From jimbond at snf.stanford.edu Fri Mar 2 16:32:08 2007 From: jimbond at snf.stanford.edu (jimbond at snf.stanford.edu) Date: Fri, 2 Mar 2007 16:32:08 -0800 Subject: Comment tylanbpsg SNF 2007-03-02 16:32:08: No clean dummies when trying to change Message-ID: From fengj at snf.stanford.edu Sat Mar 3 07:55:19 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 3 Mar 2007 07:55:19 -0800 Subject: Shutdown tylanbpsg SNF 2007-03-03 07:55:18: MFS ALARM Message-ID: MFS alarm at step 20. It seems that something is wrong with the pump or gate valve. The tube went from step 25 to 105 because pressure was too high. From seymour at snf.stanford.edu Mon Mar 5 10:40:25 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Mar 2007 10:40:25 -0800 Subject: Shutdown tylanbpsg SNF 2007-03-03 07:55:18: MFS ALARM Message-ID: Replaced loader sheth. Base and leak rate look good. needs test after repair. From seymour at snf.stanford.edu Mon Mar 5 10:40:50 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Mar 2007 10:40:50 -0800 Subject: Shutdown tylanbpsg SNF 2007-03-05 10:40:49: needs test after repair. Message-ID: From seymour at snf.stanford.edu Mon Mar 5 10:44:10 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Mar 2007 10:44:10 -0800 Subject: Shutdown tylanbpsg SNF 2007-03-05 10:40:49: needs test after repair. Message-ID: Khanh will do the test From khanh at snf.stanford.edu Mon Mar 5 11:48:38 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Mon, 5 Mar 2007 11:48:38 -0800 Subject: Shutdown tylanbpsg SNF 2007-03-05 11:48:37: The tube couldn't vent Message-ID: From rohits at snf.stanford.edu Mon Mar 5 12:02:00 2007 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Mon, 5 Mar 2007 12:02:00 -0800 Subject: Comment tylanbpsg SNF 2007-03-05 12:01:59: Vented after ~ 45 min Message-ID: Please clear the shutdown. We are running a process check for deposition rate. Thanks From tberg at snf.stanford.edu Mon Mar 5 12:12:23 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Mar 2007 12:12:23 -0800 Subject: Shutdown tylanbpsg SNF 2007-03-05 11:48:37: The tube couldn't vent Message-ID: vented From rohits at snf.stanford.edu Mon Mar 5 14:00:02 2007 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Mon, 5 Mar 2007 14:00:02 -0800 Subject: Comment tylanbpsg SNF 2007-03-05 14:00:02: thickness result Message-ID: Ran LTO400 for 00:01:50 - aiming for 450A. 3 Wafers loaded in the center of the metal boat in 12 wafer configuration (alternate slots empty). Thickness (in A, measured on rudulph ellipsometer, CTLBR) wfr1 (closer to back): 435, 450, 432, 419, 440 wfr2 (center): 438, 451, 437, 430, 443 wfr3 (closer to front): 436, 450, 432, 426, 444 Overall Avg = 437.5A, overall std dev = 9.2A (2.1%) From fengj at snf.stanford.edu Fri Mar 9 04:16:36 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Fri, 9 Mar 2007 04:16:36 -0800 Subject: Problem tylanbpsg SNF 2007-03-09 04:16:35: took a long time to vent Message-ID: about 1.5 hr From mdickey at snf.stanford.edu Fri Mar 9 06:51:57 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 9 Mar 2007 06:51:57 -0800 Subject: Problem tylanbpsg SNF 2007-03-09 04:16:35: took a long time to vent Message-ID: Adjusted door flag. This may have been problem From king at snf.stanford.edu Mon Mar 12 20:38:48 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 12 Mar 2007 20:38:48 -0700 Subject: Problem tylanbpsg SNF 2007-03-12 20:38:47: LTO Metal Boat Lid Message-ID: Found with a strip of quartz missing along the bottom edge and one of the prongs missing. The uniformity wasn't bad except for being thick near the one side. From mdickey at snf.stanford.edu Tue Mar 13 06:56:44 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 13 Mar 2007 06:56:44 -0700 Subject: Problem tylanbpsg SNF 2007-03-12 20:38:47: LTO Metal Boat Lid Message-ID: Top replaced From mdickey at snf.stanford.edu Tue Mar 13 06:57:12 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 13 Mar 2007 06:57:12 -0700 Subject: Comment tylanbpsg SNF 2007-03-05 12:01:59: Vented after ~ 45 min Message-ID: Noted From maurice at snf.stanford.edu Mon Mar 26 13:24:22 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Mar 2007 13:24:22 -0700 Subject: Comment tylanbpsg SNF 2007-03-26 13:24:21: Message-ID: