Problem tylanbpsg SNF 2008-08-25 00:16:43: MFW error

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Mon Aug 25 00:16:43 PDT 2008


I run LTO300 30mins and encountered MFS error for SiH4.
SiH4 gradually decreased and then went down to zero,
error showed up.
I saw the same problem yesterday and it is reproducible.




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