From maurice at snf.stanford.edu Mon Oct 6 15:06:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Oct 2008 15:06:20 -0700 Subject: Problem tylanbpsg SNF 2008-10-06 15:06:19: new style non metal boat broken Message-ID: side broke From maurice at snf.stanford.edu Mon Oct 6 15:21:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Oct 2008 15:21:11 -0700 Subject: Comment tylanbpsg SNF 2008-10-06 15:21:11: switched boat 1 and boat 2 Message-ID: The side bar on the bottom half of boat2 (non metal boat, new slant slot style) broke. - From rostam at snf.stanford.edu Sun Oct 12 05:38:37 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 12 Oct 2008 05:38:37 -0700 Subject: Problem tylanbpsg SNF 2008-10-12 05:38:36: base pressure too high Message-ID: the base pressure was 174 instead of 4 and the tube went right to 'slow back fill and abort step'. No deposition From masaharu at snf.stanford.edu Sun Oct 12 18:55:53 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 12 Oct 2008 18:55:53 -0700 Subject: Shutdown tylanbpsg SNF 2008-10-12 18:55:53: Too high base pressure Message-ID: As Rostam reported, base pressure was too high. I tried a few run, with no success. From seymour at snf.stanford.edu Mon Oct 13 09:11:38 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Oct 2008 09:11:38 -0700 Subject: Comment tylanbpsg SNF 2008-10-13 09:11:37: pump base pressure 598 mToor Message-ID: From seymour at snf.stanford.edu Mon Oct 13 10:49:35 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Oct 2008 10:49:35 -0700 Subject: Comment tylanbpsg SNF 2008-10-13 10:49:34: starting pump replacement Message-ID: From seymour at snf.stanford.edu Mon Oct 13 11:08:34 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Oct 2008 11:08:34 -0700 Subject: Comment tylanbpsg SNF 2008-10-13 11:08:33: pump alone base was 88mT and dropping Message-ID: The tube leak rate is good, the pump checked ok but when it is connected to tube the base is 500 plus. I will look for the spare baratron and further check system. From seymour at snf.stanford.edu Mon Oct 13 15:29:56 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Oct 2008 15:29:56 -0700 Subject: Shutdown tylanbpsg SNF 2008-10-12 18:55:53: Too high base pressure Message-ID: base pressure 6 mTorr leak rate 5 mTorr per min found leak at top of pump. From seymour at snf.stanford.edu Mon Oct 13 15:31:54 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Oct 2008 15:31:54 -0700 Subject: Comment tylanbpsg SNF 2008-10-13 10:49:34: starting pump replacement Message-ID: pump nol bad. I changed oil and found leak at top opf the pump base was 6 mt and leak rate was 5 mt on the tube. From seymour at snf.stanford.edu Tue Oct 14 08:29:42 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Oct 2008 08:29:42 -0700 Subject: Comment tylanbpsg SNF 2008-10-13 09:11:37: pump base pressure 598 mToor Message-ID: base pressure good now From seymour at snf.stanford.edu Tue Oct 14 08:30:45 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Oct 2008 08:30:45 -0700 Subject: Comment tylanbpsg SNF 2008-10-13 11:08:33: pump alone base was 88mT and dropping Message-ID: base and leak rate good From seymour at snf.stanford.edu Tue Oct 14 08:31:11 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Oct 2008 08:31:11 -0700 Subject: Problem tylanbpsg SNF 2008-10-12 05:38:36: base pressure too high Message-ID: found and removed leak base and leak rate good From skoh at snf.stanford.edu Wed Oct 15 09:15:02 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 15 Oct 2008 09:15:02 -0700 Subject: Problem tylanbpsg SNF 2008-10-15 09:15:01: non metal vacuum wand not working Message-ID: From seymour at snf.stanford.edu Wed Oct 15 09:41:27 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 15 Oct 2008 09:41:27 -0700 Subject: Problem tylanbpsg SNF 2008-10-15 09:15:01: non metal vacuum wand not working Message-ID: Replaced loose tip and missing teflon ferrule. From maurice at snf.stanford.edu Fri Oct 17 09:15:15 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Oct 2008 09:15:15 -0700 Subject: Comment tylanbpsg SNF 2008-10-06 15:21:11: switched boat 1 and boat 2 Message-ID: non metal replaced with a stanted boat From maurice at snf.stanford.edu Fri Oct 17 09:15:37 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Oct 2008 09:15:37 -0700 Subject: Problem tylanbpsg SNF 2008-10-06 15:06:19: new style non metal boat broken Message-ID: archived From king at snf.stanford.edu Fri Oct 17 15:04:41 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 17 Oct 2008 15:04:41 -0700 Subject: Problem tylanbpsg SNF 2008-10-17 15:04:40: boat loader is making noise Message-ID: The pully on the far right side is having trouble. From kuanlinc at snf.stanford.edu Fri Oct 17 17:21:37 2008 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Fri, 17 Oct 2008 17:21:37 -0700 Subject: Problem tylanbpsg SNF 2008-10-17 17:21:36: powder-like stuff on dummy wafers Message-ID: almost all the dummies in nonmetal boat have powder-like stuff on the surface. Just replace all the wafers. From seymour at snf.stanford.edu Mon Oct 20 09:50:10 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 20 Oct 2008 09:50:10 -0700 Subject: Problem tylanbpsg SNF 2008-10-17 15:04:40: boat loader is making noise Message-ID: checked loader operation, tightened loader pulley checked operation. Tube was ran with no more comments on loader over the weekend. From maurice at snf.stanford.edu Mon Oct 20 09:52:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 20 Oct 2008 09:52:21 -0700 Subject: Problem tylanbpsg SNF 2008-10-17 17:21:36: powder-like stuff on dummy wafers Message-ID: Dummies in firs and last boat do have alot of deposition. They will be pulled at tube pull. The deposition on the two center boat will come off at the 3um dummy etch. Kuan Lin needs to come in and strip the dummies From ykuo at snf.stanford.edu Tue Oct 21 06:22:35 2008 From: ykuo at snf.stanford.edu (ykuo at snf.stanford.edu) Date: Tue, 21 Oct 2008 06:22:35 -0700 Subject: Problem tylanbpsg SNF 2008-10-21 06:22:34: MFS error during Pump11 Message-ID: Finish process (LTO400) but keep getting MFS error while trying to run Pump11. From tberg at snf.stanford.edu Tue Oct 21 06:39:12 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 21 Oct 2008 06:39:12 -0700 Subject: Shutdown tylanbpsg SNF 2008-10-21 06:39:12: Cantilever sheath broken Message-ID: From tberg at snf.stanford.edu Tue Oct 21 08:15:07 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 21 Oct 2008 08:15:07 -0700 Subject: Comment tylanbpsg SNF 2008-10-21 08:15:07: TUBE Pull and clean Message-ID: Cantiliever sheath and injectors broken doing tube pull From seymour at snf.stanford.edu Wed Oct 22 08:55:26 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 22 Oct 2008 08:55:26 -0700 Subject: Comment tylanbpsg SNF 2008-10-22 08:55:25: cold leak check passed Message-ID: pull and clean complete. base pressure 11 mT leak rate less then 2mT/min. Heating up for hot leak check and coat. From seymour at snf.stanford.edu Wed Oct 22 10:31:12 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 22 Oct 2008 10:31:12 -0700 Subject: Comment tylanbpsg SNF 2008-10-22 10:31:12: running LTO400 for a coat Message-ID: From maurice at snf.stanford.edu Wed Oct 22 14:12:38 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Oct 2008 14:12:38 -0700 Subject: Comment tylanbpsg SNF 2008-10-22 14:12:38: testing after pull/clean Message-ID: From maurice at snf.stanford.edu Wed Oct 22 16:06:45 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Oct 2008 16:06:45 -0700 Subject: Shutdown tylanbpsg SNF 2008-10-21 06:39:12: Cantilever sheath broken Message-ID: pulled/cleaned From tberg at snf.stanford.edu Thu Oct 23 08:14:39 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Oct 2008 08:14:39 -0700 Subject: Comment tylanbpsg SNF 2008-10-21 08:15:07: TUBE Pull and clean Message-ID: Completed From tberg at snf.stanford.edu Thu Oct 23 08:14:51 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Oct 2008 08:14:51 -0700 Subject: Comment tylanbpsg SNF 2008-10-22 08:55:25: cold leak check passed Message-ID: noted From tberg at snf.stanford.edu Thu Oct 23 08:15:01 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 23 Oct 2008 08:15:01 -0700 Subject: Comment tylanbpsg SNF 2008-10-22 10:31:12: running LTO400 for a coat Message-ID: Noted From sbasumal at snf.stanford.edu Mon Oct 27 00:48:00 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Mon, 27 Oct 2008 00:48:00 -0700 Subject: Problem tylanbpsg SNF 2008-10-27 00:47:59: Tube does not vent... Message-ID: ..tried venting a couple of times From tberg at snf.stanford.edu Mon Oct 27 07:10:47 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Oct 2008 07:10:47 -0700 Subject: Problem tylanbpsg SNF 2008-10-27 00:47:59: Tube does not vent... Message-ID: tube vented OK in pump 11 From tberg at snf.stanford.edu Wed Oct 29 06:51:38 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Oct 2008 06:51:38 -0700 Subject: Problem tylanbpsg SNF 2008-10-29 06:51:38: PH3 is down for cylinderchange Message-ID: From tberg at snf.stanford.edu Wed Oct 29 10:09:15 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Oct 2008 10:09:15 -0700 Subject: Problem tylanbpsg SNF 2008-10-29 06:51:38: PH3 is down for cylinderchange Message-ID: Cylinder change completed From tberg at stanford.edu Wed Oct 29 12:12:27 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Oct 2008 12:12:27 -0700 Subject: Unused reservations Message-ID: <4908B59B.7010206@stanford.edu> Hello users, During the past couple of days i have noticed several instances of reservations made and not used or cancelled. This is not fair to other users nor to the staff trying to make plans to keep the tools up and running. Please be considerate when making and or cancelling reservations. I have also noticed several times the tube left in the last recipe and vented not in the pump program perhaps some users need retraining on proper procedures