From tberg at snf.stanford.edu Wed Sep 5 06:30:18 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 5 Sep 2007 06:30:18 -0700 Subject: Problem tylanbpsg SNF 2007-08-23 00:06:21: In addition to the SiH4 problem Message-ID: reseated cable to display board. ot led out From fengj at snf.stanford.edu Sat Sep 15 01:37:30 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 15 Sep 2007 01:37:30 -0700 Subject: Problem tylanbpsg SNF 2007-09-15 01:37:30: Pressure Error Message-ID: Ran LTO300, the base pressure and leak pressure were both 0.0. The process pressure was 160, much lower than usual. There should an error in the pressure reading. From king at snf.stanford.edu Sat Sep 15 20:29:55 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 15 Sep 2007 20:29:55 -0700 Subject: Problem tylanbpsg SNF 2007-09-15 20:29:55: Metal wand hose has become short Message-ID: It's stretched very close to the hot quartzware. Would be faster to replace the hose than pull and clean the quartzware. From seymour at snf.stanford.edu Mon Sep 17 09:02:43 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Sep 2007 09:02:43 -0700 Subject: Problem tylanbpsg SNF 2007-09-15 01:37:30: Pressure Error Message-ID: checked baratron pressure reading and adjusted it to read correct base pressure. Ran LTO400 gas setpoint and checked process pressure and it was 220 mT which was correct. From seymour at snf.stanford.edu Mon Sep 17 11:05:25 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Sep 2007 11:05:25 -0700 Subject: Problem tylanbpsg SNF 2007-09-15 20:29:55: Metal wand hose has become short Message-ID: installed new vac wand hose for bpsg vac wand From khanh at snf.stanford.edu Wed Sep 19 18:49:14 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Wed, 19 Sep 2007 18:49:14 -0700 Subject: Problem tylanbpsg SNF 2007-09-19 18:49:13: The metal boat was broken one side Message-ID: Found broken while unloading the tube. Unable to load the wafers. From mdickey at snf.stanford.edu Thu Sep 20 06:57:24 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 20 Sep 2007 06:57:24 -0700 Subject: Problem tylanbpsg SNF 2007-09-19 18:49:13: The metal boat was broken one side Message-ID: Boat has been replaced