From filip at snf.stanford.edu Thu Jul 2 20:35:35 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 2 Jul 2009 20:35:35 -0700 Subject: Problem tylanbpsg SNF 2009-07-02 20:35:35: no LTO deposited Message-ID: ran lto400pc for 8 minutes. NOTHING got deposited. From filip at snf.stanford.edu Thu Jul 2 22:33:37 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 2 Jul 2009 22:33:37 -0700 Subject: Problem tylanbpsg SNF 2009-07-02 22:33:36: failed to deposit Message-ID: tried again LTO400PC recipe for 8 mins. Deposited only 10nm, if that. Woo-Shik is running a different recipe to see if any LTO gets deposited. From alsune at snf.stanford.edu Fri Jul 3 00:33:40 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 3 Jul 2009 00:33:40 -0700 Subject: Problem tylanbpsg SNF 2009-07-03 00:33:39: Deposition Failure Message-ID: Attempted to deposit 24nm of SiO2 using LTO300PC 5min. Upon completion and measurement on nanospec, it only gave out 7nm, which was third the thicknes of what it was usually giving. From alsune at snf.stanford.edu Fri Jul 3 00:34:58 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 3 Jul 2009 00:34:58 -0700 Subject: Problem tylanbpsg SNF 2009-07-03 00:34:57: Deposition failure Message-ID: Same case as filip. Ran LTO300PC for 5min but it only gave 7nm, where under the same condition it would have given 24nm deposition. From cursive at snf.stanford.edu Sun Jul 5 08:12:05 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 5 Jul 2009 08:12:05 -0700 Subject: Problem tylanbpsg SNF 2009-07-05 08:12:05: LTO fail Message-ID: check the gas flow. it's normal, but still nothing on wafers. From tberg at snf.stanford.edu Mon Jul 6 06:42:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Jul 2009 06:42:18 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-06 06:42:18: Broken cantilever sheaths Message-ID: From seymour at snf.stanford.edu Mon Jul 6 08:58:33 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Jul 2009 08:58:33 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-06 06:42:18: Broken cantilever sheaths Message-ID: replaced loader sheaths and checked base pressure and leak rate. From seymour at snf.stanford.edu Mon Jul 6 09:44:41 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Jul 2009 09:44:41 -0700 Subject: Problem tylanbpsg SNF 2009-07-05 08:12:05: LTO fail Message-ID: checked silane and oxygen flows in manual. flowed to setpoint from LTO400 recipe. all parameters look good. needs a test to check growth. From seymour at snf.stanford.edu Mon Jul 6 09:45:00 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Jul 2009 09:45:00 -0700 Subject: Problem tylanbpsg SNF 2009-07-06 09:45:00: needs a test Message-ID: From maurice at snf.stanford.edu Mon Jul 6 11:39:19 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Jul 2009 11:39:19 -0700 Subject: Comment tylanbpsg SNF 2009-07-06 11:39:18: testing LTO Message-ID: running a test after reports of no deposition LTO400PC 00:20:00 expecting ~2800Ang From maurice at snf.stanford.edu Mon Jul 6 14:59:40 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Jul 2009 14:59:40 -0700 Subject: Comment tylanbpsg SNF 2009-07-06 11:39:18: testing LTO Message-ID: test after reports of no deposition LTO400PC 00:20:00 expecting ~2800Ang Actual 630 ang ir=1.47 From maurice at snf.stanford.edu Mon Jul 6 15:01:16 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Jul 2009 15:01:16 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-06 15:01:15: Thin dep Message-ID: test after reports of no deposition LTO400PC 00:20:00 expecting ~2800Ang Actual 630 ang ir=1.47 - Ray is checking Si MFC and looking for a possible broken injector From maurice at snf.stanford.edu Mon Jul 6 15:01:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Jul 2009 15:01:39 -0700 Subject: Problem tylanbpsg SNF 2009-07-06 09:45:00: needs a test Message-ID: Test confirmed thin dep From maurice at snf.stanford.edu Mon Jul 6 15:02:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Jul 2009 15:02:07 -0700 Subject: Problem tylanbpsg SNF 2009-07-03 00:34:57: Deposition failure Message-ID: dep problem comfirmed From maurice at snf.stanford.edu Tue Jul 7 10:27:08 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Jul 2009 10:27:08 -0700 Subject: Problem tylanbpsg SNF 2009-07-03 00:33:39: Deposition Failure Message-ID: broken injector From maurice at snf.stanford.edu Tue Jul 7 10:27:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Jul 2009 10:27:23 -0700 Subject: Problem tylanbpsg SNF 2009-07-02 22:33:36: failed to deposit Message-ID: broken injector From maurice at snf.stanford.edu Tue Jul 7 10:27:40 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Jul 2009 10:27:40 -0700 Subject: Problem tylanbpsg SNF 2009-07-02 20:35:35: no LTO deposited Message-ID: broken injector From maurice at snf.stanford.edu Tue Jul 7 14:24:30 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Jul 2009 14:24:30 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-06 15:01:15: Thin dep Message-ID: Broken injector fixed. Tube heated up. Test good. From alsune at snf.stanford.edu Tue Jul 7 23:22:59 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 7 Jul 2009 23:22:59 -0700 Subject: Problem tylanbpsg SNF 2009-07-07 23:22:58: MFS Alarm at step 20 Message-ID: Loaded the wafers and ran LTO300PC for 1Hr. During step 20 there was a big motor sound and sudden it went quiet and the MFS alarm began to sound From tberg at snf.stanford.edu Wed Jul 8 09:23:25 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Jul 2009 09:23:25 -0700 Subject: Comment tylanbpsg SNF 2009-07-08 09:23:25: Pump was off Message-ID: Pump was off restarted, leak checked running pump11 OK will observe From filip at snf.stanford.edu Wed Jul 8 13:21:05 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Wed, 8 Jul 2009 13:21:05 -0700 Subject: Problem tylanbpsg SNF 2009-07-08 13:21:05: not fully closed Message-ID: after the tube closes, one can manually (by pressing IN button) move the door good 5mm more. This needs to be done before the gate valve opens. Please adjust the sensor when you get a chance. From makotom1 at snf.stanford.edu Wed Jul 8 16:11:53 2009 From: makotom1 at snf.stanford.edu (makotom1 at snf.stanford.edu) Date: Wed, 8 Jul 2009 16:11:53 -0700 Subject: Problem tylanbpsg SNF 2009-07-08 16:11:53: door not fully closed Message-ID: As reported by filip, door was not fully closed, and machine didn't step out from boat-in sequence. This time door was closed manually. Pressure is OK. From ywidjaja at snf.stanford.edu Thu Jul 9 02:24:01 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Thu, 9 Jul 2009 02:24:01 -0700 Subject: Problem tylanbpsg SNF 2009-07-09 02:24:00: High deposition pressure Message-ID: Getting 700 mT during deposition (vs. the typical 200 mT). Was running LTO400. Leak check was ok. From seymour at snf.stanford.edu Thu Jul 9 08:32:23 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Jul 2009 08:32:23 -0700 Subject: Problem tylanbpsg SNF 2009-07-08 16:11:53: door not fully closed Message-ID: adjusted door sensor and checked in auto a few times to insure door interlock on when loader push finishes. From seymour at snf.stanford.edu Thu Jul 9 08:33:28 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Jul 2009 08:33:28 -0700 Subject: Problem tylanbpsg SNF 2009-07-09 02:24:00: High deposition pressure Message-ID: user after reported no problems. tube pressure looks fine at this time in pump11. From seymour at snf.stanford.edu Thu Jul 9 08:34:17 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Jul 2009 08:34:17 -0700 Subject: Problem tylanbpsg SNF 2009-07-08 13:21:05: not fully closed Message-ID: adjusted door in position flag to tell computer door closed ok to start vacuum. From seymour at snf.stanford.edu Thu Jul 9 08:36:18 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Jul 2009 08:36:18 -0700 Subject: Problem tylanbpsg SNF 2009-07-07 23:22:58: MFS Alarm at step 20 Message-ID: Ted found pump contactor off. He reset the overload and restarted pump, and checked vacuum, it was good. From seymour at snf.stanford.edu Thu Jul 9 08:36:54 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Jul 2009 08:36:54 -0700 Subject: Comment tylanbpsg SNF 2009-06-19 14:55:44: new filter and oil added Message-ID: noted From filip at snf.stanford.edu Thu Jul 16 16:57:34 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 16 Jul 2009 16:57:34 -0700 Subject: Problem tylanbpsg SNF 2009-07-16 16:57:33: particles all over Message-ID: ran full 13 wafers in non-metal boat. Particles on every single wafer, with varying density. From maurice at snf.stanford.edu Thu Jul 16 17:58:45 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 16 Jul 2009 17:58:45 -0700 Subject: Problem tylanbpsg SNF 2009-07-16 16:57:33: particles all over Message-ID: User now thinks the particles are from his wafers and not from the tube. The dummies do not have the particles. From tberg at snf.stanford.edu Fri Jul 17 06:03:23 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 17 Jul 2009 06:03:23 -0700 Subject: Comment tylanbpsg SNF 2009-07-08 09:23:25: Pump was off Message-ID: noted From gth at snf.stanford.edu Sun Jul 19 01:55:20 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 19 Jul 2009 01:55:20 -0700 Subject: Problem tylanbpsg SNF 2009-07-19 01:55:20: tube does not seal Message-ID: Tube has to be manually pushed in slightly, otherwise recipe would not start. From junil at snf.stanford.edu Sun Jul 19 18:49:34 2009 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Sun, 19 Jul 2009 18:49:34 -0700 Subject: Problem tylanbpsg SNF 2009-07-19 18:49:33: No display on furnace control panel Message-ID: From tberg at snf.stanford.edu Tue Jul 21 06:38:36 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 21 Jul 2009 06:38:36 -0700 Subject: Problem tylanbpsg SNF 2009-07-19 18:49:33: No display on furnace control panel Message-ID: display is ok From seymour at snf.stanford.edu Tue Jul 21 11:30:12 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jul 2009 11:30:12 -0700 Subject: Comment tylanbpsg SNF 2009-07-21 11:30:11: found loader out for 45 mins Message-ID: From seymour at snf.stanford.edu Tue Jul 21 11:32:59 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jul 2009 11:32:59 -0700 Subject: Problem tylanbpsg SNF 2009-07-19 01:55:20: tube does not seal Message-ID: checked loader operation and found a little slippage on drive pulley. I cleaned the pulley and cable. I adjusted clutch and checked operation. The door continues the slow push after reaching the first flag sensor and closed the door completely and the pump started the pumpdown From tura at snf.stanford.edu Tue Jul 21 17:57:08 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 21 Jul 2009 17:57:08 -0700 Subject: Comment tylanbpsg SNF 2009-07-21 17:57:07: Load side TCU is not working properly during deposition Message-ID: During recipe LTO400, steps 45,50,55 (final stabilization and deposition), load side TCU is constant at 81.56%. As a result, the load temperature starts at 511C and goes up to 543C during a 17min deposition. The center temperature looks good around 400C-401C the whole time. I saw this problem and reported it a month ago as well. How can there be ~140C temperature difference between load and center? It doesn't seem to happen in earlier steps (step 20), so it could be a recipe problem. I sure hope the center reading is correct and the wafers don't go to high temperatures, my wafers are sensitive to temperature. From tura at snf.stanford.edu Tue Jul 21 17:57:48 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 21 Jul 2009 17:57:48 -0700 Subject: Problem tylanbpsg SNF 2009-07-21 17:57:47: Should've been a problem, not a comment Message-ID: as above From tura at snf.stanford.edu Tue Jul 21 19:02:25 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 21 Jul 2009 19:02:25 -0700 Subject: Comment tylanbpsg SNF 2009-07-21 19:02:25: thickness data Message-ID: Variation across 9 wafers is about 18% with thickness increasing towards the load side. This also supports that the temperature at load side ws higher during deposition. From tberg at snf.stanford.edu Wed Jul 22 05:59:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Jul 2009 05:59:30 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-22 05:59:30: pull and clean Message-ID: From mdickey at snf.stanford.edu Thu Jul 23 12:43:37 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 23 Jul 2009 12:43:37 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-22 05:59:30: pull and clean Message-ID: Needs test after coat already done From jrjain at snf.stanford.edu Thu Jul 23 16:26:30 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 23 Jul 2009 16:26:30 -0700 Subject: Comment tylanbpsg SNF 2009-07-23 16:26:29: Oxide Dep Test Message-ID: LTO400PC (20min) gave 2891A in next-to-last slot of nonmetal boat From seymour at snf.stanford.edu Fri Jul 24 07:33:59 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:33:59 -0700 Subject: Comment tylanbpsg SNF 2009-07-21 17:57:07: Load side TCU is not working properly during deposition Message-ID: I watched the temp during thye coat with LTO400. all zones were very close to 400 during the 45 min run. From seymour at snf.stanford.edu Fri Jul 24 07:34:44 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:34:44 -0700 Subject: Problem tylanbpsg SNF 2009-07-21 17:57:47: Should've been a problem, not a comment Message-ID: during the coat all zones were close to 400 for the 45 min deposition. From seymour at snf.stanford.edu Fri Jul 24 07:35:25 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:35:25 -0700 Subject: Comment tylanbpsg SNF 2009-07-21 11:30:11: found loader out for 45 mins Message-ID: talked to user From filip at snf.stanford.edu Mon Jul 27 09:12:28 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 27 Jul 2009 09:12:28 -0700 Subject: Problem tylanbpsg SNF 2009-07-27 09:12:27: boat wire broken Message-ID: loaded the tube manually (& gently). From tberg at snf.stanford.edu Mon Jul 27 10:34:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jul 2009 10:34:43 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-27 10:34:42: Broken cable Message-ID: From seymour at snf.stanford.edu Mon Jul 27 12:12:34 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 27 Jul 2009 12:12:34 -0700 Subject: Problem tylanbpsg SNF 2009-07-27 09:12:27: boat wire broken Message-ID: replaced loader cable From seymour at snf.stanford.edu Mon Jul 27 12:13:43 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 27 Jul 2009 12:13:43 -0700 Subject: Shutdown tylanbpsg SNF 2009-07-27 10:34:42: Broken cable Message-ID: replaced broken loader sheats and loader cable. Hot base pressure good and leak rate good. tube up to run From cursive at snf.stanford.edu Tue Jul 28 11:55:39 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 28 Jul 2009 11:55:39 -0700 Subject: Problem tylanbpsg SNF 2009-07-28 11:55:37: Montor problem, no value on it Message-ID: There is no value on the monitor of BPSG. From seymour at snf.stanford.edu Tue Jul 28 12:02:23 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 28 Jul 2009 12:02:23 -0700 Subject: Problem tylanbpsg SNF 2009-07-28 11:55:37: Montor problem, no value on it Message-ID: display panel now displays system information and values From seymour at snf.stanford.edu Wed Jul 29 10:39:01 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jul 2009 10:39:01 -0700 Subject: Comment tylanbpsg SNF 2009-07-29 10:39:01: oil and filter changed Message-ID: From mmessana at snf.stanford.edu Wed Jul 29 14:14:23 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Wed, 29 Jul 2009 14:14:23 -0700 Subject: Problem tylanbpsg SNF 2009-07-29 14:14:22: Vacuum Wand Head Loose Message-ID: From seymour at snf.stanford.edu Wed Jul 29 15:14:11 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jul 2009 15:14:11 -0700 Subject: Problem tylanbpsg SNF 2009-07-29 14:14:22: Vacuum Wand Head Loose Message-ID: wand tip replaced