From king at snf.stanford.edu Tue Feb 3 00:16:59 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 3 Feb 2009 00:16:59 -0800 Subject: Comment tylanbpsg SNF 2009-02-03 00:16:58: test run LTO400 was OK Message-ID: Aiming for 1000A and got 1024A. From tberg at snf.stanford.edu Tue Feb 3 07:38:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Feb 2009 07:38:18 -0800 Subject: Problem tylanbpsg SNF 2009-01-28 15:16:34: "H" label on TEMPC Message-ID: Changes between H,L, G are normal as temp transitions happen From duygu at snf.stanford.edu Thu Feb 5 13:58:45 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Thu, 5 Feb 2009 13:58:45 -0800 Subject: Problem tylanbpsg SNF 2009-02-05 13:58:44: mfs alarm at T stabilization step Message-ID: From duygu at snf.stanford.edu Thu Feb 5 14:15:37 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Thu, 5 Feb 2009 14:15:37 -0800 Subject: Problem tylanbpsg SNF 2009-02-05 14:15:37: temperature??? Message-ID: LTO 300 recipe during process step TL:324b TC:312 TS:304 From tberg at snf.stanford.edu Thu Feb 5 14:39:36 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 Feb 2009 14:39:36 -0800 Subject: Problem tylanbpsg SNF 2009-02-05 13:58:44: mfs alarm at T stabilization step Message-ID: Small piece of Quartz on flange gasket preventing pump down. Removed,reset pump and it looks OK From seymour at snf.stanford.edu Thu Feb 5 14:52:17 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Feb 2009 14:52:17 -0800 Subject: Problem tylanbpsg SNF 2009-02-05 14:15:37: temperature??? Message-ID: reseated front zone spike t/c and little b went away. When I lase checked the front zone was recovering at 295 and zones center and rear were 299.X From seymour at snf.stanford.edu Thu Feb 5 14:55:00 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Feb 2009 14:55:00 -0800 Subject: Comment tylanbpsg SNF 2009-02-05 14:55:00: LTO300 TEMP TAKES A WHILE TO STABALIZE Message-ID: RECIPE MAY NEED TO BE PLACED IN HOLD DURING STABILIZATION STEP TO ACHIEVE FLAT PROFILE From seymour at snf.stanford.edu Fri Feb 13 07:48:17 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 13 Feb 2009 07:48:17 -0800 Subject: Comment tylanbpsg SNF 2009-02-13 07:48:16: replaced loader drive cable Message-ID: From duygu at snf.stanford.edu Fri Feb 13 09:18:39 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Fri, 13 Feb 2009 09:18:39 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 09:18:38: broken boat Message-ID: Backside of the nonmetal boat is broken. From seymour at snf.stanford.edu Fri Feb 13 10:03:09 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 13 Feb 2009 10:03:09 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 09:18:38: broken boat Message-ID: replaced boat top and put back into pump11 recipe From duygu at snf.stanford.edu Fri Feb 13 11:14:43 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Fri, 13 Feb 2009 11:14:43 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 11:14:42: backside of the nonmetal boat is broken Message-ID: Not the boat top, bottom of the boat itself broken From maurice at snf.stanford.edu Fri Feb 13 11:20:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Feb 2009 11:20:14 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 11:20:13: vacuum wand tip broken Message-ID: From maurice at snf.stanford.edu Fri Feb 13 11:25:29 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Feb 2009 11:25:29 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 11:25:29: broken side on boat Message-ID: User reports a broken side on the first boat in BPSG From tberg at snf.stanford.edu Tue Feb 17 06:32:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Feb 2009 06:32:16 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 11:20:13: vacuum wand tip broken Message-ID: Replaced tip From seymour at snf.stanford.edu Tue Feb 17 09:06:09 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Feb 2009 09:06:09 -0800 Subject: Comment tylanbpsg SNF 2009-02-17 09:06:09: changed pump oil Message-ID: From maurice at snf.stanford.edu Mon Feb 23 15:21:03 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Feb 2009 15:21:03 -0800 Subject: Shutdown tylanbpsg SNF 2009-02-23 15:21:02: failed leakcheck Message-ID: 2x From tberg at snf.stanford.edu Tue Feb 24 06:42:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Feb 2009 06:42:43 -0800 Subject: Shutdown tylanbpsg SNF 2009-02-23 15:21:02: failed leakcheck Message-ID: Found bad connection on pumping circuit-corrected. Pumping ok now From tberg at snf.stanford.edu Tue Feb 24 06:42:55 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Feb 2009 06:42:55 -0800 Subject: Comment tylanbpsg SNF 2009-02-17 09:06:09: changed pump oil Message-ID: noted From tberg at snf.stanford.edu Tue Feb 24 06:43:24 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Feb 2009 06:43:24 -0800 Subject: Comment tylanbpsg SNF 2009-01-22 21:25:40: broken wafers in first wafer boat Message-ID: Noted From cmcg at snf.stanford.edu Tue Feb 24 11:20:49 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 24 Feb 2009 11:20:49 -0800 Subject: Shutdown tylanbpsg SNF 2009-02-24 11:20:48: leak check fails Message-ID: leak check fails and pump programs will not run. From tberg at snf.stanford.edu Tue Feb 24 12:48:08 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Feb 2009 12:48:08 -0800 Subject: Shutdown tylanbpsg SNF 2009-02-24 11:20:48: leak check fails Message-ID: system was in step 25 of pump program when i arrived. did manual leak check< 10 mT per minute. back in pump program From maurice at snf.stanford.edu Tue Feb 24 14:41:19 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Feb 2009 14:41:19 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 11:25:29: broken side on boat Message-ID: boat replaced From maurice at snf.stanford.edu Tue Feb 24 14:41:31 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Feb 2009 14:41:31 -0800 Subject: Problem tylanbpsg SNF 2009-02-13 11:14:42: backside of the nonmetal boat is broken Message-ID: boat replaced From maurice at snf.stanford.edu Tue Feb 24 14:41:43 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Feb 2009 14:41:43 -0800 Subject: Comment tylanbpsg SNF 2009-02-13 07:48:16: replaced loader drive cable Message-ID: logged From maurice at snf.stanford.edu Tue Feb 24 14:42:19 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Feb 2009 14:42:19 -0800 Subject: Comment tylanbpsg SNF 2009-02-03 00:16:58: test run LTO400 was OK Message-ID: Thanks Robin. logged