Shutdown tylanbpsg SNF 2008-08-11 01:05:03:

maryamzm at snf.stanford.edu maryamzm at snf.stanford.edu
Mon Aug 11 01:05:05 PDT 2008


During LTO400 recipe MFS alarm at step 20. I tried to clear it, so it went through step 20 but failed leak check. I tried this multiple times.  MFS alarm comes on again during pump 11 at step 10.  BPSG won't pump down and it is sitting in air. 




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