From alsune at snf.stanford.edu Thu Apr 2 22:50:59 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 2 Apr 2009 22:50:59 -0700 Subject: Comment tylanbpsg SNF 2009-04-02 22:50:59: Front Panel LED not functioning Message-ID: It the LED panel indicating the current status of the tube goes off and on. Need to apply pressure to the panel to temporarily turn on the panel again From king at snf.stanford.edu Tue Apr 7 23:45:20 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 7 Apr 2009 23:45:20 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-07 23:45:20: Broken rail quartz Message-ID: Found vented, would not pump down after loading wafers, then saw the broken quartz. The N2 alarm kept coming on also. There was an odd broken wafer in the far back boat that I took out (see the pile on the deck). From seymour at snf.stanford.edu Wed Apr 8 11:28:34 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 8 Apr 2009 11:28:34 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-07 23:45:20: Broken rail quartz Message-ID: Found both loader sheaths and silane injector broken. Replaced all beroken quartz. Cold and hot leak check passed. From seymour at snf.stanford.edu Wed Apr 8 11:30:17 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 8 Apr 2009 11:30:17 -0700 Subject: Problem tylanbpsg SNF 2009-04-08 11:30:15: Quartz replaced Message-ID: Tube is back up after repair. If your run is critical, a test my be needed to verify process. From king at snf.stanford.edu Thu Apr 9 00:42:16 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 9 Apr 2009 00:42:16 -0700 Subject: Comment tylanbpsg SNF 2009-04-09 00:42:16: boat may be scraping in the tube Message-ID: From seymour at snf.stanford.edu Thu Apr 9 08:14:38 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Apr 2009 08:14:38 -0700 Subject: Comment tylanbpsg SNF 2009-04-09 08:14:37: loader operation Message-ID: I checked loader out and in. Made small adjustments to loader height on way out and checked for dragging on way in. Looks ok and no scrapping sounds. From tberg at snf.stanford.edu Mon Apr 13 07:17:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Apr 2009 07:17:31 -0700 Subject: Problem tylanbpsg SNF 2009-04-08 11:30:15: Quartz replaced Message-ID: System has been running with no problems From tberg at snf.stanford.edu Mon Apr 13 07:17:47 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Apr 2009 07:17:47 -0700 Subject: Comment tylanbpsg SNF 2009-03-31 13:56:53: oil change completed Message-ID: noted From tberg at snf.stanford.edu Mon Apr 13 07:18:06 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Apr 2009 07:18:06 -0700 Subject: Comment tylanbpsg SNF 2009-03-31 06:47:32: Found metal boat lid having some black spots Message-ID: Replaced lid From tberg at snf.stanford.edu Mon Apr 13 07:18:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Apr 2009 07:18:16 -0700 Subject: Comment tylanbpsg SNF 2009-03-20 13:34:20: STRIP THE DUMMY WAFERS!!!!!!! Message-ID: Noted From tberg at snf.stanford.edu Mon Apr 13 07:18:32 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Apr 2009 07:18:32 -0700 Subject: Comment tylanbpsg SNF 2009-04-09 00:42:16: boat may be scraping in the tube Message-ID: Adjusted From tberg at snf.stanford.edu Mon Apr 13 07:19:06 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Apr 2009 07:19:06 -0700 Subject: Comment tylanbpsg SNF 2009-04-09 08:14:37: loader operation Message-ID: Adjusted loader.System has been running with no problems From seymour at snf.stanford.edu Wed Apr 15 15:32:23 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 15 Apr 2009 15:32:23 -0700 Subject: Comment tylanbpsg SNF 2009-04-15 15:32:22: pump oil changed Message-ID: From kevhuang at snf.stanford.edu Wed Apr 15 18:03:48 2009 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Wed, 15 Apr 2009 18:03:48 -0700 Subject: Problem tylanbpsg SNF 2009-04-15 18:03:48: white dusts and low dep rate Message-ID: ran LTO400PC for 95 min. and only 50nm of oxide was deposited. Also, white particles are on the dummies before and after my wafers after deposition (but they don't seem to be on my wafer...maybe it's the thin oxide depostied?) And, the recipe being displayed was changing all the time during the program run. From kevhuang at snf.stanford.edu Wed Apr 15 18:12:41 2009 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Wed, 15 Apr 2009 18:12:41 -0700 Subject: Problem tylanbpsg SNF 2009-04-15 18:12:39: pump 11 won't run Message-ID: MFS alarm keeps coming on and From nvgirish at snf.stanford.edu Thu Apr 16 01:46:47 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 16 Apr 2009 01:46:47 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-16 01:46:46: MFS Alarm Message-ID: LTO400 (at beginning of Step15) and PUMP11 both gave off MFS alarms (Pressure does not go down). Please look into this. From tberg at snf.stanford.edu Thu Apr 16 12:01:54 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Apr 2009 12:01:54 -0700 Subject: Comment tylanbpsg SNF 2009-04-16 12:01:53: Quartz replaced Message-ID: Ray has replaced All broken Quartz and tube leak rate looks good. It is heating up now From seymour at snf.stanford.edu Thu Apr 16 13:32:50 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Apr 2009 13:32:50 -0700 Subject: Problem tylanbpsg SNF 2009-04-15 18:03:48: white dusts and low dep rate Message-ID: quartz replaced From seymour at snf.stanford.edu Thu Apr 16 13:33:03 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Apr 2009 13:33:03 -0700 Subject: Problem tylanbpsg SNF 2009-04-15 18:12:39: pump 11 won't run Message-ID: quartz replaced From seymour at snf.stanford.edu Thu Apr 16 13:33:36 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Apr 2009 13:33:36 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-16 01:46:46: MFS Alarm Message-ID: quartz replaced cold and hot leak check passed From seymour at snf.stanford.edu Thu Apr 16 13:34:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Apr 2009 13:34:29 -0700 Subject: Problem tylanbpsg SNF 2009-04-16 13:34:28: needs test after repair Message-ID: tube is at temp and leak check passed From bchui at snf.stanford.edu Thu Apr 16 18:01:33 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 16 Apr 2009 18:01:33 -0700 Subject: Comment tylanbpsg SNF 2009-04-16 18:01:33: Nice film and uniformity so far Message-ID: After running Part 1 of my LTO400PC (50min), wafers came out looking very uniform and dust-free. (Ran 13 device wafers, using every other slot). The center-of-boat wafer gave 7350A (ctr) and 7050A(edge) as measured on nanospec. Don't have boat-front-end vs back-end thickness comparison since I'm pushing the wafers right back in for Part 2 after swapping their order. From masaharu at snf.stanford.edu Sat Apr 18 17:17:51 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 18 Apr 2009 17:17:51 -0700 Subject: Problem tylanbpsg SNF 2009-04-18 17:17:51: display disappears Message-ID: Display sometimes show nothing, as often seen in tylan FGA. From narii at snf.stanford.edu Sat Apr 18 22:23:43 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 18 Apr 2009 22:23:43 -0700 Subject: Problem tylanbpsg SNF 2009-04-18 22:23:43: MFS alarm Message-ID: MFS alarm occurs again at step 15 of LTO300 and pressure won't go down. From narii at snf.stanford.edu Sat Apr 18 22:32:11 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 18 Apr 2009 22:32:11 -0700 Subject: Problem tylanbpsg SNF 2009-04-18 22:32:10: MFS alarm 08 Message-ID: Unable to pump down to the base. From tberg at snf.stanford.edu Mon Apr 20 09:22:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 20 Apr 2009 09:22:16 -0700 Subject: Problem tylanbpsg SNF 2009-04-18 22:32:10: MFS alarm 08 Message-ID: Mike adjusted the loader and it pumps fine From rshyam at snf.stanford.edu Tue Apr 21 11:32:17 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 21 Apr 2009 11:32:17 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-21 11:32:16: Loud Grinding noise and MFS08 alarm Message-ID: From seymour at snf.stanford.edu Tue Apr 21 13:23:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Apr 2009 13:23:46 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-21 11:32:16: Loud Grinding noise and MFS08 alarm Message-ID: replaced loader sheath and rear baffle. reset pump contactor. Adjusted loader for centering in tube. turned on element breaker. Did a leak check base good and leat rate at 11 mT. From seymour at snf.stanford.edu Tue Apr 21 13:24:37 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Apr 2009 13:24:37 -0700 Subject: Problem tylanbpsg SNF 2009-04-18 22:23:43: MFS alarm Message-ID: pump contacter tripped due to pumping on a large leak. From seymour at snf.stanford.edu Tue Apr 21 13:27:51 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Apr 2009 13:27:51 -0700 Subject: Problem tylanbpsg SNF 2009-04-18 17:17:51: display disappears Message-ID: pushed display into socket. From seymour at snf.stanford.edu Tue Apr 21 13:29:17 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Apr 2009 13:29:17 -0700 Subject: Problem tylanbpsg SNF 2009-04-16 13:34:28: needs test after repair Message-ID: test was ran, see bchui's comment From narii at snf.stanford.edu Tue Apr 21 23:56:11 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 21 Apr 2009 23:56:11 -0700 Subject: Problem tylanbpsg SNF 2009-04-21 23:56:10: Boat cover broken Message-ID: One of the boat cover is broken while changing wafers From alsune at snf.stanford.edu Wed Apr 22 03:13:29 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Wed, 22 Apr 2009 03:13:29 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-22 03:13:29: MFS Alarm Message-ID: Failed to run pump11 program From tberg at snf.stanford.edu Wed Apr 22 07:34:17 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Apr 2009 07:34:17 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-22 03:13:29: MFS Alarm Message-ID: Mike restarted the pump and ran pump 11 no problem.keep an eye on the door to make sure it seals From tberg at snf.stanford.edu Wed Apr 22 08:59:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Apr 2009 08:59:16 -0700 Subject: Problem tylanbpsg SNF 2009-04-21 23:56:10: Boat cover broken Message-ID: replaced top back in pump program From latta at snf.stanford.edu Wed Apr 22 14:09:07 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 22 Apr 2009 14:09:07 -0700 Subject: Problem tylanbpsg SNF 2009-04-22 14:09:07: Door may not completely close Message-ID: I had to GENTLY nudge it to get it to close for my device run and the pump11 program From maurice at snf.stanford.edu Wed Apr 22 15:52:24 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Apr 2009 15:52:24 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-22 15:52:24: door didn't close/ Message-ID: Door didn't close completely. System tried (and failed) to pump down the room. Elmer and Ed a quartz breaking sound before the pump kicked off From seymour at snf.stanford.edu Thu Apr 23 07:35:40 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Apr 2009 07:35:40 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-22 15:52:24: door didn't close/ Message-ID: adjusted door tilt and closed in auto and started pumping. tube pumped normally. From seymour at snf.stanford.edu Thu Apr 23 07:36:35 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Apr 2009 07:36:35 -0700 Subject: Problem tylanbpsg SNF 2009-04-22 14:09:07: Door may not completely close Message-ID: adjusted door angle slightly. used loader motor to close and started pumping and it pumped down. From seymour at snf.stanford.edu Thu Apr 23 07:40:47 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Apr 2009 07:40:47 -0700 Subject: Comment tylanbpsg SNF 2009-04-23 07:40:47: door has had closing issues Message-ID: I adjusted door and checked operation and pumping. The tube pumped down ok. Please keep an eye on door closure when starting pump operation to verify door seals. From maurice at snf.stanford.edu Thu Apr 23 16:53:18 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Apr 2009 16:53:18 -0700 Subject: Comment tylanbpsg SNF 2009-04-23 16:53:18: replaced non-metal dummies Message-ID: From seymour at snf.stanford.edu Fri Apr 24 14:37:52 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Apr 2009 14:37:52 -0700 Subject: Comment tylanbpsg SNF 2009-04-24 14:37:51: pump oil changed Message-ID: From king at snf.stanford.edu Mon Apr 27 21:40:11 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 27 Apr 2009 21:40:11 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-27 21:40:09: broken sheath Message-ID: Had a MFC alarm at initial pumpdown. Opened up and the sheath is broken in front. I add extra dummy wafers to the boat; could it cause the sheaths to hit something? It sounded as though it was dragging a little. From tberg at snf.stanford.edu Tue Apr 28 10:47:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Apr 2009 10:47:18 -0700 Subject: Shutdown tylanbpsg SNF 2009-04-27 21:40:09: broken sheath Message-ID: Ray replaced sheaths and it passed leak chek and temp is OK From tberg at snf.stanford.edu Tue Apr 28 12:14:56 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Apr 2009 12:14:56 -0700 Subject: Comment tylanbpsg SNF 2009-04-15 15:32:22: pump oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Apr 28 12:15:11 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Apr 2009 12:15:11 -0700 Subject: Comment tylanbpsg SNF 2009-04-16 12:01:53: Quartz replaced Message-ID: noted From tberg at snf.stanford.edu Tue Apr 28 12:15:48 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Apr 2009 12:15:48 -0700 Subject: Comment tylanbpsg SNF 2009-04-02 22:50:59: Front Panel LED not functioning Message-ID: reseated LED module From tberg at snf.stanford.edu Tue Apr 28 12:16:11 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Apr 2009 12:16:11 -0700 Subject: Comment tylanbpsg SNF 2009-04-23 16:53:18: replaced non-metal dummies Message-ID: Thanks From jwpchen at snf.stanford.edu Wed Apr 29 20:11:25 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Wed, 29 Apr 2009 20:11:25 -0700 Subject: Problem tylanbpsg SNF 2009-04-29 20:11:24: metal boat cracked Message-ID: looks precarious, maybe held together by oxide? From jwpchen at snf.stanford.edu Wed Apr 29 20:14:13 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Wed, 29 Apr 2009 20:14:13 -0700 Subject: Problem tylanbpsg SNF 2009-04-29 20:14:12: screech when boating out Message-ID: however quiet on its way in, maybe because cantilever assembly has cooled off From seymour at snf.stanford.edu Thu Apr 30 08:09:00 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Apr 2009 08:09:00 -0700 Subject: Problem tylanbpsg SNF 2009-04-29 20:14:12: screech when boating out Message-ID: loaded lto400 and vented tube. Pushed run and lestened to loader. There was a slight scrapping sound on way out. Raised loader and continued pull in manual. No more scrapping sound. Ran loader in using auto no sounds, then did a pull in auto and no sounds. Put tube in pump recipe. From seymour at snf.stanford.edu Thu Apr 30 10:39:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Apr 2009 10:39:19 -0700 Subject: Problem tylanbpsg SNF 2009-04-29 20:11:24: metal boat cracked Message-ID: replaced second metal boat and pumped tube down in boat11 recipe.