Problem tylanbpsg SNF 2009-04-15 18:03:48: white dusts and low dep rate

kevhuang at snf.stanford.edu kevhuang at snf.stanford.edu
Wed Apr 15 18:03:48 PDT 2009


ran LTO400PC for 95 min.  and only 50nm of oxide was deposited.
Also, white particles are on the dummies before and after my wafers after deposition (but they don't seem to be on my wafer...maybe it's the thin oxide depostied?)
And, the recipe being displayed was changing all the time during the program run.




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