From seymour at snf.stanford.edu Tue Dec 1 10:30:14 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:30:14 -0800 Subject: Shutdown tylanbpsg SNF 2009-11-30 11:08:32: pump bad Message-ID: replaced pump amd checked out system performance. Good base and ror. I will put the coral condition to needs testing after repair. From seymour at snf.stanford.edu Tue Dec 1 10:30:33 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:30:33 -0800 Subject: Problem tylanbpsg SNF 2009-11-28 19:41:01: doesn't pump down Message-ID: pumps now after pump replacement From seymour at snf.stanford.edu Tue Dec 1 10:31:39 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:31:39 -0800 Subject: Comment tylanbpsg SNF 2009-10-29 15:01:07: oil changed Message-ID: noted From seymour at snf.stanford.edu Tue Dec 1 10:31:53 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:31:53 -0800 Subject: Comment tylanbpsg SNF 2009-10-14 13:48:51: qual after pull&clean Message-ID: noted From seymour at snf.stanford.edu Tue Dec 1 10:32:01 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:32:01 -0800 Subject: Comment tylanbpsg SNF 2009-11-06 08:41:01: oil changed Message-ID: noted From seymour at snf.stanford.edu Tue Dec 1 10:32:10 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:32:10 -0800 Subject: Comment tylanbpsg SNF 2009-11-19 14:15:00: oil changed Message-ID: noted From seymour at snf.stanford.edu Tue Dec 1 10:32:44 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:32:44 -0800 Subject: Comment tylanbpsg SNF 2009-12-01 10:32:43: needs test after repair Message-ID: From seymour at snf.stanford.edu Tue Dec 1 10:33:12 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:33:12 -0800 Subject: Problem tylanbpsg SNF 2009-12-01 10:33:11: needs test after repair Message-ID: From cursive at snf.stanford.edu Tue Dec 1 12:34:30 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 1 Dec 2009 12:34:30 -0800 Subject: Problem tylanbpsg SNF 2009-12-01 12:34:30: Vaccum wand is loose Message-ID: Vaccum wand is loose, and can't attach wafer properly. From cursive at snf.stanford.edu Tue Dec 1 12:55:23 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 1 Dec 2009 12:55:23 -0800 Subject: Problem tylanbpsg SNF 2009-12-01 12:55:23: Temperature stable problem Message-ID: The temperature controller has problem. L side reach 400 degree C, but it still supplies the power. The problem occured after step 40 in LTO400. From seymour at snf.stanford.edu Tue Dec 1 13:24:37 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 13:24:37 -0800 Subject: Problem tylanbpsg SNF 2009-12-01 12:34:30: Vaccum wand is loose Message-ID: replaced vac wand tip From seymour at snf.stanford.edu Tue Dec 1 13:26:05 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 13:26:05 -0800 Subject: Problem tylanbpsg SNF 2009-12-01 12:55:23: Temperature stable problem Message-ID: removed and cleaned TCU board contacts. Front zone now controlling and cooling down to setpoint. User has tube in hold until setpoint is reached. From narii at snf.stanford.edu Wed Dec 2 03:19:10 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Wed, 2 Dec 2009 03:19:10 -0800 Subject: Comment tylanbpsg SNF 2009-12-02 03:19:10: Strip dummies plz. Message-ID: There are several users before me, and they all didn't fill out the log because oxide in dummy reached 2.9um. Well, even if you guys not filled out the log, history @ coral still can track you. From maurice at snf.stanford.edu Thu Dec 3 10:54:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Dec 2009 10:54:22 -0800 Subject: Problem tylanbpsg SNF 2009-12-01 10:33:11: needs test after repair Message-ID: 12/1 cursive ran lto400 and got a dep rate of 143/min (after new pump) 11/16 cursive ran lto400 and got a dep rate of 136/min From king at snf.stanford.edu Thu Dec 3 18:43:40 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 3 Dec 2009 18:43:40 -0800 Subject: Problem tylanbpsg SNF 2009-12-03 18:43:39: Pumpdown problems Message-ID: Found the system in Pump11 but vented. Trying to start the pump process resulted in N2 MFC error. Cleared error, reloaded Pump11 program, got MFC errors again. Back of jungle also said "Gate interlock" a couple of times. Pumps appear to be running normally and door LED is lit. Gate and soft pump LEDs never come on, program never advances beyong step 10. I'll keep this in "problem" status fpr a short time in case it magically works. From king at snf.stanford.edu Thu Dec 3 18:58:29 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 3 Dec 2009 18:58:29 -0800 Subject: Shutdown tylanbpsg SNF 2009-12-03 18:58:29: MFC, Pump errors. Message-ID: Cannot run. See previous problem report. From seymour at snf.stanford.edu Fri Dec 4 08:31:15 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Dec 2009 08:31:15 -0800 Subject: Comment tylanbpsg SNF 2009-12-04 08:31:15: replacing loader rails Message-ID: From seymour at snf.stanford.edu Fri Dec 4 11:22:42 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Dec 2009 11:22:42 -0800 Subject: Shutdown tylanbpsg SNF 2009-12-03 18:58:29: MFC, Pump errors. Message-ID: replaced broken quartz and pumped tube. base good and leak rate good. From seymour at snf.stanford.edu Fri Dec 4 11:23:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Dec 2009 11:23:19 -0800 Subject: Comment tylanbpsg SNF 2009-12-04 08:31:15: replacing loader rails Message-ID: quartz replaced and tube heating up at this time. From seymour at snf.stanford.edu Fri Dec 4 11:24:06 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Dec 2009 11:24:06 -0800 Subject: Problem tylanbpsg SNF 2009-12-03 18:43:39: Pumpdown problems Message-ID: pumps good after replacing broken loader sheaths From seymour at snf.stanford.edu Fri Dec 4 11:25:56 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Dec 2009 11:25:56 -0800 Subject: Problem tylanbpsg SNF 2009-12-04 11:25:55: tube heating up after repair Message-ID: I was told Maurice wasn't tunning a test so next user will need to report results. From riteshj at snf.stanford.edu Fri Dec 4 14:06:30 2009 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Fri, 4 Dec 2009 14:06:30 -0800 Subject: Comment tylanbpsg SNF 2009-12-04 14:06:30: Ran LTO 400, 6 mins, worked fine ... Message-ID: Ran LTO 400, 6 mins, 2nd slot: 779 +/- 10A 7th slot: 767 +/- 10A 12th slot: 760 +/- 10A Values close to expected (~800A) No pumpiung problem. Thank you, Ritesh From narii at snf.stanford.edu Sat Dec 5 02:36:21 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 5 Dec 2009 02:36:21 -0800 Subject: Problem tylanbpsg SNF 2009-12-05 02:36:21: MFS alarm Message-ID: While running LTO300PC recipe, MFS alarm occurs. At the control panel, SiH4 valve was blinking while step 75 & 80 From ericp at snf.stanford.edu Sun Dec 6 03:25:01 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 6 Dec 2009 03:25:01 -0800 Subject: Problem tylanbpsg SNF 2009-12-06 03:25:00: loader motor, log sheets Message-ID: 1). Loader motor bearing squealing like a pig, 2). log sheets are long used up. people are forced into writing on gloves now. From seymour at snf.stanford.edu Mon Dec 7 07:48:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Dec 2009 07:48:45 -0800 Subject: Problem tylanbpsg SNF 2009-12-06 03:25:00: loader motor, log sheets Message-ID: found loader cable very tight. loosened cable and ran loader in auto mode and it was'nt squeeling. From seymour at snf.stanford.edu Mon Dec 7 07:59:24 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Dec 2009 07:59:24 -0800 Subject: Problem tylanbpsg SNF 2009-12-05 02:36:21: MFS alarm Message-ID: ran 100 sccm on silane with no alarms for flow. turning system over to next user. From seymour at snf.stanford.edu Mon Dec 7 07:59:44 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Dec 2009 07:59:44 -0800 Subject: Problem tylanbpsg SNF 2009-12-04 11:25:55: tube heating up after repair Message-ID: test have been ran From seymour at snf.stanford.edu Mon Dec 7 08:00:00 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Dec 2009 08:00:00 -0800 Subject: Comment tylanbpsg SNF 2009-12-01 10:32:43: needs test after repair Message-ID: test have been ran From seymour at snf.stanford.edu Mon Dec 7 08:00:25 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Dec 2009 08:00:25 -0800 Subject: Comment tylanbpsg SNF 2009-11-30 14:04:35: hooking up rebuilt pump at this time. Message-ID: pump working fine