From mdickey at snf.stanford.edu Fri Nov 2 06:56:58 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 2 Nov 2007 06:56:58 -0700 Subject: Comment tylanbpsg SNF 2007-11-02 06:56:57: Cable Message-ID: Boat loader cable replaced From mdickey at snf.stanford.edu Mon Nov 5 06:07:22 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 5 Nov 2007 06:07:22 -0800 Subject: Shutdown tylanbpsg SNF 2007-11-05 06:07:21: Tube pull Message-ID: Down for pull and clean From tberg at snf.stanford.edu Mon Nov 5 15:03:25 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Nov 2007 15:03:25 -0800 Subject: Comment tylanbpsg SNF 2007-11-05 15:03:23: Tube back together checking it out Message-ID: From mdickey at snf.stanford.edu Tue Nov 6 11:37:38 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 6 Nov 2007 11:37:38 -0800 Subject: Comment tylanbpsg SNF 2007-11-06 11:37:37: test needed Message-ID: Coat is done. All bearings and cable replaced. System needs a test. Dirty wafers in boxes at the load station. From tberg at snf.stanford.edu Tue Nov 6 12:22:17 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Nov 2007 12:22:17 -0800 Subject: Shutdown tylanbpsg SNF 2007-11-05 06:07:21: Tube pull Message-ID: Yellow lighting for Robin to do test From tberg at snf.stanford.edu Tue Nov 6 12:23:38 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Nov 2007 12:23:38 -0800 Subject: Problem tylanbpsg SNF 2007-11-06 12:23:38: Robin doing test for Qual Message-ID: From tberg at snf.stanford.edu Tue Nov 6 12:24:09 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Nov 2007 12:24:09 -0800 Subject: Comment tylanbpsg SNF 2007-10-26 18:07:59: tube left vented for hours Message-ID: noted From tberg at snf.stanford.edu Tue Nov 6 12:24:30 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Nov 2007 12:24:30 -0800 Subject: Problem tylanbpsg SNF 2007-10-31 20:43:44: Boat stops loading, needs manual push Message-ID: Bearings and cable replaced From tberg at snf.stanford.edu Tue Nov 6 12:25:19 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Nov 2007 12:25:19 -0800 Subject: Comment tylanbpsg SNF 2007-10-31 22:58:54: boat loading slowly Message-ID: Replaced cable and bearings From tberg at snf.stanford.edu Tue Nov 6 12:25:35 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Nov 2007 12:25:35 -0800 Subject: Comment tylanbpsg SNF 2007-11-02 06:56:57: Cable Message-ID: Noted From tberg at snf.stanford.edu Tue Nov 6 12:26:51 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Nov 2007 12:26:51 -0800 Subject: Comment tylanbpsg SNF 2007-11-05 15:03:23: Tube back together checking it out Message-ID: Noted From khanh at snf.stanford.edu Tue Nov 6 18:44:08 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Tue, 6 Nov 2007 18:44:08 -0800 Subject: Problem tylanbpsg SNF 2007-11-06 18:44:08: Abruptly change from wafer to wafer Message-ID: Did LTO400, 00:04:55, 13 metal wfs configuration, expected 1000A: Measured 5pts (C,T,L,B,R) using Ellipsometer 2sn slot:: 1041 1011 982 1048 1095 3rd slot: 811 905 821 741 821 Did an other LTO400, 00:01:30, 13 metal wfs config, expected 300A. 2nd slot: 253 282 252 238 269 3rd slot: 345 334 333 350 357 4th slot 263 291 259 244 278 From rohits at snf.stanford.edu Thu Nov 8 00:06:59 2007 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Thu, 8 Nov 2007 00:06:59 -0800 Subject: Shutdown tylanbpsg SNF 2007-11-08 00:06:58: large dep rate variation from wafer to wafer Message-ID: We ran LTO400 for 00:06:00. Metal boat, 13 wafer configuration. As the results below indicate, there are unacceptably large non-monotonic thickness variations from one wafer to the next (> 25% between adjacent wafers). 8 bare Si test wafers loaded as follows (front to back): tube dummy, w1, w2, ...., w8, 4 tube dummies. w1-w8 were measured on the rudolph ellipsometer, with the following results (w#/mean of 5 pts/intra-wfr std dev) w1: 1286A/34.8A, w2: From rohits at snf.stanford.edu Thu Nov 8 00:15:20 2007 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Thu, 8 Nov 2007 00:15:20 -0800 Subject: Comment tylanbpsg SNF 2007-11-08 00:15:20: test deposition results - large thickness variation between adjacent wafers Message-ID: Sorry - the last shutdown report got truncated. Here are the thickness results from the test run. LTO400 00:06:00, 13 wafer config in metal boat. Front: tube dummy, w1-w8, 4 tube dummies:Back Thickness mean and std dev measured over 5 points per wafer on Rudolph ellipsometer w1: 1286A (std dev=34.8A), w2: 1326A (45.1A), w3: 1019A (77.3A), w4: 1207A (32.6A), w5: 1374A (48A), w6: 1084A (69A), w7: 1418A (38A), w8: 1131A (70.2A) Note the large difference between w2 and w3, and also between w6 and its immediate neighbors. This is similar to the problem reported yesterday by Khanh. From mdickey at snf.stanford.edu Thu Nov 8 10:22:23 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 8 Nov 2007 10:22:23 -0800 Subject: Comment tylanbpsg SNF 2007-11-08 10:22:22: Test Message-ID: Needs test after replacing injectors From latta at snf.stanford.edu Thu Nov 8 16:36:24 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:36:24 -0800 Subject: Comment tylanbpsg SNF 2007-11-08 10:22:22: Test Message-ID: completed. See coral comments for results From latta at snf.stanford.edu Thu Nov 8 16:36:54 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:36:54 -0800 Subject: Comment tylanbpsg SNF 2007-11-06 11:37:37: test needed Message-ID: Tests done. From latta at snf.stanford.edu Thu Nov 8 16:37:12 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:37:12 -0800 Subject: Problem tylanbpsg SNF 2007-11-06 12:23:38: Robin doing test for Qual Message-ID: And she did it! From latta at snf.stanford.edu Thu Nov 8 16:37:46 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:37:46 -0800 Subject: Comment tylanbpsg SNF 2007-10-24 18:20:07: alarm acknowledge light red Message-ID: Yep, it is.... From latta at snf.stanford.edu Thu Nov 8 16:38:42 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:38:42 -0800 Subject: Problem tylanbpsg SNF 2007-11-06 18:44:08: Abruptly change from wafer to wafer Message-ID: Newer test results will be posted in comments From latta at snf.stanford.edu Thu Nov 8 16:39:45 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:39:45 -0800 Subject: Shutdown tylanbpsg SNF 2007-11-08 00:06:58: large dep rate variation from wafer to wafer Message-ID: Tool usable in nonmetal side. More recent test done and in coral comments. From latta at snf.stanford.edu Thu Nov 8 16:40:47 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:40:47 -0800 Subject: Comment tylanbpsg SNF 2007-11-08 00:15:20: test deposition results - large thickness variation between adjacent wafers Message-ID: Replicated these results today. See comments. From latta at snf.stanford.edu Thu Nov 8 16:45:46 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:45:46 -0800 Subject: Problem tylanbpsg SNF 2007-11-08 16:45:45: Metal Side has strange results... Message-ID: Results of test run- 13 wafer configuration, 2 dummies in the front, 4 in back Tw1 is the front wafer, Std Dev in noted. Nanspec1 used for measurement Tw1 1306 (70), Tw2 1059 (76), Tw3 1374 (73), Tw4 1095 (71), Tw5 1369 (85), Tw6 1117 (80) From latta at snf.stanford.edu Thu Nov 8 16:51:46 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Nov 2007 16:51:46 -0800 Subject: Comment tylanbpsg SNF 2007-11-08 16:51:45: Qual test after injector change Message-ID: 13 wafer configuration, dummies front and back, front test wafer listed first, std dev noted. Nonmetal side Tw1 1183 (78), Tw2 1245 (78), Tw3 1167 (92), Tw4 1179 (72), Tw5 1164 (70), Tw6 1181 (54), Tw7 1100 (72), Tw81163 (66). Metal Side Tw1 1306 (70), Tw2 1059 (76), Tw3 1374 (73), Tw4 1095 (71), Tw5 1369 (85), Tw6 1117 (80). From nvgirish at snf.stanford.edu Fri Nov 9 01:24:40 2007 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Fri, 9 Nov 2007 01:24:40 -0800 Subject: Comment tylanbpsg SNF 2007-11-09 01:24:40: Thickness alternating Message-ID: Hi all I did a 6min run twice with 4 wafers (swapping them front to back and also rotating) in the middle of the boat. Here is the data (from right to left of the boat middle) average and std dev: 2339 60 2489 50 2266 47 2540 21 Not sure if it is repeatable or not. Girish From latta at snf.stanford.edu Fri Nov 9 10:24:55 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:24:55 -0800 Subject: Comment tylanbpsg SNF 2007-11-09 10:24:55: More information on metal side nonuniformity Message-ID: Last night two users swapped the positions of the metal and nonmetal boats and got the same every-other nonuniformity. The metal boat was in the quite uniform nonmetal boat's position, but still came out bad. Try swapping the metal boat wirh a new boat?? From robinhmb at yahoo.com Fri Nov 9 12:22:00 2007 From: robinhmb at yahoo.com (Robin King) Date: Fri, 9 Nov 2007 12:22:00 -0800 (PST) Subject: Comment tylanbpsg SNF 2007-11-09 10:24:55: More information on metal side nonuniformity In-Reply-To: <20071109182455.7AC644CF7B@smtp1.stanford.edu> Message-ID: <722169.54988.qm@web58702.mail.re1.yahoo.com> Yes, thanks. The slots seem to be worn out and too wide so the wafers tilt, causing variation in deposition. --- latta at snf.stanford.edu wrote: > Last night two users swapped the positions of the metal and > nonmetal boats and got the same every-other nonuniformity. The > metal boat was in the quite uniform nonmetal boat's position, but > still came out bad. > Try swapping the metal boat wirh a new boat?? > > __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From mdickey at snf.stanford.edu Fri Nov 9 13:00:31 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 9 Nov 2007 13:00:31 -0800 Subject: Comment tylanbpsg SNF 2007-11-09 13:00:30: Metal boat replaced Message-ID: The bottom part of the metal boat has been replaced with a new boat. There is still some slop in the way the wafers sit in the boat From maurice at snf.stanford.edu Mon Nov 12 16:39:30 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Nov 2007 16:39:30 -0800 Subject: Problem tylanbpsg SNF 2007-11-08 16:45:45: Metal Side has strange results... Message-ID: Metal boat replaced. Slots had wided from cleaning and wafers were not standing straight. User King ran a test an reports that "it came out well this time". (Robin, thank you for your report) From maurice at snf.stanford.edu Mon Nov 12 16:40:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Nov 2007 16:40:41 -0800 Subject: Comment tylanbpsg SNF 2007-11-08 16:51:45: Qual test after injector change Message-ID: logged From maurice at snf.stanford.edu Mon Nov 12 16:40:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Nov 2007 16:40:49 -0800 Subject: Comment tylanbpsg SNF 2007-11-09 01:24:40: Thickness alternating Message-ID: Metal boat replaced. Slots had wided from cleaning and wafers were not standing straight. From maurice at snf.stanford.edu Mon Nov 12 16:41:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Nov 2007 16:41:04 -0800 Subject: Comment tylanbpsg SNF 2007-11-09 10:24:55: More information on metal side nonuniformity Message-ID: logged From rwoo at snf.stanford.edu Fri Nov 16 11:12:10 2007 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Fri, 16 Nov 2007 11:12:10 -0800 Subject: Problem tylanbpsg SNF 2007-11-16 11:12:08: please replace non-metal wand tip Message-ID: A user last night inadvertently used the non-metal wand to unload a few wafers from the metal boat on the LTO. Coral was down in the lab at the time so I didn't immediately write it up and then forgot to do so until now. From seymour at snf.stanford.edu Fri Nov 16 11:53:43 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Nov 2007 11:53:43 -0800 Subject: Problem tylanbpsg SNF 2007-11-16 11:12:08: please replace non-metal wand tip Message-ID: wand tip replaced with a new one From gyama at snf.stanford.edu Mon Nov 19 13:09:06 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 19 Nov 2007 13:09:06 -0800 Subject: Comment tylanbpsg SNF 2007-11-19 13:09:05: no TLO dummy wafers in rolly cart Message-ID: From maurice at snf.stanford.edu Wed Nov 28 15:20:13 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Nov 2007 15:20:13 -0800 Subject: Comment tylanbpsg SNF 2007-11-28 15:20:13: non metal wafers added Message-ID: new non metal dummies