From maurice at snf.stanford.edu Tue Apr 1 13:23:54 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 1 Apr 2008 13:23:54 -0700 Subject: Comment tylanbpsg SNF 2008-04-01 13:23:53: Ratio test(O=120, S=88)/Particles Message-ID: Ran a 20 min test changing the gas flows. 02=120 (normally 136) SiH4=88 (normally 155) Deposition pressure was ~225 (normally ~260) Thickness 2400 ang (normally~4000ang) Still have the particles. From maurice at snf.stanford.edu Wed Apr 2 16:08:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Apr 2008 16:08:09 -0700 Subject: Comment tylanbpsg SNF 2008-04-02 16:08:08: Test:new boat&clean dummies...still particles Message-ID: Repeated yesterdays reduced SiH4 test...with a new non-metal boat and stripped dummy wafers Ran a 20 min test changing the gas flows. 02=120 (normally 136) SiH4=88 (normally 155) Deposition pressure was ~225 (normally ~260) Thickness 2500 ang (normally~4000ang) Still have the particles. From rik at snf.stanford.edu Wed Apr 2 19:10:07 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 2 Apr 2008 19:10:07 -0700 Subject: Comment tylanbpsg SNF 2008-04-02 19:10:06: Tube not pumped Message-ID: The tube was not pumped down when I enabled it @ 7 pm. From maurice at snf.stanford.edu Thu Apr 3 16:06:59 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Apr 2008 16:06:59 -0700 Subject: Shutdown tylanbpsg SNF 2008-04-03 16:06:58: Investigating particles Message-ID: System at 600c and purging with O2. System will be up (yellow lighted) ~18:00 From maurice at snf.stanford.edu Thu Apr 3 17:15:56 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Apr 2008 17:15:56 -0700 Subject: Shutdown tylanbpsg SNF 2008-04-03 16:06:58: Investigating particles Message-ID: O2 off. System cooling back to 350c. System running pump program. From maurice at snf.stanford.edu Fri Apr 4 11:16:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Apr 2008 11:16:14 -0700 Subject: Comment tylanbpsg SNF 2008-04-04 11:16:14: LTO 400 test...particles Message-ID: Test after He leakcheck and High temp O2 Ran the standard LTO400 00:20:00 Still have the particle. From maurice at snf.stanford.edu Fri Apr 4 11:17:16 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Apr 2008 11:17:16 -0700 Subject: Comment tylanbpsg SNF 2008-04-02 19:10:06: Tube not pumped Message-ID: Clearing user comment: pump program loaded and system pump down From maurice at snf.stanford.edu Fri Apr 4 15:10:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Apr 2008 15:10:14 -0700 Subject: Comment tylanbpsg SNF 2008-04-04 15:10:14: Running JSTEST1 Message-ID: jstest1 00:20:00 N2 stays on during step50...the O2 purge before deposition. N2 shuts off in step55...SiH4 comes on...deposition From maurice at snf.stanford.edu Fri Apr 4 17:39:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 4 Apr 2008 17:39:05 -0700 Subject: Comment tylanbpsg SNF 2008-04-04 15:10:14: Running JSTEST1 Message-ID: Having the N2 on during the O2 purge didn't eliminate the particles. System will stay yellow for the weekend. We will continue testing on Monday. The tube is being reserved on Wed for a possible tube pull. From tberg at snf.stanford.edu Mon Apr 7 08:56:50 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Apr 2008 08:56:50 -0700 Subject: Comment tylanbpsg SNF 2008-04-07 08:56:50: Changed Oil in Mech Pump Message-ID: From maurice at snf.stanford.edu Mon Apr 7 15:29:15 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Apr 2008 15:29:15 -0700 Subject: Comment tylanbpsg SNF 2008-04-07 15:29:14: Switched to second SiH4 bottle Message-ID: From maurice at snf.stanford.edu Mon Apr 7 17:49:02 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Apr 2008 17:49:02 -0700 Subject: Comment tylanbpsg SNF 2008-04-07 17:49:01: LTO test with switched SiH4/particles Message-ID: LTO400 00:20:00 with switched SiH4 particles From king at snf.stanford.edu Mon Apr 7 19:38:28 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 7 Apr 2008 19:38:28 -0700 Subject: Comment tylanbpsg SNF 2008-04-07 19:38:27: Pump sounds different; N2 flow Message-ID: It's fairly subtle but it sounds as though it's straining a bit and runs in cycles of about 30 to 40 seconds. Also, there is no N2 flow to the pump when the gate valve is closed (venting plus leak checks etc); not sure if this is how it's normally programmed. FYI and thanks. From shott at snf.stanford.edu Wed Apr 9 05:43:07 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 9 Apr 2008 05:43:07 -0700 Subject: Shutdown tylanbpsg SNF 2008-04-09 05:43:06: Shutdown .... Message-ID: Shutdown for pulll and clean ... From maurice at snf.stanford.edu Wed Apr 9 16:40:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Apr 2008 16:40:21 -0700 Subject: Shutdown tylanbpsg SNF 2008-04-09 05:43:06: Shutdown .... Message-ID: Pulled,cleaned coated and tested. LTO400 00:20:00 Still particles/rough surface at top of wafer. Center has few particles and smooth background. Bottom has partilces like the top of wafer but smoother background. Yellow light. From maurice at snf.stanford.edu Wed Apr 9 16:41:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Apr 2008 16:41:14 -0700 Subject: Comment tylanbpsg SNF 2008-04-09 16:41:13: Fewer particles in center of wafer Message-ID: Pulled,cleaned coated and tested. LTO400 00:20:00 Still particles/rough surface at top of wafer. Center has few particles and smooth background. Bottom has partilces like the top of wafer but smoother background. Yellow light. From maurice at snf.stanford.edu Wed Apr 9 16:42:52 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Apr 2008 16:42:52 -0700 Subject: Comment tylanbpsg SNF 2008-03-19 01:43:38: Defects Message-ID: comment to the archives From maurice at snf.stanford.edu Wed Apr 9 16:43:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Apr 2008 16:43:09 -0700 Subject: Comment tylanbpsg SNF 2008-03-19 10:59:24: checking source for particles Message-ID: comment to the archives From maurice at snf.stanford.edu Tue Apr 22 16:10:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 Apr 2008 16:10:28 -0700 Subject: Comment tylanbpsg SNF 2008-04-22 16:10:27: particle update Message-ID: -Ran LTO400 00:10:00 for a training. expected 2000Ang Actually 1860 -Particles at top edge of wafer only...the rest of the wafer looked good. -Tube has 5.92 microns since last test (and the pull) From maurice at snf.stanford.edu Wed Apr 23 15:31:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 23 Apr 2008 15:31:37 -0700 Subject: Comment tylanbpsg SNF 2008-04-23 15:31:36: Non metal dummies added Message-ID: 12 new cleaned dummies added to non metal box From sbasumal at snf.stanford.edu Thu Apr 24 23:06:05 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Thu, 24 Apr 2008 23:06:05 -0700 Subject: Problem tylanbpsg SNF 2008-04-24 23:06:04: Dummy broke... Message-ID: .while I was trying to load it . I removed the big pieces but there might be small shards left. Probably good to a furnace clean before further use. From rik at snf.stanford.edu Wed Apr 30 20:05:47 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 30 Apr 2008 20:05:47 -0700 Subject: Problem tylanbpsg SNF 2008-04-30 20:05:46: Wand leaving residue on wafers Message-ID: