From tberg at snf.stanford.edu Tue Mar 3 06:00:49 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Mar 2009 06:00:49 -0800 Subject: Shutdown tylanbpsg SNF 2009-03-03 06:00:49: Scheduled Pull and clean Message-ID: From seymour at snf.stanford.edu Tue Mar 3 15:51:11 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:51:11 -0800 Subject: Shutdown tylanbpsg SNF 2009-03-03 06:00:49: Scheduled Pull and clean Message-ID: pull and clean completed. Hot leak check passed. needs test after clean. From seymour at snf.stanford.edu Tue Mar 3 15:51:28 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:51:28 -0800 Subject: Problem tylanbpsg SNF 2009-03-03 15:51:27: needs test after clean Message-ID: From maurice at snf.stanford.edu Tue Mar 3 17:16:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Mar 2009 17:16:23 -0800 Subject: Comment tylanbpsg SNF 2009-03-03 17:16:23: coating Message-ID: coating tube after pull/clean From maurice at snf.stanford.edu Wed Mar 4 13:44:09 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Mar 2009 13:44:09 -0800 Subject: Comment tylanbpsg SNF 2009-03-03 17:16:23: coating Message-ID: done From maurice at snf.stanford.edu Wed Mar 4 13:45:10 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Mar 2009 13:45:10 -0800 Subject: Problem tylanbpsg SNF 2009-03-03 15:51:27: needs test after clean Message-ID: comp[lete LTO400pc 00:20:00 expected~2800 ang Actual 2674Ang From masaharu at snf.stanford.edu Fri Mar 6 02:46:45 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 6 Mar 2009 02:46:45 -0800 Subject: Problem tylanbpsg SNF 2009-03-06 02:46:44: found tube vent Message-ID: From masaharu at snf.stanford.edu Fri Mar 6 02:53:34 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 6 Mar 2009 02:53:34 -0800 Subject: Problem tylanbpsg SNF 2009-03-06 02:53:33: keyboard doesn't work Message-ID: From tberg at snf.stanford.edu Fri Mar 6 06:28:57 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Mar 2009 06:28:57 -0800 Subject: Problem tylanbpsg SNF 2009-03-06 02:46:44: found tube vent Message-ID: Reset Terminal , loaded pump11 in step 25 OK From tberg at snf.stanford.edu Fri Mar 6 06:29:09 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Mar 2009 06:29:09 -0800 Subject: Problem tylanbpsg SNF 2009-03-06 02:53:33: keyboard doesn't work Message-ID: Reset Terminal , loaded pump11 in step 25 OK From tberg at snf.stanford.edu Fri Mar 6 06:29:33 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Mar 2009 06:29:33 -0800 Subject: Comment tylanbpsg SNF 2009-02-05 14:55:00: LTO300 TEMP TAKES A WHILE TO STABALIZE Message-ID: Logged From gyama at snf.stanford.edu Fri Mar 20 13:34:20 2009 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 20 Mar 2009 13:34:20 -0700 Subject: Comment tylanbpsg SNF 2009-03-20 13:34:20: STRIP THE DUMMY WAFERS!!!!!!! Message-ID: BOTH METAL & NONMETAL HAD OXIDE IF YOU DON'T HAVE TIME, AT LEAST LEAVE A NOTE & COME BACK TO DO IT!!!! From ajamo at snf.stanford.edu Mon Mar 23 00:06:29 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Mon, 23 Mar 2009 00:06:29 -0700 Subject: Shutdown tylanbpsg SNF 2009-03-23 00:06:28: No Oxide Message-ID: I ran LTO400 for 01:00:00 yesterday and got 8000 angstroms. I ran this same program/time today 3 times, first time it failed at leak check and unloaded, second time it ran through the program and I got 2300 Angstroms instead of 8000. Third time I ran with dummies and thickness monitors and got 400A. I stripped all the dummies in and out of the furnace and reloaded. something is not right. Base pressures and leak back were fine on the last two runs, dep pressure was down to 160 instead of 190 on the second two runs. got a MFS alarm 08 on Run #2. - wasted day. From tberg at snf.stanford.edu Mon Mar 23 07:19:25 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Mar 2009 07:19:25 -0700 Subject: Shutdown tylanbpsg SNF 2009-03-23 00:06:28: No Oxide Message-ID: Ran` SiH4 and O2 looked fine Temp looks Ok suggest another test From tberg at snf.stanford.edu Mon Mar 23 07:19:47 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Mar 2009 07:19:47 -0700 Subject: Problem tylanbpsg SNF 2009-03-23 07:19:46: Possible no oxide needs a test Message-ID: From ajamo at snf.stanford.edu Mon Mar 23 11:00:22 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Mon, 23 Mar 2009 11:00:22 -0700 Subject: Comment tylanbpsg SNF 2009-03-23 11:00:21: Last run Message-ID: The last run I did last night was a test run. I used LTO400 for 01:00:00 (1 hour) which should have put down an oxide thickness of ~ 8000 A. The test wafer came out with only 400A of oxide. From maurice at snf.stanford.edu Mon Mar 23 11:22:50 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Mar 2009 11:22:50 -0700 Subject: Comment tylanbpsg SNF 2009-03-23 11:22:49: running a test Message-ID: From maurice at snf.stanford.edu Mon Mar 23 14:22:13 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:22:13 -0700 Subject: Comment tylanbpsg SNF 2009-03-23 11:22:49: running a test Message-ID: Test good LTO400PC 00:20:00 expected ~2700ang actual =2658 see woolam for detail From maurice at snf.stanford.edu Mon Mar 23 14:22:27 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:22:27 -0700 Subject: Comment tylanbpsg SNF 2009-03-23 11:00:21: Last run Message-ID: Test good LTO400PC 00:20:00 expected ~2700ang actual =2658 see woolam for detail From maurice at snf.stanford.edu Mon Mar 23 14:22:40 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:22:40 -0700 Subject: Problem tylanbpsg SNF 2009-03-23 07:19:46: Possible no oxide needs a test Message-ID: Test good LTO400PC 00:20:00 expected ~2700ang actual =2658 see woolam for detail From rostam at snf.stanford.edu Sun Mar 29 20:05:59 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 29 Mar 2009 20:05:59 -0700 Subject: Problem tylanbpsg SNF 2009-03-29 20:05:58: clean vacuum wand badly broken/damaged Message-ID: From tberg at snf.stanford.edu Mon Mar 30 06:11:56 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Mar 2009 06:11:56 -0700 Subject: Problem tylanbpsg SNF 2009-03-29 20:05:58: clean vacuum wand badly broken/damaged Message-ID: Replaced vacuum wand From rshyam at snf.stanford.edu Tue Mar 31 06:47:33 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 31 Mar 2009 06:47:33 -0700 Subject: Comment tylanbpsg SNF 2009-03-31 06:47:32: Found metal boat lid having some black spots Message-ID: From seymour at snf.stanford.edu Tue Mar 31 13:56:53 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 31 Mar 2009 13:56:53 -0700 Subject: Comment tylanbpsg SNF 2009-03-31 13:56:53: oil change completed Message-ID: