Comment tylanbpsg SNF 2008-04-04 15:10:14: Running JSTEST1

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Apr 4 15:10:14 PDT 2008


jstest1   00:20:00
N2 stays on during step50...the O2 purge before deposition.
N2 shuts off in step55...SiH4 comes on...deposition




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