Comment tylanbpsg SNF 2009-04-16 18:01:33: Nice film and uniformity so far

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Apr 16 18:01:33 PDT 2009


After running Part 1 of my LTO400PC (50min), wafers came out looking very uniform and dust-free.  (Ran 13 device wafers, using every other slot). The center-of-boat wafer gave 7350A (ctr) and 7050A(edge) as measured on nanospec.  Don't have boat-front-end vs back-end thickness comparison since I'm pushing the wafers right back in for Part 2 after swapping their order.




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