Comment tylanbpsg SNF 2008-08-08 15:05:18: LTO300 recipe modified

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Aug 8 15:05:19 PDT 2008


In step 50:
O2 flow changed from 136 to 120sccm
N2 stays now stays on in this step instead of shutting off
In step55:
N2 shuts off
SiH4 flow changed from 155 to 85




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