Comment tylanbpsg SNF 2008-04-01 13:23:53: Ratio test(O=120, S=88)/Particles

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Apr 1 13:23:54 PDT 2008


Ran a 20 min test changing the gas flows.
02=120 (normally 136)
SiH4=88 (normally 155)
Deposition pressure was ~225 (normally ~260)
Thickness 2400 ang (normally~4000ang)
Still have the particles.




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