From lwchang at snf.stanford.edu Mon Sep 1 11:30:22 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Mon, 1 Sep 2008 11:30:22 -0700 Subject: Problem tylanbpsg SNF 2008-09-01 11:30:22: previous user forgot to pump down the tube Message-ID: From maurice at snf.stanford.edu Tue Sep 2 11:36:31 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Sep 2008 11:36:31 -0700 Subject: Problem tylanbpsg SNF 2008-09-02 11:36:30: SiH4 interlock Message-ID: 9 minutes into the LTOVARP2 dep we got an MFS alarm, the SiH4 flow was zero SiH4 intelock I acknowleded it on the 460 and the SiH4 flow went back to setpoint From kuanlinc at snf.stanford.edu Tue Sep 2 18:32:45 2008 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Tue, 2 Sep 2008 18:32:45 -0700 Subject: Problem tylanbpsg SNF 2008-09-02 18:32:44: SiH4 flow varies a lot. Message-ID: In dep step, SiH4 keeps going down and when it hits ~60, MFS alarms. It will go back up to ~80 for the first time and then goes down again. After that, it will only go up to ~70 and then go down. Not sure if it is the SiH4 tank low or not. From shott at snf.stanford.edu Wed Sep 3 22:48:44 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 3 Sep 2008 22:48:44 -0700 Subject: Comment tylanbpsg SNF 2008-09-03 22:48:43: LTO Temperature Calibration .... Message-ID: Based on Henry's information, packing the airflow down the tube, and adjusting the position of the spike TCs, I've been able to calibrate tylanbpsg at 350, 400, 450, and 500. I have not yet tried 300, but believe that it will go better. Here are the SCR percentages followed by settling time at the above temperatures: 350C: L: 12.08% (21 min) C: 6.71% (19 min) S: 11.83% (20 min) 400C: L: 11.89% (30 min) C: 7.81% (22 min) S: 13.07% (33 min) 450C: L: 13.14% (36 min) C: 8.90% (17 min) S: 14.46% (46 min) 500C: L: 14.19% (31 min) C: 11.93% (21 min) S: 15.30% (32 min) Note: at 300 we are currently using Henry's defaults of 11.0%, 5.5%, and 12.0% which should be a lot closer than we had previously. When there is a time slot, we should try to get that done, but there are anxious users .... Thanks, John From tberg at snf.stanford.edu Thu Sep 4 09:11:43 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:11:43 -0700 Subject: Problem tylanbpsg SNF 2008-09-02 18:32:44: SiH4 flow varies a lot. Message-ID: Switched SiH4 cylinders to new one flowed for over 2o minutes no problem From tberg at snf.stanford.edu Thu Sep 4 09:12:13 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:12:13 -0700 Subject: Problem tylanbpsg SNF 2008-09-02 11:36:30: SiH4 interlock Message-ID: Switched SiH4 cylinders to new one flowed for over 2o minutes no problem From tberg at snf.stanford.edu Thu Sep 4 09:22:45 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:22:45 -0700 Subject: Problem tylanbpsg SNF 2008-08-28 15:55:55: MFS alarm Message-ID: noted From tberg at snf.stanford.edu Thu Sep 4 09:23:29 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:23:29 -0700 Subject: Comment tylanbpsg SNF 2008-08-27 11:15:31: changed tcu board Message-ID: noted From tberg at snf.stanford.edu Thu Sep 4 09:24:11 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:24:11 -0700 Subject: Problem tylanbpsg SNF 2008-09-01 11:30:22: previous user forgot to pump down the tube Message-ID: noted From tberg at snf.stanford.edu Thu Sep 4 09:25:18 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:25:18 -0700 Subject: Comment tylanbpsg SNF 2008-08-11 16:17:46: Injector direction moved Message-ID: Back to normal From maurice at snf.stanford.edu Thu Sep 4 09:39:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:39:11 -0700 Subject: Problem tylanbpsg SNF 2008-08-30 20:25:17: Extremely slow dep rate Message-ID: from Ted: Switched SiH4 cylinders to new one flowed for over 20 minutes no problem From maurice at snf.stanford.edu Thu Sep 4 09:39:47 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:39:47 -0700 Subject: Problem tylanbpsg SNF 2008-08-25 00:16:43: MFW error Message-ID: >From Ted: Switched SiH4 cylinders to new one flowed for over 2o minutes no problem From maurice at snf.stanford.edu Thu Sep 4 09:40:45 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:40:45 -0700 Subject: Problem tylanbpsg SNF 2008-08-21 19:05:08: STH IS WRONG WITH THE DIGISTAL BOARD Message-ID: Tapped display...It brightened up From maurice at snf.stanford.edu Thu Sep 4 09:41:18 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:41:18 -0700 Subject: Problem tylanbpsg SNF 2008-08-21 00:39:35: pump problems Message-ID: No other reports of pump problems From maurice at snf.stanford.edu Thu Sep 4 09:42:04 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:42:04 -0700 Subject: Problem tylanbpsg SNF 2008-08-13 19:14:12: Temperature Problem Message-ID: From maurice at snf.stanford.edu Thu Sep 4 11:50:07 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Sep 2008 11:50:07 -0700 Subject: Comment tylanbpsg SNF 2008-09-04 11:50:07: LTO300 program modified Message-ID: "CTLID=1" tags taken out of ever step From maurice at snf.stanford.edu Thu Sep 4 16:53:26 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Sep 2008 16:53:26 -0700 Subject: Comment tylanbpsg SNF 2008-09-04 16:53:26: temp profile 300/400 Message-ID: inches/temp/temp 0/303.8/402.2 2/303.2/402.1 4/302.6/402.3 6/302.2/402.7 8/302.2/403.0 10/302.3/403.4 12/302.2/403.3 14/302.0/403.0 16/301.8/402.8 18/301.9/402.9 20/302.1/402.9 22/302.0/402.6 24/301.8/402.7 26/301.5/402.8 28/300.9/402.5 30/299.1/400.6 32/294.6/397.2 34/284.3/385.7 From kuanlinc at snf.stanford.edu Thu Sep 4 21:41:23 2008 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Thu, 4 Sep 2008 21:41:23 -0700 Subject: Comment tylanbpsg SNF 2008-09-04 21:41:22: No MFS alarm anymore! Message-ID: Great job on changing the SiH4 tank! Stable flow for 3 hrs. From king at snf.stanford.edu Sun Sep 7 02:26:09 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sun, 7 Sep 2008 02:26:09 -0700 Subject: Comment tylanbpsg SNF 2008-09-07 02:26:08: Excellent uniformity Message-ID: Ran two runs with both boats filled and the uniformity was outstanding. LTO400, 5 min test dep: Metal boat avg = 706.6A. Nonmetal boat 711avg. Dep for 00:07:05 gave 950A and 959A. Will post more complete data later to lelandstanfordjunior.com. Thank you for the good work on this tube. From maurice at snf.stanford.edu Mon Sep 8 10:31:15 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:31:15 -0700 Subject: Comment tylanbpsg SNF 2008-09-04 21:41:22: No MFS alarm anymore! Message-ID: thanks for the info From maurice at snf.stanford.edu Mon Sep 8 10:32:00 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:32:00 -0700 Subject: Problem tylanbpsg SNF 2008-08-09 10:00:25: Temperature Problem Message-ID: furnace cal'ed From maurice at snf.stanford.edu Mon Sep 8 10:32:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:32:17 -0700 Subject: Problem tylanbpsg SNF 2008-08-25 18:16:03: Temp gradient long tube Message-ID: furnace cal'ed From maurice at snf.stanford.edu Mon Sep 8 10:32:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:32:34 -0700 Subject: Comment tylanbpsg SNF 2008-08-08 15:01:01: LTO400 program modified Message-ID: logged From maurice at snf.stanford.edu Mon Sep 8 10:32:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:32:42 -0700 Subject: Comment tylanbpsg SNF 2008-08-08 15:05:18: LTO300 recipe modified Message-ID: logged From maurice at snf.stanford.edu Mon Sep 8 10:32:58 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:32:58 -0700 Subject: Comment tylanbpsg SNF 2008-08-19 06:47:49: Started temp cal at 250 c Message-ID: logged From maurice at snf.stanford.edu Mon Sep 8 10:33:11 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:33:11 -0700 Subject: Comment tylanbpsg SNF 2008-08-20 11:08:58: 8/20/08 Shott temp measurements Message-ID: logged From maurice at snf.stanford.edu Mon Sep 8 10:33:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:33:27 -0700 Subject: Comment tylanbpsg SNF 2008-08-28 12:29:27: LTO temp profile 8/28/08 Message-ID: logged From maurice at snf.stanford.edu Mon Sep 8 10:33:55 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 10:33:55 -0700 Subject: Comment tylanbpsg SNF 2008-09-03 22:48:43: LTO Temperature Calibration .... Message-ID: logged From maurice at snf.stanford.edu Mon Sep 8 11:52:05 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 11:52:05 -0700 Subject: Comment tylanbpsg SNF 2008-09-08 11:52:04: 3 degree tilt non metal boat Message-ID: The non metal boat has been replaced with a new boat that has a 3 degree wafer slot tilt. This will keep the wafers from moving so the will all be evenly spaced apart. Better uniformity. Reminder: there are currently 4 boats in the tube...non metal is the the second boat from the door. From maurice at snf.stanford.edu Wed Sep 10 15:08:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Sep 2008 15:08:03 -0700 Subject: Comment tylanbpsg SNF 2008-09-10 15:08:02: 3 degree slot tilt metal boat Message-ID: 3 degree slot tilt metal boat replaces metal boat From maurice at snf.stanford.edu Thu Sep 11 16:49:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Sep 2008 16:49:34 -0700 Subject: Comment tylanbpsg SNF 2008-09-11 16:49:33: lto450 modified Message-ID: All TCU ID tags removed from LTO450 From maurice at snf.stanford.edu Thu Sep 11 17:07:29 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Sep 2008 17:07:29 -0700 Subject: Comment tylanbpsg SNF 2008-09-11 17:07:28: LTO450P modified Message-ID: All TCU ID tags removed from LTO450 From news at discount-educational-software.net Thu Sep 11 21:59:55 2008 From: news at discount-educational-software.net (Education Software News) Date: Fri, 12 Sep 2008 00:59:55 -0400 Subject: Education Software News - September 2008 Message-ID: <0d6b02c39eddce47f64133487af08c@bmw> Back-to-School promotional price for Microsoft Office 2007 Professional available while supplies last! 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From tberg at snf.stanford.edu Tue Sep 16 06:13:56 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Sep 2008 06:13:56 -0700 Subject: Shutdown tylanbpsg SNF 2008-09-16 06:13:55: Pull And Clean Message-ID: Scheduled Pull and clean From tberg at snf.stanford.edu Tue Sep 16 10:32:24 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Sep 2008 10:32:24 -0700 Subject: Comment tylanbpsg SNF 2008-09-16 10:32:23: Tube is changed, Leak checked Message-ID: Tube is heating up for coat From maurice at snf.stanford.edu Tue Sep 16 11:17:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Sep 2008 11:17:21 -0700 Subject: Comment tylanbpsg SNF 2008-09-16 11:17:21: running coat Message-ID: From maurice at snf.stanford.edu Tue Sep 16 15:37:01 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Sep 2008 15:37:01 -0700 Subject: Comment tylanbpsg SNF 2008-09-16 11:17:21: running coat Message-ID: coat complete...running test From maurice at snf.stanford.edu Tue Sep 16 15:37:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Sep 2008 15:37:28 -0700 Subject: Comment tylanbpsg SNF 2008-09-16 10:32:23: Tube is changed, Leak checked Message-ID: tube heated, coat complete From maurice at snf.stanford.edu Tue Sep 16 15:38:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Sep 2008 15:38:17 -0700 Subject: Shutdown tylanbpsg SNF 2008-09-16 06:13:55: Pull And Clean Message-ID: Pulled, cleaned,coated and tested. From narii at snf.stanford.edu Tue Sep 16 21:37:49 2008 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 16 Sep 2008 21:37:49 -0700 Subject: Problem tylanbpsg SNF 2008-09-16 21:37:49: Boat in problem Message-ID: While running LTO300 recipe, it won't pass boat in step, even after whole boat goes in. The same problem for pump11 recipe because it fails door lock check. From seymour at snf.stanford.edu Wed Sep 17 08:24:14 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Sep 2008 08:24:14 -0700 Subject: Comment tylanbpsg SNF 2008-09-17 08:24:13: door flag not making interlock Message-ID: The tube has moved back about 1/4 inch and the flag is too short to adjust door interlock. cooling down to adjust tube positioning bracket on tube front to allow flag adjustment. From seymour at snf.stanford.edu Wed Sep 17 10:01:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Sep 2008 10:01:57 -0700 Subject: Problem tylanbpsg SNF 2008-09-16 21:37:49: Boat in problem Message-ID: boat in is ok at this time. I swapped the front and rear flag to give me enough adjustment, rear flag was longer then front. I was wrong in my assesment of the problem as the tube and gas ring were in the correct position. I do not know why the flag was too short to make the door interlock as all was fine yesterday. From seymour at snf.stanford.edu Wed Sep 17 10:03:02 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Sep 2008 10:03:02 -0700 Subject: Comment tylanbpsg SNF 2008-09-17 10:03:01: door interlock now being made when loader is in Message-ID: the tube is in pump11 at this time. From rshyam at snf.stanford.edu Fri Sep 19 03:28:49 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 19 Sep 2008 03:28:49 -0700 Subject: Shutdown tylanbpsg SNF 2008-09-19 03:28:47: MFS alarm at Step 15 of LTO400 repeatedly Message-ID: From seymour at snf.stanford.edu Fri Sep 19 09:39:31 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Sep 2008 09:39:31 -0700 Subject: Shutdown tylanbpsg SNF 2008-09-19 03:28:47: MFS alarm at Step 15 of LTO400 repeatedly Message-ID: found broken loader sheath. Replaced loader sheath and one injector. Found the other injector pointing 180 degs from standard. repositioned injector and did a pumpdown and leak reat. base was 3 mT and leak was 5 mT/min. From maurice at snf.stanford.edu Tue Sep 23 14:01:10 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 23 Sep 2008 14:01:10 -0700 Subject: Comment tylanbpsg SNF 2008-09-23 14:01:10: modified LTO350P Message-ID: All TCU ID tags removed from recipe From maurice at snf.stanford.edu Tue Sep 23 14:38:53 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 23 Sep 2008 14:38:53 -0700 Subject: Shutdown tylanbpsg SNF 2008-09-23 14:38:48: Black junk on left sheath Message-ID: Tube down for a pull and clean From tberg at snf.stanford.edu Wed Sep 24 14:23:44 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 24 Sep 2008 14:23:44 -0700 Subject: Comment tylanbpsg SNF 2008-09-24 14:23:42: Tube pulled and replaced Message-ID: waiting for water to finish cleans and re assembly From mdickey at snf.stanford.edu Thu Sep 25 11:32:58 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 25 Sep 2008 11:32:58 -0700 Subject: Comment tylanbpsg SNF 2008-09-25 11:32:57: In coat Message-ID: Tube has been replaced and quartzware cleaned. Will need test after coat From maurice at snf.stanford.edu Thu Sep 25 16:51:34 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:51:34 -0700 Subject: Shutdown tylanbpsg SNF 2008-09-23 14:38:48: Black junk on left sheath Message-ID: Tube pulled, cleaned, coated and tested all boats cleaned all in tube scraped test good LTO400 00:20:00 ~3400 ang From maurice at snf.stanford.edu Thu Sep 25 16:52:09 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:52:09 -0700 Subject: Comment tylanbpsg SNF 2008-09-24 14:23:42: Tube pulled and replaced Message-ID: heated up and coated From maurice at snf.stanford.edu Thu Sep 25 16:52:27 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:52:27 -0700 Subject: Comment tylanbpsg SNF 2008-09-25 11:32:57: In coat Message-ID: coat and test complete From maurice at snf.stanford.edu Thu Sep 25 16:52:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:52:44 -0700 Subject: Comment tylanbpsg SNF 2008-09-17 10:03:01: door interlock now being made when loader is in Message-ID: archive From maurice at snf.stanford.edu Thu Sep 25 16:52:57 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:52:57 -0700 Subject: Comment tylanbpsg SNF 2008-09-17 08:24:13: door flag not making interlock Message-ID: archive From gyama at snf.stanford.edu Tue Sep 30 12:29:24 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 30 Sep 2008 12:29:24 -0700 Subject: Comment tylanbpsg SNF 2008-09-30 12:29:24: low on metal & non-metal dummy wafers Message-ID: had to use some of my own SAT