From tberg at snf.stanford.edu Tue Mar 4 05:56:48 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 4 Mar 2008 05:56:48 -0800 Subject: Shutdown tylanbpsg SNF 2008-03-04 05:56:46: Pull and Clean Message-ID: From tberg at snf.stanford.edu Tue Mar 4 07:30:29 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 4 Mar 2008 07:30:29 -0800 Subject: Comment tylanbpsg SNF 2008-02-27 10:42:10: vacuum wand problem Message-ID: replaced From tberg at snf.stanford.edu Tue Mar 4 07:30:54 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 4 Mar 2008 07:30:54 -0800 Subject: Comment tylanbpsg SNF 2008-02-27 11:43:47: metal vacuum wand replaced Message-ID: noted From mtang at snf.stanford.edu Fri Mar 7 09:12:13 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 7 Mar 2008 09:12:13 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 09:12:13: Leak in tube Message-ID: Flawed tube -- it will be pulled again and replaced. Should have another one Tuesday. From mtang at snf.stanford.edu Fri Mar 7 09:35:03 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 7 Mar 2008 09:35:03 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 09:12:13: Leak in tube Message-ID: Update. Ray found leak in the bellows, not the tube. ETA is now this afternoon. From seymour at snf.stanford.edu Fri Mar 7 11:46:48 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Mar 2008 11:46:48 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 11:46:47: tube being coated Message-ID: The leak was found and the tube heated and is now being coated. It will need a test after this. From seymour at snf.stanford.edu Fri Mar 7 13:00:46 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Mar 2008 13:00:46 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 13:00:45: running another test Message-ID: From seymour at snf.stanford.edu Fri Mar 7 13:01:12 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Mar 2008 13:01:12 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 13:00:45: running another test Message-ID: wrong tube for this comment. From maurice at snf.stanford.edu Fri Mar 7 14:16:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Mar 2008 14:16:05 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 14:16:04: Running test Message-ID: Running LTO400 test From maurice at snf.stanford.edu Fri Mar 7 16:27:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Mar 2008 16:27:47 -0800 Subject: Shutdown tylanbpsg SNF 2008-03-04 05:56:46: Pull and Clean Message-ID: Pulled, cleaned, fixed leak in bellows, coated and test run. LTO400 00:20:00 expected ~4000 actual 4064(center metal boat) From maurice at snf.stanford.edu Fri Mar 7 16:28:01 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Mar 2008 16:28:01 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 11:46:47: tube being coated Message-ID: coat complete From maurice at snf.stanford.edu Fri Mar 7 16:28:24 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Mar 2008 16:28:24 -0800 Subject: Comment tylanbpsg SNF 2008-03-07 14:16:04: Running test Message-ID: LTO400 00:20:00 expected ~4000 actual 4064(center metal boat) From maurice at snf.stanford.edu Fri Mar 7 16:29:38 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Mar 2008 16:29:38 -0800 Subject: Problem tylanbpsg SNF 2008-03-07 16:29:33: boat not pulling open Message-ID: Had to open manually. Closes ok. From seymour at snf.stanford.edu Mon Mar 10 10:21:02 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 Mar 2008 10:21:02 -0700 Subject: Comment tylanbpsg SNF 2008-03-10 10:21:02: door flag out of adjustment Message-ID: I adjusted the door flag so it would go in past the first sensor. Need to run system in auto to verify loader operating. User has tool reservations in a few mins. From seymour at snf.stanford.edu Tue Mar 11 10:02:24 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 11 Mar 2008 10:02:24 -0700 Subject: Problem tylanbpsg SNF 2008-03-07 16:29:33: boat not pulling open Message-ID: door flag adjusted. system has been used without loader problems since then. From seymour at snf.stanford.edu Tue Mar 11 10:03:10 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 11 Mar 2008 10:03:10 -0700 Subject: Comment tylanbpsg SNF 2008-03-10 10:21:02: door flag out of adjustment Message-ID: system has been used without any loader problems since adjustment made. From mtang at snf.stanford.edu Thu Mar 13 09:29:03 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 13 Mar 2008 09:29:03 -0700 Subject: Problem tylanbpsg SNF 2008-03-13 09:29:02: Pinholes or particles noted Message-ID: Be aware that pinholes are particles have been observed on a couple of runs and confirmed by Maurice. We are shorthanded on maintenance and will be investigating as we can. From mdickey at snf.stanford.edu Mon Mar 17 05:39:27 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Mar 2008 05:39:27 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-17 05:39:27: Tube pull Message-ID: Down for pull and clean From robinhmb at yahoo.com Mon Mar 17 11:00:36 2008 From: robinhmb at yahoo.com (Robin King) Date: Mon, 17 Mar 2008 11:00:36 -0700 (PDT) Subject: Shutdown tylanbpsg SNF 2008-03-17 05:39:27: Tube pull In-Reply-To: <20080317123927.B3810272C23@smtp1.stanford.edu> Message-ID: <726195.44745.qm@web58703.mail.re1.yahoo.com> Thanks Mike. I had tried it one last time on Friday after coating the system and cleaned dummies, and it still had defects. --- mdickey at snf.stanford.edu wrote: > Down for pull and clean > > ____________________________________________________________________________________ Looking for last minute shopping deals? Find them fast with Yahoo! Search. http://tools.search.yahoo.com/newsearch/category.php?category=shopping From mdickey at snf.stanford.edu Mon Mar 17 12:48:42 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Mar 2008 12:48:42 -0700 Subject: Comment tylanbpsg SNF 2008-03-17 12:48:37: Coating Message-ID: Cleaned entire system, currently in coat. Will need test when done From maurice at snf.stanford.edu Mon Mar 17 17:02:22 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Mar 2008 17:02:22 -0700 Subject: Comment tylanbpsg SNF 2008-03-17 12:48:37: Coating Message-ID: Coat and test complete. LTO400 00:20:00 expected 4000 actual 4269Ang Dark field looks good. No particles From maurice at snf.stanford.edu Mon Mar 17 17:03:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Mar 2008 17:03:34 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-17 05:39:27: Tube pull Message-ID: Tube pulled, cleaned, coated and tested. Exhaust line to pump cleaned and inspected. LTO400 00:20:00 expected 4000 actual 4269Ang Dark field looks good. No particles From maurice at snf.stanford.edu Mon Mar 17 17:04:40 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Mar 2008 17:04:40 -0700 Subject: Problem tylanbpsg SNF 2008-03-13 09:29:02: Pinholes or particles noted Message-ID: System pulled and cleaned back to pump. Coat and test complete. LTO400 00:20:00 expected 4000 actual 4269Ang Dark field looks good. No particles From king at snf.stanford.edu Tue Mar 18 21:19:58 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 18 Mar 2008 21:19:58 -0700 Subject: Problem tylanbpsg SNF 2008-03-18 21:19:58: oxide defects again Message-ID: Sorry to report that the defects are back, though not as bad as before. They show up under DF and also BF if you look closely . From king at snf.stanford.edu Wed Mar 19 01:43:38 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 19 Mar 2008 01:43:38 -0700 Subject: Comment tylanbpsg SNF 2008-03-19 01:43:38: Defects Message-ID: SEM shows these are particles about 2000A wide; unknown height. They aren't holes. From seymour at snf.stanford.edu Wed Mar 19 10:59:24 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 Mar 2008 10:59:24 -0700 Subject: Comment tylanbpsg SNF 2008-03-19 10:59:24: checking source for particles Message-ID: I replaced slo pump valve. looked at injector line. pumped system down and checked leak rate and it was good. I didn't have a chance to do a complete gas line pump and rate of rise. Returning system to users with the understanding I havent found the source of particles. From seymour at snf.stanford.edu Thu Mar 20 09:50:51 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Mar 2008 09:50:51 -0700 Subject: Comment tylanbpsg SNF 2008-03-20 09:50:51: further results of particle checking Message-ID: I pumped out the silane and O2 lines and checked base pressure which was the same as when I checked it without the silane and mfc's having been pumped out. I do not believe there is a leak in the silane system between the shutoff valve and the tube. I also checked the pump pressure at the start of a pump cycle and watch it drop to 100 microns at which time the slow pump valve closed and the main vac valve opened. Thus the slow pump valve does function as it is supposed to. I am waiting for further comments and condition of particle in the layer. From maurice at snf.stanford.edu Thu Mar 20 10:30:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Mar 2008 10:30:27 -0700 Subject: Comment tylanbpsg SNF 2008-03-20 10:30:26: running a test Message-ID: Checking for particles after soft pump was inspected From maurice at snf.stanford.edu Thu Mar 20 12:00:36 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Mar 2008 12:00:36 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-20 12:00:35: No O2 in dep step Message-ID: MFS alarm....O2 interlock From seymour at snf.stanford.edu Thu Mar 20 13:14:56 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Mar 2008 13:14:56 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-20 12:00:35: No O2 in dep step Message-ID: O2 was off turned on supply valve and restarted run From maurice at snf.stanford.edu Thu Mar 20 15:12:25 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Mar 2008 15:12:25 -0700 Subject: Comment tylanbpsg SNF 2008-03-20 10:30:26: running a test Message-ID: Looks bad. Starry night. Much worse than earlier in the week. From maurice at snf.stanford.edu Thu Mar 20 15:13:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Mar 2008 15:13:20 -0700 Subject: Problem tylanbpsg SNF 2008-03-20 15:13:19: Particles are worse Message-ID: Looks bad. Starry night. Much worse than earlier in the week. From mtang at snf.stanford.edu Fri Mar 21 09:30:10 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Mar 2008 09:30:10 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-21 09:30:09: Under evaluation for particle problems Message-ID: From latta at snf.stanford.edu Fri Mar 21 13:41:45 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:41:45 -0700 Subject: Problem tylanbpsg SNF 2008-03-21 13:41:45: Tested slow pump using PUMP11 program Message-ID: No particles found. Run PUMP11 to step 25 to check whether promblem is in pumping down steps. Wafers were cleaned, inspected, run and compared to Robin;s sample wafer. Some handling particles, but nothing like the sample wafer. Next? From latta at snf.stanford.edu Fri Mar 21 13:42:37 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:42:37 -0700 Subject: Problem tylanbpsg SNF 2008-03-18 21:19:58: oxide defects again Message-ID: yep, they are From latta at snf.stanford.edu Fri Mar 21 14:11:36 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 14:11:36 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-21 09:30:09: Under evaluation for particle problems Message-ID: Putting system in yellow for weekend. Particle problem has not been solved, but it may not matter to some users. Will send out message to tylanbpsg at snf From mtang at snf.stanford.edu Mon Mar 24 09:14:52 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Mar 2008 09:14:52 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-24 09:14:52: Troubleshooting for particle problem Message-ID: From seymour at snf.stanford.edu Mon Mar 24 09:55:44 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Mar 2008 09:55:44 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-24 09:14:52: Troubleshooting for particle problem Message-ID: removing shutdown to allow use as per Nancy's message on Friday. I pulled the silane flexline and cleaned it then reassembled and check leak rate. It is good. Needs test to monitor particle conditions. From maurice at snf.stanford.edu Mon Mar 24 12:12:01 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Mar 2008 12:12:01 -0700 Subject: Comment tylanbpsg SNF 2008-03-24 12:12:01: Test bad after flex lines cleaned Message-ID: Test after flex lines cleaned still looks bad. Starry night particles. From iwjung at snf.stanford.edu Tue Mar 25 11:36:04 2008 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Tue, 25 Mar 2008 11:36:04 -0700 Subject: Comment tylanbpsg SNF 2008-03-25 11:36:03: MFS alarm Message-ID: MFS alarm 10:30am or earlier From seymour at snf.stanford.edu Tue Mar 25 11:57:17 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Mar 2008 11:57:17 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-25 11:57:16: replacing silane injector Message-ID: From seymour at snf.stanford.edu Tue Mar 25 15:34:50 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:34:50 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-25 11:57:16: replacing silane injector Message-ID: replaced both injectors and flex lines checiked rate of rise and it was 7 mT/min. Running LTO400 for a coat after quartz change. From seymour at snf.stanford.edu Tue Mar 25 15:35:22 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:35:22 -0700 Subject: Comment tylanbpsg SNF 2008-03-25 15:35:21: needs a test after LTO400 coat is finished. Message-ID: From maurice at snf.stanford.edu Wed Mar 26 10:12:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Mar 2008 10:12:05 -0700 Subject: Comment tylanbpsg SNF 2008-03-26 10:12:05: Running at test Message-ID: Running at test after both injectors and flex lines replaced and system coated. From maurice at snf.stanford.edu Wed Mar 26 13:47:57 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:47:57 -0700 Subject: Comment tylanbpsg SNF 2008-03-26 13:47:57: still particles Message-ID: Still seeing particles after both injectors and flex lines replaced and system coated. Doesn't look any better. From maurice at snf.stanford.edu Thu Mar 27 09:39:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Mar 2008 09:39:42 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-27 09:39:41: Inspecting silane line Message-ID: From seymour at snf.stanford.edu Thu Mar 27 15:54:51 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 27 Mar 2008 15:54:51 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-27 09:39:41: Inspecting silane line Message-ID: I checked out the silane input to the monoblock and cleaned the lines. I also put a blank VCR gasket in the line to the external soleniod that was used years ago to poly coat the rails. I checked base pressure with and without the silane valve open and the mfc turned full on, no difference in base pressure. Did a rate of rise and it was 7 mT per min. I left the silane line charged with N2 and Maurice will run a test without silane to look at particles generated from the lines. From seymour at snf.stanford.edu Thu Mar 27 15:55:39 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 27 Mar 2008 15:55:39 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-27 15:55:39: needs a test Message-ID: to further trouble shoot the particle problem. From maurice at snf.stanford.edu Fri Mar 28 09:25:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Mar 2008 09:25:26 -0700 Subject: Comment tylanbpsg SNF 2008-03-28 09:25:26: particle test Message-ID: a test without silane to look at particles generated from the lines. From maurice at snf.stanford.edu Fri Mar 28 11:25:02 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Mar 2008 11:25:02 -0700 Subject: Comment tylanbpsg SNF 2008-03-28 11:25:01: Message-ID: From maurice at snf.stanford.edu Fri Mar 28 11:26:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Mar 2008 11:26:21 -0700 Subject: Comment tylanbpsg SNF 2008-03-28 09:25:26: particle test Message-ID: The LTO test with N2 in the Siline lines came out particle free. From seymour at snf.stanford.edu Fri Mar 28 11:38:33 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 28 Mar 2008 11:38:33 -0700 Subject: Comment tylanbpsg SNF 2008-03-28 11:38:33: Silane back on Message-ID: I removed the N2 in the silane line and turned on the silane. Now another test is required to evaluate the particle condition. From maurice at snf.stanford.edu Fri Mar 28 14:10:10 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Mar 2008 14:10:10 -0700 Subject: Comment tylanbpsg SNF 2008-03-28 11:38:33: Silane back on Message-ID: Particles are still there. No improvement. From maurice at snf.stanford.edu Fri Mar 28 15:06:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Mar 2008 15:06:34 -0700 Subject: Shutdown tylanbpsg SNF 2008-03-27 15:55:39: needs a test Message-ID: System still has particles. It is being yellow lighted for the weekend for users who can still use it. We will continue investigating the particle issue on Monday From maurice at snf.stanford.edu Fri Mar 28 15:07:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Mar 2008 15:07:19 -0700 Subject: Problem tylanbpsg SNF 2008-03-28 15:07:16: Particles Message-ID: System still has particles. It is being yellow lighted for the weekend for users who can still use it. We will continue investigating the particle issue on Monday.