Problem tylanbpsg SNF 2008-08-25 18:16:03: Temp gradient long tube

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Aug 25 18:16:04 PDT 2008


John Shott profiled the tube this afternoon and found the temp ranged from 379 to 441.  This will affect wafer to wafer uniformity.  If uniformity is critical to your process you may want to wait until we get the temps better dialed in.




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