From jrjain at snf.stanford.edu Mon Oct 1 14:09:39 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 1 Oct 2007 14:09:39 -0700 Subject: Problem tylanbpsg SNF 2007-10-01 14:09:38: 250-300% nonuniformity Message-ID: LTO300, 15min, metal boat. Target = 1500A Front wafer - ~1100A Back wafer - ~2800A From maurice at snf.stanford.edu Mon Oct 1 17:16:38 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 1 Oct 2007 17:16:38 -0700 Subject: Comment tylanbpsg SNF 2007-10-01 17:16:37: uniformity test,metal boat Message-ID: LTO400 00:20:00 13 wafers metal boat ctblr #3 3905 4022 3795 3939 3908 #7 4036 3978 4085 3943 4134 # 12 4541 4550 4569 4521 4647 look normal for this recipe I'll ask JrJain if he had dummies in front of his wafers From maurice at snf.stanford.edu Fri Oct 12 10:45:21 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 10:45:21 -0700 Subject: Comment tylanbpsg SNF 2007-10-01 17:16:37: uniformity test,metal boat Message-ID: logged From maurice at snf.stanford.edu Fri Oct 12 10:48:00 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 10:48:00 -0700 Subject: Problem tylanbpsg SNF 2007-10-01 14:09:38: 250-300% nonuniformity Message-ID: User had no dummy in front of wafers From kevhuang at snf.stanford.edu Wed Oct 24 18:20:08 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Wed, 24 Oct 2007 18:20:08 -0700 Subject: Comment tylanbpsg SNF 2007-10-24 18:20:07: alarm acknowledge light red Message-ID: this is the one next to the manual boat in/out control From jrjain at snf.stanford.edu Fri Oct 26 18:08:00 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 26 Oct 2007 18:08:00 -0700 Subject: Comment tylanbpsg SNF 2007-10-26 18:07:59: tube left vented for hours Message-ID: Previous user failed to run pump program after done with furnace. Recipe LTO350P was still loaded with system at ready state. Loaded and ran pump program. From king at snf.stanford.edu Wed Oct 31 20:43:45 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 31 Oct 2007 20:43:45 -0700 Subject: Problem tylanbpsg SNF 2007-10-31 20:43:44: Boat stops loading, needs manual push Message-ID: The boat loaded stops when the end cap has about 18 inches to go. Needs a little push to get it going again. This happened on the deposition program and also the pumpdown program (i.e. two fails out of two events). Second problem: the boat still can't be pulled out manually-- it will come out an inch but then turn right around and go back in again. From ehe at snf.stanford.edu Wed Oct 31 22:58:55 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 31 Oct 2007 22:58:55 -0700 Subject: Comment tylanbpsg SNF 2007-10-31 22:58:54: boat loading slowly Message-ID: Didn't have any problem (see previous post) with boat except that it's moving more slowly than normal.