Comment tylanbpsg SNF 2008-04-02 16:08:08: Test:new boat&clean dummies...still particles

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Apr 2 16:08:09 PDT 2008


Repeated yesterdays reduced SiH4 test...with a new non-metal boat and stripped dummy wafers
Ran a 20 min test changing the gas flows.
02=120 (normally 136)
SiH4=88 (normally 155)
Deposition pressure was ~225 (normally ~260)
Thickness 2500 ang (normally~4000ang)
Still have the particles.




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