Shutdown tylanbpsg SNF 2009-04-07 23:45:20: Broken rail quartz

king at snf.stanford.edu king at snf.stanford.edu
Tue Apr 7 23:45:20 PDT 2009


Found vented, would not pump down after loading wafers, then saw the broken quartz.  The N2 alarm kept coming on also.   There was an odd broken wafer in the far back boat that I took out (see the pile on the deck).   




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