Problem tylanbpsg SNF 2007-06-01 21:15:05: pressure reading off

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Fri Jun 1 21:15:05 PDT 2007


The base and leak pressure consistently read 0.  Since it seems unlikely that they are actually exactly 0, I suspect that the meter is mis-calibrated.  This is a problem because some recipes such as LTO450P use a pressure setpoint in the deposition step.  Also right now it is impossible to monitor the variation in the leak rate from run to run.




More information about the tylanbpsg-pcs mailing list