Problem tylanbpsg SNF 2008-08-08 16:41:14: Processes not characterized/Yellow light

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Aug 8 16:41:15 PDT 2008


LTO process testing is not yet complete but it is being yellowlighted for the weekend.  If you are doing capping layers or sacrafical layers the system may be ok.  We do not recommend using it for device layers.
The LTO300 and LTO400 recipes have been modified (and will be modified again next week) , the deposition rates have changed so you should run tests before committing any wafers. 




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