From rshyam at snf.stanford.edu Sun Aug 2 00:29:17 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 2 Aug 2009 00:29:17 -0700 Subject: Problem tylanbpsg SNF 2009-08-02 00:29:17: non-metal boat Message-ID: a rectangular slat from the side of the non-metal boat came off when I was unloading wafers From tberg at snf.stanford.edu Mon Aug 3 08:21:44 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Aug 2009 08:21:44 -0700 Subject: Problem tylanbpsg SNF 2009-08-02 00:29:17: non-metal boat Message-ID: Replacedbroken boat- in pump program From tura at snf.stanford.edu Wed Aug 5 22:05:16 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 5 Aug 2009 22:05:16 -0700 Subject: Problem tylanbpsg SNF 2009-08-05 22:05:15: Temperature overshoot happened again! Message-ID: I was running LTO400. Everything was fine until step 25. But starting step 45, load side TCU got stuck at 81.56%. Load side temperature was 435C and rising. Fortunately I got a hold of Eric and he unplugged the thermocouple from the backside and plugged it back in. I aborted that run and ran it again, now all temperatures look stable around 400C. This happened to me twice before. Please closely watch the temperatures at your deposition steps, otherwise the load side temperature could go 140C above the deposition temperature (like it happened to me last time) and you could get bad wafer-to-wafer uniformity. Unplugging the thermocouples seems to solve it. From cursive at snf.stanford.edu Sat Aug 8 11:35:23 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 8 Aug 2009 11:35:23 -0700 Subject: Problem tylanbpsg SNF 2009-08-08 11:35:22: temperature control problem in deposition step Message-ID: temperature contro problem in depositions step Front: 500'C, Center: 400'C, Back: 410'C From cursive at snf.stanford.edu Sat Aug 8 13:13:30 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 8 Aug 2009 13:13:30 -0700 Subject: Problem tylanbpsg SNF 2009-08-08 13:13:29: uniformity problem from thermal controller Message-ID: I put 8 wafers in non-metal boat. Running LTO400. LTO thickness change from 500 (Front) to 580A (Back). This might be from the temperature control problem in deposition step. Thermal controller has problem! From tberg at snf.stanford.edu Mon Aug 10 06:04:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Aug 2009 06:04:31 -0700 Subject: Shutdown tylanbpsg SNF 2009-08-10 06:04:30: Pull and clean Message-ID: From seymour at snf.stanford.edu Tue Aug 11 13:50:36 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 11 Aug 2009 13:50:36 -0700 Subject: Shutdown tylanbpsg SNF 2009-08-10 06:04:30: Pull and clean Message-ID: pull and clean completed. coat completed From seymour at snf.stanford.edu Tue Aug 11 13:51:04 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 11 Aug 2009 13:51:04 -0700 Subject: Problem tylanbpsg SNF 2009-08-11 13:51:03: needs test after clean Message-ID: From maurice at snf.stanford.edu Tue Aug 11 14:21:42 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Aug 2009 14:21:42 -0700 Subject: Comment tylanbpsg SNF 2009-08-11 14:21:42: testing BPSG after tube pull Message-ID: From maurice at snf.stanford.edu Tue Aug 11 17:39:05 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Aug 2009 17:39:05 -0700 Subject: Comment tylanbpsg SNF 2009-08-11 14:21:42: testing BPSG after tube pull Message-ID: LTO400PC 00:20:00 expected 2800Ang Actually 2506 Ang Low dep rate. Will watch result from the next few users. From maurice at snf.stanford.edu Tue Aug 11 17:39:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Aug 2009 17:39:48 -0700 Subject: Problem tylanbpsg SNF 2009-08-11 13:51:03: needs test after clean Message-ID: test complete LTO400PC 00:20:00 expected 2800Ang Actually 2506 Ang Lower dep rate than expected. From maurice at snf.stanford.edu Tue Aug 11 17:40:12 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Aug 2009 17:40:12 -0700 Subject: Comment tylanbpsg SNF 2009-07-23 16:26:29: Oxide Dep Test Message-ID: archive From maurice at snf.stanford.edu Tue Aug 11 17:43:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Aug 2009 17:43:07 -0700 Subject: Problem tylanbpsg SNF 2009-08-11 17:43:06: Dep rate lower than usual Message-ID: If you work is critical, you may want to run a test first. We will watch user's results and may run another test tomorrow. LTO400PC 00:20:00 expected 2800Ang Actually 2506 Ang From alsune at snf.stanford.edu Sun Aug 16 18:27:24 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 16 Aug 2009 18:27:24 -0700 Subject: Problem tylanbpsg SNF 2009-08-16 18:27:24: problem in vent verification step Message-ID: Upon verifying the venting of the tube by pressing manual-fast-open, the tube goes back in again after opening about 20cm. The tube then make a bumping sound as if it want to go further in, even though the tube is completely closed. However, it does work well if I just load the program that I want and run it. From tberg at snf.stanford.edu Tue Aug 18 06:07:07 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Aug 2009 06:07:07 -0700 Subject: Problem tylanbpsg SNF 2009-08-16 18:27:24: problem in vent verification step Message-ID: Numerous users report no problem From tberg at snf.stanford.edu Tue Aug 18 06:07:19 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Aug 2009 06:07:19 -0700 Subject: Problem tylanbpsg SNF 2009-08-05 22:05:15: Temperature overshoot happened again! Message-ID: Numerous users report no problem From tberg at snf.stanford.edu Tue Aug 18 06:07:33 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Aug 2009 06:07:33 -0700 Subject: Problem tylanbpsg SNF 2009-08-08 11:35:22: temperature control problem in deposition step Message-ID: Numerous users report no problem From tberg at snf.stanford.edu Tue Aug 18 06:07:44 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Aug 2009 06:07:44 -0700 Subject: Problem tylanbpsg SNF 2009-08-08 13:13:29: uniformity problem from thermal controller Message-ID: Numerous users report no problem From tberg at snf.stanford.edu Tue Aug 18 06:08:05 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Aug 2009 06:08:05 -0700 Subject: Problem tylanbpsg SNF 2009-08-11 17:43:06: Dep rate lower than usual Message-ID: Numerous users report no problem From rshyam at snf.stanford.edu Thu Aug 20 07:26:25 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Thu, 20 Aug 2009 07:26:25 -0700 Subject: Comment tylanbpsg SNF 2009-08-20 07:26:25: yellow-brown color in some places in the tube Message-ID: is that normal? From chienyuc at snf.stanford.edu Tue Aug 25 20:05:22 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 25 Aug 2009 20:05:22 -0700 Subject: Problem tylanbpsg SNF 2009-08-25 20:05:21: Leak check fail Message-ID: Leak check (STEP 0035) failed twice but pass at the third trial, although the base pressure already go over 100 mtorr. From seymour at snf.stanford.edu Wed Aug 26 08:56:32 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 26 Aug 2009 08:56:32 -0700 Subject: Problem tylanbpsg SNF 2009-08-25 20:05:21: Leak check fail Message-ID: opened tube and cleaned door seal. tube pumps down ok and leak rate is ok.