From maurice at snf.stanford.edu Fri Aug 1 17:31:55 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Aug 2008 17:31:55 -0700 Subject: Problem tylanbpsg SNF 2008-03-28 15:07:16: Particles Message-ID: comment from March---to the archives From maurice at snf.stanford.edu Fri Aug 1 17:32:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Aug 2008 17:32:28 -0700 Subject: Comment tylanbpsg SNF 2008-03-20 09:50:51: further results of particle checking Message-ID: comment from March---to the archives From seymour at snf.stanford.edu Fri Aug 8 07:40:14 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Aug 2008 07:40:14 -0700 Subject: Problem tylanbpsg SNF 2008-07-31 19:20:14: Door fails to seal Message-ID: replaced drive cable and adjusted door flag. door closes properly From maurice at snf.stanford.edu Fri Aug 8 15:01:01 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Aug 2008 15:01:01 -0700 Subject: Comment tylanbpsg SNF 2008-08-08 15:01:01: LTO400 program modified Message-ID: In step 50: O2 flow changed from 136 to 120sccm N2 stays now stays on in this step instead of shutting off In step55: N2 shuts off SiH4 flow changed from 155 to 85 From maurice at snf.stanford.edu Fri Aug 8 15:05:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Aug 2008 15:05:19 -0700 Subject: Comment tylanbpsg SNF 2008-08-08 15:05:18: LTO300 recipe modified Message-ID: In step 50: O2 flow changed from 136 to 120sccm N2 stays now stays on in this step instead of shutting off In step55: N2 shuts off SiH4 flow changed from 155 to 85 From maurice at snf.stanford.edu Fri Aug 8 16:39:12 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Aug 2008 16:39:12 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-21 06:14:14: LTO upgrade Message-ID: LTO process testing is not yet complete but it is being yellowlighted for the weekend. If you are doing capping layers or sacrafical layers the system may be ok. We do not recommend using it for device layers. The LTO300 and LTO400 recipes have been modified (and will be modified again next week) , the deposition rates have changed so you should run tests. From maurice at snf.stanford.edu Fri Aug 8 16:41:15 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Aug 2008 16:41:15 -0700 Subject: Problem tylanbpsg SNF 2008-08-08 16:41:14: Processes not characterized/Yellow light Message-ID: LTO process testing is not yet complete but it is being yellowlighted for the weekend. If you are doing capping layers or sacrafical layers the system may be ok. We do not recommend using it for device layers. The LTO300 and LTO400 recipes have been modified (and will be modified again next week) , the deposition rates have changed so you should run tests before committing any wafers. From jrjain at snf.stanford.edu Sat Aug 9 06:38:38 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sat, 9 Aug 2008 06:38:38 -0700 Subject: Problem tylanbpsg SNF 2008-08-09 06:38:37: Last user failed to run pump Message-ID: It appears that the last user failed to load and run PUMP11. From jrjain at snf.stanford.edu Sat Aug 9 10:00:25 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sat, 9 Aug 2008 10:00:25 -0700 Subject: Problem tylanbpsg SNF 2008-08-09 10:00:25: Temperature Problem Message-ID: During LTO300 run, TEMPL = 300.5 TEMPC = 314.3 TEMPS = 316.0b (b - bad TC) From okilic at snf.stanford.edu Sat Aug 9 15:39:29 2008 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Sat, 9 Aug 2008 15:39:29 -0700 Subject: Problem tylanbpsg SNF 2008-08-09 15:39:29: Tube won't go in completely Message-ID: Need to push it manually to make it go in completely. Otherwise won't pump down and run recipe. Motor makes weird noise too. From skoh at snf.stanford.edu Sun Aug 10 09:51:47 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sun, 10 Aug 2008 09:51:47 -0700 Subject: Problem tylanbpsg SNF 2008-08-10 09:51:46: Will not pump down, MFS Alarm Message-ID: When I came in today, tube was still vented. Tried several times, but tube will not run Pump11 and gives MFS Alarm. From narii at snf.stanford.edu Sun Aug 10 16:24:16 2008 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 10 Aug 2008 16:24:16 -0700 Subject: Problem tylanbpsg SNF 2008-08-10 16:24:15: MFS alarm Message-ID: while running pump11, mfs alarm occurs. From maryamzm at snf.stanford.edu Mon Aug 11 01:05:05 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Mon, 11 Aug 2008 01:05:05 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-11 01:05:03: Message-ID: During LTO400 recipe MFS alarm at step 20. I tried to clear it, so it went through step 20 but failed leak check. I tried this multiple times. MFS alarm comes on again during pump 11 at step 10. BPSG won't pump down and it is sitting in air. From tberg at snf.stanford.edu Mon Aug 11 06:45:25 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Aug 2008 06:45:25 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 06:45:24: Broken cantilever sheath Message-ID: The nearest cantilever sheath is broken that is why it won't pump down From seymour at snf.stanford.edu Mon Aug 11 08:16:28 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:16:28 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 08:16:27: tube not pumping down Message-ID: found one broken and one cracked, at about the same length, loader sheaths. replaced sheaths and pumped the tube to 10 mt. Heating it back up now. From seymour at snf.stanford.edu Mon Aug 11 08:44:31 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:44:31 -0700 Subject: Problem tylanbpsg SNF 2008-08-11 08:44:30: tube now pumping Message-ID: replaced both sheaths. reassembled tube, base pressure and leak rate good. From seymour at snf.stanford.edu Mon Aug 11 08:45:29 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:45:29 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-11 01:05:03: Message-ID: From seymour at snf.stanford.edu Mon Aug 11 08:46:09 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:46:09 -0700 Subject: Problem tylanbpsg SNF 2008-08-09 06:38:37: Last user failed to run pump Message-ID: tube in auto with pump recipe running. From seymour at snf.stanford.edu Mon Aug 11 08:46:46 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:46:46 -0700 Subject: Problem tylanbpsg SNF 2008-08-09 15:39:29: Tube won't go in completely Message-ID: loader working properly after loader sheath change. From seymour at snf.stanford.edu Mon Aug 11 08:47:18 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:47:18 -0700 Subject: Problem tylanbpsg SNF 2008-08-10 09:51:46: Will not pump down, MFS Alarm Message-ID: pumps down good after loader sheath changed From seymour at snf.stanford.edu Mon Aug 11 08:47:32 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 08:47:32 -0700 Subject: Problem tylanbpsg SNF 2008-08-10 16:24:15: MFS alarm Message-ID: no alarms at this time From gyama at snf.stanford.edu Mon Aug 11 14:01:41 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 11 Aug 2008 14:01:41 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 14:01:40: non-metal vacuum wand tip broken Message-ID: From seymour at snf.stanford.edu Mon Aug 11 14:28:01 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Aug 2008 14:28:01 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 14:01:40: non-metal vacuum wand tip broken Message-ID: vacuum tip for non metal has been replaced. From maurice at snf.stanford.edu Mon Aug 11 16:17:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Aug 2008 16:17:46 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 16:17:46: Injector direction moved Message-ID: Was / \ (~45 degrees inward) now / / (~45 to the right) From skoh at snf.stanford.edu Wed Aug 13 19:14:12 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 13 Aug 2008 19:14:12 -0700 Subject: Problem tylanbpsg SNF 2008-08-13 19:14:12: Temperature Problem Message-ID: During LTO350P run, TEMPL = G 353.5b. Thermocouple may be bad. From tberg at snf.stanford.edu Thu Aug 14 13:36:38 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Aug 2008 13:36:38 -0700 Subject: Comment tylanbpsg SNF 2008-08-14 13:36:37: 110vac to bank gone Message-ID: 110vac to bank gone From maurice at snf.stanford.edu Fri Aug 15 18:41:02 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 15 Aug 2008 18:41:02 -0700 Subject: Comment tylanbpsg SNF 2008-08-15 18:41:01: Furnace element connection cleaned Message-ID: Jim M. found a bad connection on furnace element. He cleaned contacts. Furnace heating up From tberg at snf.stanford.edu Sat Aug 16 07:15:25 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sat, 16 Aug 2008 07:15:25 -0700 Subject: Comment tylanbpsg SNF 2008-08-16 07:15:24: Replaced bad source zone SCR Message-ID: Ray and i changed the source zone SCR and firing card yesterday before Jims test From tberg at snf.stanford.edu Mon Aug 18 06:33:48 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:33:48 -0700 Subject: Comment tylanbpsg SNF 2008-07-22 06:03:54: New gas panel installed Message-ID: noted From tberg at snf.stanford.edu Mon Aug 18 06:34:03 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:34:03 -0700 Subject: Comment tylanbpsg SNF 2008-07-21 07:19:15: Checked Pre mod flows purging gases Message-ID: noted From tberg at snf.stanford.edu Mon Aug 18 06:34:30 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:34:30 -0700 Subject: Comment tylanbpsg SNF 2008-07-24 07:23:28: Performed flow checks withcalibrated MFC Message-ID: noted From tberg at snf.stanford.edu Mon Aug 18 06:34:41 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:34:41 -0700 Subject: Comment tylanbpsg SNF 2008-07-23 12:50:13: Hardware installed Message-ID: noted From tberg at snf.stanford.edu Mon Aug 18 06:34:51 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:34:51 -0700 Subject: Comment tylanbpsg SNF 2008-07-24 12:04:44: He Leak Check Message-ID: noted From tberg at snf.stanford.edu Mon Aug 18 06:35:02 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:35:02 -0700 Subject: Comment tylanbpsg SNF 2008-07-30 11:25:36: hardware completed Message-ID: noted From tberg at snf.stanford.edu Mon Aug 18 06:35:30 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:35:30 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 06:45:24: Broken cantilever sheath Message-ID: Cantilever replaced From tberg at snf.stanford.edu Mon Aug 18 06:36:31 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:36:31 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 08:16:27: tube not pumping down Message-ID: Replaced sheaths From tberg at snf.stanford.edu Mon Aug 18 06:36:49 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:36:49 -0700 Subject: Problem tylanbpsg SNF 2008-08-11 08:44:30: tube now pumping Message-ID: Replaced sheaths From tberg at snf.stanford.edu Mon Aug 18 06:37:27 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Aug 2008 06:37:27 -0700 Subject: Comment tylanbpsg SNF 2008-08-14 13:36:37: 110vac to bank gone Message-ID: Replaced fuse checked operation From tberg at snf.stanford.edu Tue Aug 19 06:47:50 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Aug 2008 06:47:50 -0700 Subject: Comment tylanbpsg SNF 2008-08-19 06:47:49: Started temp cal at 250 c Message-ID: From maurice at snf.stanford.edu Tue Aug 19 17:50:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Aug 2008 17:50:39 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-19 17:50:38: running a temp cal Message-ID: Sorry for the late notice. It is taking longer than expected From maurice at snf.stanford.edu Wed Aug 20 10:17:40 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Aug 2008 10:17:40 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-19 17:50:38: running a temp cal Message-ID: temp cal complete From maurice at snf.stanford.edu Wed Aug 20 11:08:58 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Aug 2008 11:08:58 -0700 Subject: Comment tylanbpsg SNF 2008-08-20 11:08:58: 8/20/08 Shott temp measurements Message-ID: John Shott reports: Following re-tightening of some of the heater electrodes and a re-calibration of the profiles, things are looking FAR flatter than we have been seeing based on pulling the K-type thermocouple through the ceramic sheath at 2" inch intervals in spacing and at 2.5 minute measurement intervals. In this case, I have listed this as the thermocouple depth into the ceramic tube. In this case, the spike thermocouples for the source, center, and load are approximately at 58", 41" and 24" depths. Here are the thermocouple depths and measured temperatures for what should be a flat 400 degree C profile: TC Depth: Temp: 57" 403.3 55" 403.0 53" 402.7 51" 402.4 49" 402.5 47" 403.0 43" 403.3 41" 403.1 39" 403.3 37" 403.6 35" 403.6 33" 403.5 31" 403.4 29" 404.1 27" 404.3 25" 401.4 From king at snf.stanford.edu Thu Aug 21 00:39:36 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 21 Aug 2008 00:39:36 -0700 Subject: Problem tylanbpsg SNF 2008-08-21 00:39:35: pump problems Message-ID: Found it vented in Pump11. Then tried to run it three times but it failed leak check each time. I checked the seal etc. Finally it pumped down for Pump11. From huimei at snf.stanford.edu Thu Aug 21 19:05:09 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Thu, 21 Aug 2008 19:05:09 -0700 Subject: Problem tylanbpsg SNF 2008-08-21 19:05:08: STH IS WRONG WITH THE DIGISTAL BOARD Message-ID: it happens when push "manual","fast","out" board From masaharu at snf.stanford.edu Thu Aug 21 21:36:10 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 21 Aug 2008 21:36:10 -0700 Subject: Problem tylanbpsg SNF 2008-08-21 21:36:10: Leak check failed twice Message-ID: And base pressure was high. From masaharu at snf.stanford.edu Thu Aug 21 22:04:33 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 21 Aug 2008 22:04:33 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-21 22:04:32: Leck check won't pass Message-ID: tried three times, but no success From tberg at snf.stanford.edu Fri Aug 22 07:49:58 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 22 Aug 2008 07:49:58 -0700 Subject: Problem tylanbpsg SNF 2008-08-21 21:36:10: Leak check failed twice Message-ID: Tightened Ultraseal leak rate is now 9mT/ min From tberg at snf.stanford.edu Fri Aug 22 07:50:09 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 22 Aug 2008 07:50:09 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-21 22:04:32: Leck check won't pass Message-ID: Tightened Ultraseal leak rate is now 9mT/ min From tberg at snf.stanford.edu Fri Aug 22 08:05:49 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 22 Aug 2008 08:05:49 -0700 Subject: Comment tylanbpsg SNF 2008-08-22 08:05:49: Installed 2 cassettes and Dummies Message-ID: Installed 2 cassettes and Dummies per John's request From maurice at snf.stanford.edu Fri Aug 22 11:23:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 22 Aug 2008 11:23:21 -0700 Subject: Problem tylanbpsg SNF 2008-08-22 11:23:20: No Ph3 flow on LTO Message-ID: User is running LTOPSG40 program but PH3 flow is zero From seymour at snf.stanford.edu Fri Aug 22 11:51:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 22 Aug 2008 11:51:57 -0700 Subject: Problem tylanbpsg SNF 2008-08-22 11:23:20: No Ph3 flow on LTO Message-ID: found the ph3 valve closed. opened valve and checked flow which was to setpoint. From masaharu at snf.stanford.edu Mon Aug 25 00:16:43 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Mon, 25 Aug 2008 00:16:43 -0700 Subject: Problem tylanbpsg SNF 2008-08-25 00:16:43: MFW error Message-ID: I run LTO300 30mins and encountered MFS error for SiH4. SiH4 gradually decreased and then went down to zero, error showed up. I saw the same problem yesterday and it is reproducible. From tberg at snf.stanford.edu Mon Aug 25 06:22:45 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Aug 2008 06:22:45 -0700 Subject: Comment tylanbpsg SNF 2008-08-16 07:15:24: Replaced bad source zone SCR Message-ID: Noted From tberg at snf.stanford.edu Mon Aug 25 06:23:18 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Aug 2008 06:23:18 -0700 Subject: Comment tylanbpsg SNF 2008-08-15 18:41:01: Furnace element connection cleaned Message-ID: Noted From tberg at snf.stanford.edu Mon Aug 25 06:23:33 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Aug 2008 06:23:33 -0700 Subject: Comment tylanbpsg SNF 2008-08-22 08:05:49: Installed 2 cassettes and Dummies Message-ID: Noted From tberg at snf.stanford.edu Mon Aug 25 06:24:02 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Aug 2008 06:24:02 -0700 Subject: Comment tylanbpsg SNF 2008-07-31 18:30:01: 7/31/08 update Message-ID: Noted From maurice at snf.stanford.edu Mon Aug 25 18:16:04 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Aug 2008 18:16:04 -0700 Subject: Problem tylanbpsg SNF 2008-08-25 18:16:03: Temp gradient long tube Message-ID: John Shott profiled the tube this afternoon and found the temp ranged from 379 to 441. This will affect wafer to wafer uniformity. If uniformity is critical to your process you may want to wait until we get the temps better dialed in. From nvgirish at snf.stanford.edu Mon Aug 25 18:25:43 2008 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Mon, 25 Aug 2008 18:25:43 -0700 Subject: Comment tylanbpsg SNF 2008-08-25 18:25:42: Request: Please report LTO 400 data Message-ID: Hi all This is a request to all LTO users to writeup their obtained thickness data in the logbook for their LTO400 runs. It would be great for future users and getting the tube to operate optimally, I hope. Thanks a lot Girish From maurice at snf.stanford.edu Tue Aug 26 15:03:13 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Aug 2008 15:03:13 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-26 15:03:12: temp cal Message-ID: after profiling system was found out of calibration From tberg at snf.stanford.edu Wed Aug 27 11:15:31 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Aug 2008 11:15:31 -0700 Subject: Comment tylanbpsg SNF 2008-08-27 11:15:31: changed tcu board Message-ID: running temp cal From maurice at snf.stanford.edu Thu Aug 28 12:29:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Aug 2008 12:29:28 -0700 Subject: Comment tylanbpsg SNF 2008-08-28 12:29:27: LTO temp profile 8/28/08 Message-ID: inches/temp 0 402.5 2 404.2 4 406.0 6 407.1 8 407.7 10 407.6 12 407.0 14 405.6 16 404.0 18 402.9 20 401.6 22 400.1 24 398.8 26 398.6 28 399.1 30 400.3 32 398.5 34 383.1 From lindaw at snf.stanford.edu Thu Aug 28 15:55:56 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 28 Aug 2008 15:55:56 -0700 Subject: Problem tylanbpsg SNF 2008-08-28 15:55:55: MFS alarm Message-ID: From maurice at snf.stanford.edu Thu Aug 28 18:23:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Aug 2008 18:23:09 -0700 Subject: Shutdown tylanbpsg SNF 2008-08-26 15:03:12: temp cal Message-ID: Temp cal complete inches/temp 0 402.5 2 404.2 4 406.0 6 407.1 8 407.7 10 407.6 12 407.0 14 405.6 16 404.0 18 402.9 20 401.6 22 400.1 24 398.8 26 398.6 28 399.1 30 400.3 32 398.5 34 383.1 From kuanlinc at snf.stanford.edu Sat Aug 30 20:25:18 2008 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Sat, 30 Aug 2008 20:25:18 -0700 Subject: Problem tylanbpsg SNF 2008-08-30 20:25:17: Extremely slow dep rate Message-ID: MFS alarmed several times. LTO400 for 1 hour deposits only 2000A!