From king at snf.stanford.edu Thu Jul 3 19:36:31 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 3 Jul 2008 19:36:31 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-03 19:36:31: power lost Message-ID: From shott at snf.stanford.edu Thu Jul 3 21:41:44 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 3 Jul 2008 21:41:44 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-03 19:36:31: power lost Message-ID: There appears to have been a power glitch that, somewhat surprisingly, took down the 3 Tylan banks. I believe that it occurred near 7:30 p.m. on Friday evening. By the time that I arrived at about 8:30, Eric had recovered most of the tubes with the exception of teos2 that seems to have trouble communicating to the TCU. It's reporting TCU error 4 sometimes and 5 at other times ... but no amount of resetting or reseating seems to clear the error. However, with this exception, it appears as if all of the other Tylan tubes are functional. Thanks, John From masato at snf.stanford.edu Sat Jul 5 17:07:04 2008 From: masato at snf.stanford.edu (masato at snf.stanford.edu) Date: Sat, 5 Jul 2008 17:07:04 -0700 Subject: Problem tylanbpsg SNF 2008-07-05 17:07:02: Some parts of wafer support of non metal boat is broken Message-ID: From maurice at snf.stanford.edu Mon Jul 7 15:46:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Jul 2008 15:46:37 -0700 Subject: Comment tylanbpsg SNF 2008-07-07 15:46:37: new metal wafers added Message-ID: From tberg at snf.stanford.edu Tue Jul 8 06:13:22 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Jul 2008 06:13:22 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-08 06:13:22: pull and clean Message-ID: From seymour at snf.stanford.edu Wed Jul 9 15:42:05 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 9 Jul 2008 15:42:05 -0700 Subject: Comment tylanbpsg SNF 2008-07-09 15:42:04: pull and clean completed Message-ID: There are a couple of door issues I am working on. The leak rate was good cold so I turned on element breaker. Tomorrow I will start a coar recipe From seymour at snf.stanford.edu Thu Jul 10 08:26:09 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Jul 2008 08:26:09 -0700 Subject: Comment tylanbpsg SNF 2008-07-10 08:26:09: started coat recipe Message-ID: loader operation is working normally. From maurice at snf.stanford.edu Thu Jul 10 14:00:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:00:28 -0700 Subject: Comment tylanbpsg SNF 2008-07-10 08:26:09: started coat recipe Message-ID: coat complete From maurice at snf.stanford.edu Thu Jul 10 14:00:48 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:00:48 -0700 Subject: Comment tylanbpsg SNF 2008-07-09 15:42:04: pull and clean completed Message-ID: pull and clean completed From maurice at snf.stanford.edu Thu Jul 10 14:02:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:02:14 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-08 06:13:22: pull and clean Message-ID: pull and clean completed ran LTO400 00:20:00 expected ~4000 actual 4167 some particles From maurice at snf.stanford.edu Thu Jul 10 14:02:30 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:02:30 -0700 Subject: Comment tylanbpsg SNF 2008-07-07 15:46:37: new metal wafers added Message-ID: to archives From maurice at snf.stanford.edu Thu Jul 10 14:02:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:02:44 -0700 Subject: Problem tylanbpsg SNF 2008-07-05 17:07:02: Some parts of wafer support of non metal boat is broken Message-ID: boat replaced From maurice at snf.stanford.edu Thu Jul 10 14:02:58 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:02:58 -0700 Subject: Problem tylanbpsg SNF 2008-06-13 23:09:05: Boat cover handler was broken. Message-ID: replaced From maurice at snf.stanford.edu Thu Jul 10 14:03:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:03:17 -0700 Subject: Comment tylanbpsg SNF 2008-05-23 08:58:36: was step 35 in LTO450 changed to 30min Message-ID: From maurice at snf.stanford.edu Thu Jul 10 15:02:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Jul 2008 15:02:26 -0700 Subject: Problem tylanbpsg SNF 2008-07-10 15:02:26: Door not closing completely Message-ID: Door makes the flag but it is still open a little. Trys to pump down the room. Make sure door closes completely From king at snf.stanford.edu Sun Jul 13 10:27:44 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sun, 13 Jul 2008 10:27:44 -0700 Subject: Problem tylanbpsg SNF 2008-07-13 10:27:43: Won't pump below 300mT Message-ID: tried three times. Thanks. From seymour at snf.stanford.edu Mon Jul 14 11:05:31 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:05:31 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-14 11:05:30: tube base pressure high at 330 mT Message-ID: From king at snf.stanford.edu Mon Jul 14 13:21:30 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 14 Jul 2008 13:21:30 -0700 Subject: Comment tylanbpsg SNF 2008-07-14 13:21:29: Uptime request Message-ID: Do you know what the problem is? If it needs a new pump will it be swapped in today? This system is booked solidly and we hope this is a priority- overtime, whatever it takes. Thanks from the lab users. From tberg at snf.stanford.edu Mon Jul 14 15:13:13 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Jul 2008 15:13:13 -0700 Subject: Comment tylanbpsg SNF 2008-07-14 15:13:13: Pump changed still a small leak Message-ID: From tberg at snf.stanford.edu Tue Jul 15 07:07:29 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 07:07:29 -0700 Subject: Comment tylanbpsg SNF 2008-07-15 07:07:29: Tube changed Message-ID: Mike was kind enough to change thye tube. Base pressure and leak rate good. Heating up for coat and then will need a test From tberg at snf.stanford.edu Tue Jul 15 07:07:56 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 07:07:56 -0700 Subject: Problem tylanbpsg SNF 2008-07-13 10:27:43: Won't pump below 300mT Message-ID: Pum and tube changed From tberg at snf.stanford.edu Tue Jul 15 07:08:46 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 07:08:46 -0700 Subject: Comment tylanbpsg SNF 2008-07-14 15:13:13: Pump changed still a small leak Message-ID: Tube changed , base and leak rate good. heating up for coat and test From tberg at snf.stanford.edu Tue Jul 15 07:08:59 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 07:08:59 -0700 Subject: Comment tylanbpsg SNF 2008-07-14 13:21:29: Uptime request Message-ID: noted From tberg at snf.stanford.edu Tue Jul 15 08:34:51 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 08:34:51 -0700 Subject: Comment tylanbpsg SNF 2008-07-15 08:34:50: Started Coat Message-ID: Tube at Temp started coat From tberg at snf.stanford.edu Tue Jul 15 10:49:02 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 10:49:02 -0700 Subject: Comment tylanbpsg SNF 2008-07-15 07:07:29: Tube changed Message-ID: Coat completed From tberg at snf.stanford.edu Tue Jul 15 10:49:53 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 10:49:53 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-14 11:05:30: tube base pressure high at 330 mT Message-ID: tube and pum changed base an leak rate good. coat completed From tberg at snf.stanford.edu Tue Jul 15 10:50:13 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 10:50:13 -0700 Subject: Comment tylanbpsg SNF 2008-07-15 08:34:50: Started Coat Message-ID: tube and pump changed base an leak rate good. coat completed From tberg at snf.stanford.edu Tue Jul 15 10:51:09 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Jul 2008 10:51:09 -0700 Subject: Comment tylanbpsg SNF 2008-07-15 10:51:04: No test Yet Be advised Message-ID: Coat OK no test yet Run at your own risk From king at snf.stanford.edu Thu Jul 17 22:37:47 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 17 Jul 2008 22:37:47 -0700 Subject: Comment tylanbpsg SNF 2008-07-17 22:37:46: Annoyance factor Message-ID: Can we please stop with the annoying scrolling on the Tycom? Load a recipe and the thing is scrolling. Come back and the stupid thing is scrolling. What exactly are we and have we gotten out of this that's worth interrupting us, the lab users, at every turn? The lab is supposed to be convenient for lab users, not the support personnel. From seymour at snf.stanford.edu Fri Jul 18 07:50:38 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 Jul 2008 07:50:38 -0700 Subject: Problem tylanbpsg SNF 2008-07-10 15:02:26: Door not closing completely Message-ID: Mike adjusted door on Tuesday From maurice at stanford.edu Fri Jul 18 09:42:26 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 18 Jul 2008 09:42:26 -0700 Subject: Comment tylanbpsg SNF 2008-07-17 22:37:46: Annoyance factor In-Reply-To: <20080718053747.2FDE660F00D@smtp3.stanford.edu> References: <20080718053747.2FDE660F00D@smtp3.stanford.edu> Message-ID: <4880C7F2.4040303@stanford.edu> Hi Robin, When the Tylan is scrolling it is recording the status of each tube to a data base. It is set to to do this recording every five minutes and takes about sixty seconds to record all twelve tubes. This data has helped us on several occasion diagnose problems on the tubes (is a MFC turning on, is the gas flow setting to setpoint, are the tempuratures correct in all zones,...). Since the tubes run 24 hours a day and we need to fix problems that we seldom witness, this tool can help us get furnaces back to lab users sometimes a little quicker. I have to admit that I have gotten frustrated more than a few times waiting the minute that it takes to dump the data (I live in the microwave oven world and want everything now...15 seconds to warm up food is too long). I also think that Ray Seymour gets interrupted by the scrolling more than any user. He is monitoring or working on several tubes everyday. I must respectfully disagree with you on one point. The lab should be convenient for all of us. There are compromises made for all sides. But this scrolling was done to increase uptime and make things more convenient for the everyone. -m king at snf.stanford.edu wrote: > Can we please stop with the annoying scrolling on the Tycom? Load a recipe and the thing is scrolling. Come back and the stupid thing is scrolling. > What exactly are we and have we gotten out of this that's worth interrupting us, the lab users, at every turn? The lab is supposed to be convenient for lab users, not the support personnel. > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at snf.stanford.edu Fri Jul 18 13:54:23 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jul 2008 13:54:23 -0700 Subject: Comment tylanbpsg SNF 2008-07-15 10:51:04: No test Yet Be advised Message-ID: Test by Robin K. Looks ok. Thanks Robin From tberg at snf.stanford.edu Mon Jul 21 06:14:14 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Jul 2008 06:14:14 -0700 Subject: Shutdown tylanbpsg SNF 2008-07-21 06:14:14: LTO upgrade Message-ID: From tberg at snf.stanford.edu Mon Jul 21 07:19:16 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 Jul 2008 07:19:16 -0700 Subject: Comment tylanbpsg SNF 2008-07-21 07:19:15: Checked Pre mod flows purging gases Message-ID: From tberg at snf.stanford.edu Tue Jul 22 06:03:13 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Jul 2008 06:03:13 -0700 Subject: Comment tylanbpsg SNF 2008-07-17 22:37:46: Annoyance factor Message-ID: noted From tberg at snf.stanford.edu Tue Jul 22 06:03:54 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Jul 2008 06:03:54 -0700 Subject: Comment tylanbpsg SNF 2008-07-22 06:03:54: New gas panel installed Message-ID: New gas panel installed, working on wiring From tberg at snf.stanford.edu Wed Jul 23 12:50:14 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 23 Jul 2008 12:50:14 -0700 Subject: Comment tylanbpsg SNF 2008-07-23 12:50:13: Hardware installed Message-ID: Gas panel and electronics have been replaced. Performing functional checks and post install readings. Running LTO400 run with N2 in all streams From tberg at snf.stanford.edu Thu Jul 24 07:23:30 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Jul 2008 07:23:30 -0700 Subject: Comment tylanbpsg SNF 2008-07-24 07:23:28: Performed flow checks withcalibrated MFC Message-ID: From tberg at snf.stanford.edu Thu Jul 24 12:04:45 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Jul 2008 12:04:45 -0700 Subject: Comment tylanbpsg SNF 2008-07-24 12:04:44: He Leak Check Message-ID: He leak checked Jungle to mfgrs spec 8x 10e-9 From tberg at snf.stanford.edu Wed Jul 30 11:25:36 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:25:36 -0700 Subject: Comment tylanbpsg SNF 2008-07-30 11:25:36: hardware completed Message-ID: hardware completed process and Jim M testing From maurice at snf.stanford.edu Thu Jul 31 18:30:02 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 Jul 2008 18:30:02 -0700 Subject: Comment tylanbpsg SNF 2008-07-31 18:30:01: 7/31/08 update Message-ID: Jim M testing complete tube coated process test started From jrjain at snf.stanford.edu Thu Jul 31 19:20:15 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 31 Jul 2008 19:20:15 -0700 Subject: Problem tylanbpsg SNF 2008-07-31 19:20:14: Door fails to seal Message-ID: Door interlock light is off. Have to push door closed to engage.