From seymour at snf.stanford.edu Tue May 1 10:06:38 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 May 2007 10:06:38 -0700 Subject: Shutdown tylanbpsg SNF 2007-04-30 12:36:45: Dep. rate not uniform and too low Message-ID: removed and cleaned MFC for silane. needs testing. From seymour at snf.stanford.edu Tue May 1 10:06:57 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 May 2007 10:06:57 -0700 Subject: Problem tylanbpsg SNF 2007-05-01 10:06:56: needs testing after MFc clean Message-ID: From maurice at snf.stanford.edu Tue May 1 11:00:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 May 2007 11:00:02 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-01 11:00:01: testing Message-ID: From maurice at snf.stanford.edu Tue May 1 13:56:10 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 May 2007 13:56:10 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-01 11:00:01: testing Message-ID: LTO400 00:20:00 13 dummies expected~4200Ang (from front to back) #1 154 Ang #2 244 #3 352 #4 1280 #5 2533 #6 4585 From maurice at snf.stanford.edu Tue May 1 14:02:23 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 May 2007 14:02:23 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-01 14:02:23: Dep not uniformity Message-ID: expected~4200Ang (from front to back) #1 154 Ang #2 244 #3 352 #4 1280 #5 2533 #6 4585 From mdickey at snf.stanford.edu Wed May 2 07:17:09 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 2 May 2007 07:17:09 -0700 Subject: Comment tylanbpsg SNF 2007-05-02 07:17:09: Test needed Message-ID: Replaced broken injectors and vacuumed up particles. Will need another test From maurice at snf.stanford.edu Wed May 2 11:28:32 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 11:28:32 -0700 Subject: Comment tylanbpsg SNF 2007-05-02 11:28:32: Running test after injector replaced Message-ID: Khanh running a test...Thanks From maurice at snf.stanford.edu Wed May 2 14:58:24 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 14:58:24 -0700 Subject: Comment tylanbpsg SNF 2007-05-02 11:28:32: Running test after injector replaced Message-ID: Test results LTO400 00:02:01 expected 450 Ang Cener point readings 13 wafers per boat F6 336 (front boat slot 6) F13 285 F24 369 B5 594 B7 562 B9 562 Robin said she had noticed one zone ~50 degrees lower than set point. I am running another run to watch temps From maurice at snf.stanford.edu Wed May 2 16:13:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:13:04 -0700 Subject: Comment tylanbpsg SNF 2007-05-02 16:13:03: temps/flows look ok Message-ID: Ran LTO400 again to check temp. All zones were 400+/- 2 degress. Gas flows were all at setpoint during deposition. But last run showed thickness non uniformity (see last comment) From maurice at snf.stanford.edu Wed May 2 16:41:35 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:41:35 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-01 14:02:23: Dep not uniformity Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:41:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:41:49 -0700 Subject: Problem tylanbpsg SNF 2007-04-30 12:00:17: Bad dep Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:41:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:41:57 -0700 Subject: Problem tylanbpsg SNF 2007-04-30 09:21:18: Slow dep rate Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:42:11 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:42:11 -0700 Subject: Problem tylanbpsg SNF 2007-04-29 17:22:16: non-uniform deposition Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:43:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:43:05 -0700 Subject: Problem tylanbpsg SNF 2007-04-27 23:21:27: Huge thickness gradient across boat Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:43:16 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:43:16 -0700 Subject: Problem tylanbpsg SNF 2007-04-26 12:15:19: dots in LTO under microscope Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:43:46 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:43:46 -0700 Subject: Problem tylanbpsg SNF 2007-04-27 14:40:10: Be careful with the LTO disk Message-ID: replaced From maurice at snf.stanford.edu Wed May 2 16:44:10 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:44:10 -0700 Subject: Problem tylanbpsg SNF 2007-04-28 15:03:46: was boated out for 1.5hrs due to lab shutdown Message-ID: logged From maurice at snf.stanford.edu Wed May 2 16:44:36 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:44:36 -0700 Subject: Problem tylanbpsg SNF 2007-04-28 15:21:39: no dep Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:44:44 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:44:44 -0700 Subject: Comment tylanbpsg SNF 2007-04-28 15:36:15: no dep more info Message-ID: Injector replaced From maurice at snf.stanford.edu Wed May 2 16:46:00 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:46:00 -0700 Subject: Problem tylanbpsg SNF 2007-05-01 10:06:56: needs testing after MFc clean Message-ID: Test run...huge thickness gradient across tube...Injector replaced From maurice at snf.stanford.edu Wed May 2 16:46:13 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:46:13 -0700 Subject: Comment tylanbpsg SNF 2007-05-02 07:17:09: Test needed Message-ID: logged From maurice at snf.stanford.edu Wed May 2 16:47:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 May 2007 16:47:59 -0700 Subject: Comment tylanbpsg SNF 2007-04-24 15:53:20: testing Message-ID: logged From grahamab at snf.stanford.edu Thu May 3 17:30:22 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 3 May 2007 17:30:22 -0700 Subject: Comment tylanbpsg SNF 2007-05-03 17:30:21: LTO400, thick dep good Message-ID: Ran LTO400 for 2 hours (nonmetal) and deposition was about what I expected (~2.5um). Uniformity across the wafers and across the boat were similar to values I was getting before the furnace was shutdown. I can't vouge for thin depositions, but the thick stuff works well again. From king at snf.stanford.edu Tue May 8 00:57:10 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 8 May 2007 00:57:10 -0700 Subject: Problem tylanbpsg SNF 2007-05-08 00:57:09: Loose, powdery deposition Message-ID: Using metal boat and LTO300. Powder in large areas on the wafers. Can see thick white depositions on dummy wfs that had multiple depositions. From maurice at snf.stanford.edu Tue May 8 14:59:56 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 May 2007 14:59:56 -0700 Subject: Comment tylanbpsg SNF 2007-05-08 14:59:56: boats replaced Message-ID: Users complained of particles from boats New clean boats replaced 25um coated boats. From rwoo at snf.stanford.edu Thu May 10 10:37:13 2007 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Thu, 10 May 2007 10:37:13 -0700 Subject: Comment tylanbpsg SNF 2007-05-10 10:37:12: no clean non-metal dummies Message-ID: Dummy wafer thickness is well over 3um, but the only non-metal dummies in the cart have spots and white residue on them. While they may come off on BOE, I am inclined not to put these dummies into the tube. From khanh at snf.stanford.edu Thu May 10 17:04:56 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Thu, 10 May 2007 17:04:56 -0700 Subject: Problem tylanbpsg SNF 2007-05-10 17:04:55: Particles on the wfs at metal boat Message-ID: I ran 3 wfs in the middle of the metal boat using LTO400 program for 00:01:37, and the last wafer happened to have many particles. The front 2 wfs are O.K. From mtang at snf.stanford.edu Fri May 11 09:15:01 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 11 May 2007 09:15:01 -0700 Subject: Comment tylanbpsg SNF 2007-05-11 09:15:00: Particles reported Message-ID: Tube is due for pull and clean on Monday. There are particles. Please make sude dummies are clean and be aware of potential particle issues. From mdickey at snf.stanford.edu Mon May 14 06:00:38 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 14 May 2007 06:00:38 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-14 06:00:38: Tube pull Message-ID: Down for pull and clean From seymour at snf.stanford.edu Tue May 15 12:01:19 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 15 May 2007 12:01:19 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-14 06:00:38: Tube pull Message-ID: doing a tube coat From mdickey at snf.stanford.edu Tue May 15 13:46:14 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 15 May 2007 13:46:14 -0700 Subject: Comment tylanbpsg SNF 2007-05-15 13:46:13: Needs test Message-ID: Needs test after coat and pull and clean From maurice at snf.stanford.edu Tue May 15 14:19:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:19:57 -0700 Subject: Comment tylanbpsg SNF 2007-05-15 14:19:57: testing after pull/clean Message-ID: From maurice at snf.stanford.edu Tue May 15 14:21:58 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:21:58 -0700 Subject: Comment tylanbpsg SNF 2007-05-10 10:37:12: no clean non-metal dummies Message-ID: White spots are from the HCl etch...normal Wafer replaced any From maurice at snf.stanford.edu Tue May 15 14:23:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:23:04 -0700 Subject: Comment tylanbpsg SNF 2007-05-11 09:15:00: Particles reported Message-ID: System pulled and cleaned From maurice at snf.stanford.edu Tue May 15 14:23:39 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:23:39 -0700 Subject: Problem tylanbpsg SNF 2007-05-10 17:04:55: Particles on the wfs at metal boat Message-ID: system pulled/cleaned From maurice at snf.stanford.edu Tue May 15 14:24:23 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:24:23 -0700 Subject: Problem tylanbpsg SNF 2007-04-28 00:46:53: Abnormal deposition Message-ID: broken injector replaced From maurice at snf.stanford.edu Tue May 15 14:24:40 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:24:40 -0700 Subject: Problem tylanbpsg SNF 2007-05-08 00:57:09: Loose, powdery deposition Message-ID: pulled/cleaned From maurice at snf.stanford.edu Tue May 15 14:25:09 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:25:09 -0700 Subject: Comment tylanbpsg SNF 2007-05-03 17:30:21: LTO400, thick dep good Message-ID: broken injector replaced From maurice at snf.stanford.edu Tue May 15 14:25:32 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:25:32 -0700 Subject: Comment tylanbpsg SNF 2007-05-02 16:13:03: temps/flows look ok Message-ID: logged From maurice at snf.stanford.edu Tue May 15 14:25:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 14:25:49 -0700 Subject: Comment tylanbpsg SNF 2007-05-08 14:59:56: boats replaced Message-ID: logged From maurice at snf.stanford.edu Tue May 15 16:21:12 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 16:21:12 -0700 Subject: Comment tylanbpsg SNF 2007-05-15 14:19:57: testing after pull/clean Message-ID: LTO400 00:20:00 13 dummies No particles Front boat (c,t,b,r,l) #5 4310 3917 4714 4364 4351 #13 4496 4189 4828 4541 4459 #24 4720 4622 4908 4777 4791 Rear boat #5 5660 5707 5603 5631 5681 #13 5829 5797 5755 5742 5842 #24 5322 5260 5512 5375 5407 From maurice at snf.stanford.edu Tue May 15 16:23:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 16:23:04 -0700 Subject: Comment tylanbpsg SNF 2007-05-15 13:46:13: Needs test Message-ID: pulled/cleaned/coated/tested exhuast line to pump cleaned Burnbox cleaned From vipin at snf.stanford.edu Wed May 16 06:12:40 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 16 May 2007 06:12:40 -0700 Subject: Problem tylanbpsg SNF 2007-05-16 06:12:39: Thermocouple bad Message-ID: Temp in one of the thermocouple is way off at around 455 C. The other two are also slightly higher than 400. Deposition rate is slightly faster. From seymour at snf.stanford.edu Wed May 16 10:39:31 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 May 2007 10:39:31 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-16 10:39:30: silane flow problems Message-ID: From seymour at snf.stanford.edu Wed May 16 15:10:44 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 May 2007 15:10:44 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-16 10:39:30: silane flow problems Message-ID: replaced MFC pot and adjusted. Silane flows at setpoint. Running lto400 to check temp control after rep[lacing profile t/c.it looks good so i will release the tube. From seymour at snf.stanford.edu Thu May 17 09:05:19 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 May 2007 09:05:19 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-17 09:05:19: Silane MFC njot responding properly Message-ID: From shott at snf.stanford.edu Sat May 19 08:23:47 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 May 2007 08:23:47 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-19 08:23:46: Needs restart after power failure ... Message-ID: From mdickey at snf.stanford.edu Tue May 22 09:02:17 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 22 May 2007 09:02:17 -0700 Subject: Comment tylanbpsg SNF 2007-05-22 09:02:16: Test Message-ID: Needs test From seymour at snf.stanford.edu Tue May 22 10:10:17 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 10:10:17 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-17 09:05:19: Silane MFC njot responding properly Message-ID: I went all through the Silane MFC channel. I removed sensor and control, cleaned channel and reinstalled contorl valve. I installed another sensor. Replaced zero pot and quad op amp. reassembled MFS460 monoblock and checked all gas zeros on monoblock. Flowed gases and turned up temp to idle at 400. released tube for testying. From maurice at snf.stanford.edu Tue May 22 14:48:18 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 May 2007 14:48:18 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-22 14:48:18: Bad uniformity Message-ID: LTO400 00:20:00 expected 4400 Ang Front boat (c,t,b,r,l) #5 162 168 161 169 176 #13 236 238 225 238 240 #24 398 407 377 405 401 Rear boat #5 1105 1072 1088 1083 1123 #13 1857 1913 1709 1880 1871 #24 2440 2270 2612 2551 2576 From maurice at snf.stanford.edu Tue May 22 14:48:46 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 May 2007 14:48:46 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-19 08:23:46: Needs restart after power failure ... Message-ID: restarted after shutdown From seymour at snf.stanford.edu Wed May 23 14:44:48 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 14:44:48 -0700 Subject: Comment tylanbpsg SNF 2007-05-23 14:44:47: Silane flow Message-ID: Inserted N2 MFc in series with Monoblock Silane flow controller and flowed N2. at a setpoint of 100 sccm silane I got 172 and calculated value was 166 SCCM. Put everything back and check for leaks in silane line and flowed silane to setpoint of 100 SCCM. From maurice at snf.stanford.edu Thu May 24 11:05:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 11:05:37 -0700 Subject: Problem tylanbpsg SNF 2007-05-24 11:05:36: MFS alarm (while in pump prgram) Message-ID: SIH4 leak From seymour at snf.stanford.edu Thu May 24 11:19:09 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 24 May 2007 11:19:09 -0700 Subject: Problem tylanbpsg SNF 2007-05-24 11:05:36: MFS alarm (while in pump prgram) Message-ID: adjusted silane mfc zero to -11 not alarming at this time. From mtang at snf.stanford.edu Fri May 25 09:12:39 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 25 May 2007 09:12:39 -0700 Subject: Comment tylanbpsg SNF 2007-05-25 09:12:38: Temperature cal Message-ID: Ray did Temperature cal yesterday. From maurice at snf.stanford.edu Fri May 25 15:15:55 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 May 2007 15:15:55 -0700 Subject: Comment tylanbpsg SNF 2007-05-25 15:15:54: Test after Silane check and temp cal Message-ID: LTO400 00:20:00 expected ~4400 Ang Front boat (c,t,b,l,r) #5 178 182 170 176 183 #13 276 276 270 277 275 #23 432 434 426 432 436 back boat #5 1134 1112 1149 11201 1151 #13 1864 1901 1814 1874 1870 #23 3554 3742 3263 3596 3539 From chozone at snf.stanford.edu Mon May 28 02:13:56 2007 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Mon, 28 May 2007 02:13:56 -0700 Subject: Comment tylanbpsg SNF 2007-05-28 02:13:55: TEST_LTO400 & PSG400 Message-ID: Test are done under Maurice's allowance. 1. LTO400 5min expected ~1200A for nonmetal side only below 100A for all slot. 2. PSG400 to check ph3 mfc. 12min for 2500A. Metal side #23 2700A(center of wafer) #20 1900A Nonmetal side #23 550A #12 300A #3 230A From tberg at snf.stanford.edu Tue May 29 13:28:45 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2007 13:28:45 -0700 Subject: Comment tylanbpsg SNF 2007-05-22 09:02:16: Test Message-ID: done-bad From tberg at snf.stanford.edu Tue May 29 13:31:01 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2007 13:31:01 -0700 Subject: Comment tylanbpsg SNF 2007-05-25 09:12:38: Temperature cal Message-ID: noteed From maurice at snf.stanford.edu Tue May 29 16:52:12 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 29 May 2007 16:52:12 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-29 16:52:12: broken injector Message-ID: From mdickey at snf.stanford.edu Wed May 30 07:52:01 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 May 2007 07:52:01 -0700 Subject: Comment tylanbpsg SNF 2007-05-30 07:52:00: Injector Message-ID: replaced broken injector, addressing Silane alarm problem From mdickey at snf.stanford.edu Wed May 30 13:37:52 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 May 2007 13:37:52 -0700 Subject: Comment tylanbpsg SNF 2007-05-30 13:37:51: Test Message-ID: Test needed after resealing injector From maurice at snf.stanford.edu Wed May 30 14:14:10 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 14:14:10 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-29 16:52:12: broken injector Message-ID: injector replaced by Mike From maurice at snf.stanford.edu Wed May 30 14:14:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 May 2007 14:14:37 -0700 Subject: Shutdown tylanbpsg SNF 2007-05-22 14:48:18: Bad uniformity Message-ID: Injector replaced