From tberg at snf.stanford.edu Mon Dec 1 06:10:08 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Dec 2008 06:10:08 -0800 Subject: Comment tylanbpsg SNF 2008-12-01 06:10:08: Pull and Clean is due Message-ID: From seymour at snf.stanford.edu Tue Dec 2 10:49:01 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Dec 2008 10:49:01 -0800 Subject: Comment tylanbpsg SNF 2008-12-02 10:49:01: pull and clean completed Message-ID: finishing up a coat at this time. tube will need a test before releasing. From maurice at snf.stanford.edu Tue Dec 2 11:31:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 11:31:46 -0800 Subject: Comment tylanbpsg SNF 2008-12-02 11:31:45: testing after pull/clean Message-ID: From maurice at snf.stanford.edu Tue Dec 2 14:38:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 14:38:42 -0800 Subject: Shutdown tylanbpsg SNF 2008-11-30 15:05:52: Cantilever sheath found broken Message-ID: Tube pulled, cleaned, coated and tested. LTO400PC 00:20:00 expected 2900A actual 3042A All wafers readings logged in LPCVD test logbook. From maurice at snf.stanford.edu Tue Dec 2 14:38:58 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 14:38:58 -0800 Subject: Comment tylanbpsg SNF 2008-12-01 06:10:08: Pull and Clean is due Message-ID: Tube pulled, cleaned, coated and tested. From maurice at snf.stanford.edu Tue Dec 2 14:39:23 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 14:39:23 -0800 Subject: Comment tylanbpsg SNF 2008-12-02 11:31:45: testing after pull/clean Message-ID: LTO400PC 00:20:00 expected 2900A actual 3042A All wafers readings logged in LPCVD test logbook. From maurice at snf.stanford.edu Tue Dec 2 14:39:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 14:39:34 -0800 Subject: Comment tylanbpsg SNF 2008-12-02 10:49:01: pull and clean completed Message-ID: Tube pulled, cleaned, coated and tested. LTO400PC 00:20:00 expected 2900A actual 3042A All wafers readings logged in LPCVD test logbook. From maurice at snf.stanford.edu Tue Dec 2 14:39:49 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 14:39:49 -0800 Subject: Comment tylanbpsg SNF 2008-11-27 01:15:32: sent tube back in Message-ID: logged From maurice at snf.stanford.edu Tue Dec 2 14:40:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 14:40:42 -0800 Subject: Problem tylanbpsg SNF 2008-11-27 23:32:31: MFS alarm when tube goes in Message-ID: BROKEN SHEATH Tube pulled, cleaned, coated and tested. From shott at snf.stanford.edu Thu Dec 4 13:39:09 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 4 Dec 2008 13:39:09 -0800 Subject: Problem tylanbpsg SNF 2008-08-08 16:41:14: Processes not characterized/Yellow light Message-ID: Should have been cleared long ago .... From masaharu at snf.stanford.edu Sat Dec 13 01:58:17 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 13 Dec 2008 01:58:17 -0800 Subject: Problem tylanbpsg SNF 2008-12-13 01:58:16: cantilever sheath was broken Message-ID: The process was successfully done, but when I tried to run PUMP11, N2 purge line was turned off and the tube cannot be pumped down. This is the problem which we often see recently. I think, cantilever sheeth was broken. Sorry for the inconvenience. From shott at snf.stanford.edu Sat Dec 13 10:05:06 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 10:05:06 -0800 Subject: Shutdown tylanbpsg SNF 2008-12-13 10:05:06: Pump not running .... Message-ID: I've checked the cantiever sheath as reported by masaharu ... It is not broken. However, further investigation showed that the pump is not running and won't reset. I'm going to start by adding more white oil .... as it appears to be low .... to see if that will allow the pump to start. Becuase of the pump situation, I'm clearing masaharu's problem report and setting a shutdown. Thanks, John From shott at snf.stanford.edu Sat Dec 13 10:05:18 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 10:05:18 -0800 Subject: Problem tylanbpsg SNF 2008-12-13 01:58:16: cantilever sheath was broken Message-ID: I've checked the cantiever sheath as reported by masaharu ... It is not broken. However, further investigation showed that the pump is not running and won't reset. I'm going to start by adding more white oil .... as it appears to be low .... to see if that will allow the pump to start. Becuase of the pump situation, I'm clearing masaharu's problem report and setting a shutdown. Thanks, John From shott at snf.stanford.edu Sat Dec 13 10:50:32 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 10:50:32 -0800 Subject: Shutdown tylanbpsg SNF 2008-12-13 10:05:06: Pump not running .... Message-ID: Pump oil was very low and pump was off. Sucked out the remaining oil and filled with white oil. Initial fill was to the "Max" line. After the pump started, fell to about 1 cm below the max line. Also cleaned out the vent cap that has a lot of greasy oily stuff in it. Started pump11 and, to my inexperienced eye at least, things seem to be running properly. John From shott at snf.stanford.edu Sat Dec 13 17:35:34 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 17:35:34 -0800 Subject: Problem tylanbpsg SNF 2008-12-13 17:35:33: Pump leaking badly .... Message-ID: Yikes .... this pump is leaking like a seive!!! I filled it this morning at about 11 a.m. and by 5:30 p.m. it is nearly empty. I can't believe that this only happened today .... Anyone doing a run later togight should contact me so that I can at least top off with pump oil. John From shott at snf.stanford.edu Sat Dec 13 20:54:07 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 20:54:07 -0800 Subject: Comment tylanbpsg SNF 2008-12-13 20:54:06: Added pump oil at 8:45 p.m. Message-ID: At about 8:45, the pump oil was down most of the way to the min level (probably 20% full between min and max). I added white oil to the max level at this time while the tube was at atmosphere. Serene ran the pump program to make sure that it could get to step 25 .... which it did. I saw a minimum base pressure of about 8 mTorr during the 4 minute pump. With 100 sccm of N2Purge pressure, the tube pressure stabilized at about 108 mTorr. I don't know how that compares to normal, but there is the data. I've left a note on the machine warning of this problem and asking all with reservations to contact me before running. I expect this should last overnight, however, and expect to be in reasonably early in the morning to check levels and refill. Thanks, John From shott at snf.stanford.edu Sun Dec 14 07:19:50 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Dec 2008 07:19:50 -0800 Subject: Comment tylanbpsg SNF 2008-12-14 07:19:48: Oil addded 7:15 am Sunday .... Message-ID: Oil was about 20-25% full this morning. Added oil to the max level and restarted the pump. Base pressure = 5.8 mTorr during step 10 of pump11. During step 20 with specificed N2 purg flow of 100 (actual = 89.1) pressure stabilizes at 106.9 mTorr. Should be good until late afternoon. John From shott at snf.stanford.edu Sun Dec 14 13:25:50 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Dec 2008 13:25:50 -0800 Subject: Problem tylanbpsg SNF 2008-12-13 17:35:33: Pump leaking badly .... Message-ID: Wow!!! For those of you keeping score at home, that's 2 "wow"s in one day. I finally realized that the leakage was coming from the sight glass. So at the end of the latest run, rather than simply adding oil, I had a spare sight glass that Cesar had helped me to extract from a pump awaiting rebuild. When I pulled out the old one, however, the problem was obvious: the gasket was on the wrong side of the sight glass. In otheer words, rather than having the sealing surface between the pump body and the sight glass, it was between the sight glass and the pressure plate. So, I've cleaned and reassembled the sight glass and refilled with pump oil. My prediction is that our oil usage will go down dramatically. Now, we have one remiaing problem: there's a huge amount of oil in the trays undeneath this bank of furnaces .... enough that I'm tempted to rename tylanbpsg to exxon_valdez! But that will be a project for another day .... Next question: how and when did this sight glass get misassembled? Thanks, John From shott at snf.stanford.edu Sun Dec 14 13:26:07 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Dec 2008 13:26:07 -0800 Subject: Comment tylanbpsg SNF 2008-12-13 20:54:06: Added pump oil at 8:45 p.m. Message-ID: Wow!!! For those of you keeping score at home, that's 2 "wow"s in one day. I finally realized that the leakage was coming from the sight glass. So at the end of the latest run, rather than simply adding oil, I had a spare sight glass that Cesar had helped me to extract from a pump awaiting rebuild. When I pulled out the old one, however, the problem was obvious: the gasket was on the wrong side of the sight glass. In otheer words, rather than having the sealing surface between the pump body and the sight glass, it was between the sight glass and the pressure plate. So, I've cleaned and reassembled the sight glass and refilled with pump oil. My prediction is that our oil usage will go down dramatically. Now, we have one remiaing problem: there's a huge amount of oil in the trays undeneath this bank of furnaces .... enough that I'm tempted to rename tylanbpsg to exxon_valdez! But that will be a project for another day .... Next question: how and when did this sight glass get misassembled? Thanks, John From shott at snf.stanford.edu Sun Dec 14 13:26:16 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Dec 2008 13:26:16 -0800 Subject: Comment tylanbpsg SNF 2008-12-14 07:19:48: Oil addded 7:15 am Sunday .... Message-ID: Wow!!! For those of you keeping score at home, that's 2 "wow"s in one day. I finally realized that the leakage was coming from the sight glass. So at the end of the latest run, rather than simply adding oil, I had a spare sight glass that Cesar had helped me to extract from a pump awaiting rebuild. When I pulled out the old one, however, the problem was obvious: the gasket was on the wrong side of the sight glass. In otheer words, rather than having the sealing surface between the pump body and the sight glass, it was between the sight glass and the pressure plate. So, I've cleaned and reassembled the sight glass and refilled with pump oil. My prediction is that our oil usage will go down dramatically. Now, we have one remiaing problem: there's a huge amount of oil in the trays undeneath this bank of furnaces .... enough that I'm tempted to rename tylanbpsg to exxon_valdez! But that will be a project for another day .... Next question: how and when did this sight glass get misassembled? Thanks, John From rshyam at snf.stanford.edu Sun Dec 14 15:36:58 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 14 Dec 2008 15:36:58 -0800 Subject: Comment tylanbpsg SNF 2008-12-14 15:36:57: switched metal boat and metal dummy boat lids Message-ID: a side bar on the metal boat lid broke while unloading. switched metal boat lid with dummy metal boat lid for now.