEMP cal completed Ran test Message-ID: Leaving yellow for observation Test was fine temps and flows OK From mtang at snf.stanford.edu Fri Jun 22 09:16:16 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 22 Jun 2007 09:16:16 -0700 Subject: Comment tylanbpsg SNF 2007-06-22 09:16:13: Adding to Ted's comment Message-ID: Ted's "test" in the 6/21 comment was that he ran LTO400 for 20 minutes. From khanh at snf.stanford.edu Fri Jun 22 15:44:43 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Fri, 22 Jun 2007 15:44:43 -0700 Subject: Comment tylanbpsg SNF 2007-06-22 15:44:42: The results looked good yesterday Message-ID: Used program LTO400 for 00:01:00 then 00:00:54 and got the average LTO thickness about 228A and 199.65A respectively. Thanks. From kimsora at snf.stanford.edu Sat Jun 23 23:39:02 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sat, 23 Jun 2007 23:39:02 -0700 Subject: Problem tylanbpsg SNF 2007-06-23 23:39:02: one side of nonmetal boat fell and was broken. Message-ID: From mdickey at snf.stanford.edu Mon Jun 25 06:55:51 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 25 Jun 2007 06:55:51 -0700 Subject: Problem tylanbpsg SNF 2007-06-23 23:39:02: one side of nonmetal boat fell and was broken. Message-ID: Bottom boat replaced From tberg at snf.stanford.edu Mon Jun 25 07:14:28 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:14:28 -0700 Subject: Comment tylanbpsg SNF 2007-06-22 15:44:42: The results looked good yesterday Message-ID: noted From tberg at snf.stanford.edu Mon Jun 25 07:14:44 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:14:44 -0700 Subject: Comment tylanbpsg SNF 2007-06-22 09:16:13: Adding to Ted's comment Message-ID: noted From tberg at snf.stanford.edu Mon Jun 25 07:14:53 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:14:53 -0700 Subject: Comment tylanbpsg SNF 2007-06-21 14:03:16: TEMP cal completed Ran test Message-ID: noted