From rostam at snf.stanford.edu Fri May 1 22:18:20 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 1 May 2009 22:18:20 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-01 22:18:20: broken boat and glass Message-ID: tube came out and one of the boats is broken and there is broken glass everywhere inside the tube. From tberg at snf.stanford.edu Mon May 4 06:22:02 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 4 May 2009 06:22:02 -0700 Subject: Comment tylanbpsg SNF 2009-05-04 06:22:02: pull and clean Message-ID: From seymour at snf.stanford.edu Tue May 5 10:40:36 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 May 2009 10:40:36 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-01 22:18:20: broken boat and glass Message-ID: pull and cleaned tube. aligned loader to tube. reassembled and did cold and hot leak check. From seymour at snf.stanford.edu Tue May 5 10:41:18 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 May 2009 10:41:18 -0700 Subject: Comment tylanbpsg SNF 2009-05-04 06:22:02: pull and clean Message-ID: pull and clean completed. doing a coat at this time From seymour at snf.stanford.edu Tue May 5 10:41:41 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 May 2009 10:41:41 -0700 Subject: Problem tylanbpsg SNF 2009-05-05 10:41:39: need test after coat. Message-ID: From maurice at snf.stanford.edu Tue May 5 17:33:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 May 2009 17:33:39 -0700 Subject: Problem tylanbpsg SNF 2009-05-05 10:41:39: need test after coat. Message-ID: test complete LTO400PC 0:20:00 expected 2600 actual=2728 LTO400PC 5/5/09 front boat wafer 3 Average: 2806.7 Minimum: 2546.3 Maximum: 2986.1 Std Dev: 132.09 % Range: 7.8354 1:(0.00,4.00) 2546.3 2:(0.00,2.00) 2714.7 3:(0.00,0.00) 2807.6 4:(0.00,-2.00) 2986.1 5:(0.00,-4.00) 2979.3 6:(-4.00,0.00) 2788.1 7:(-2.00,0.00) 2796.9 8:(2.00,0.00) 2805.1 9:(4.00,0.00) 2836 front boat wafer 7 Average: 2738.4 1.4588 94.852 Minimum: 2476.4 1.4473 7.29 Maximum: 2939.4 1.4865 198.76 Std Dev: 136.43 0.012972 63.514 % Range: 8.4531 1.3425 >100 1:(0.00,4.00) 2476.4 1.4529 7.29 2:(0.00,2.00) 2619.8 1.4615 132.62 3:(0.00,0.00) 2728.6 1.4529 35.13 4:(0.00,-2.00) 2837.2 1.4524 53.03 5:(0.00,-4.00) 2939.4 1.4733 198.76 6:(-4.00,0.00) 2696.1 1.4473 107.54 7:(-2.00,0.00) 2715.6 1.449 103.31 8:(2.00,0.00) 2788.8 1.4538 51.04 9:(4.00,0.00) 2843.8 1.4865 164.95 front boat wafer 11 -------------------- -------------------- -------------------- -------------------- Average: 2832.8 1.4569 89.937 Minimum: 2557.1 1.4508 7.69 Maximum: 2966.2 1.4784 160.21 Std Dev: 127.75 0.0084328 44.701 % Range: 7.2205 0.94688 84.793 1:(0.00,4.00) 2557.1 1.4532 7.69 2:(0.00,2.00) 2759.3 1.456 124.88 3:(0.00,0.00) 2848.6 1.4532 81.54 4:(0.00,-2.00) 2938.3 1.4519 48 5:(0.00,-4.00) 2956.9 1.4784 160.21 6:(-4.00,0.00) 2786.6 1.4508 105.58 7:(-2.00,0.00) 2807.3 1.4593 95.19 8:(2.00,0.00) 2875 1.4552 114.84 9:(4.00,0.00) 2966.2 1.4541 71.5 back boat wafer3 Average: 2690.3 1.4527 53.559 Minimum: 2494.2 1.4501 7.47 Maximum: 2906.7 1.4552 76.85 Std Dev: 118.35 0.0013582 25.433 % Range: 7.6673 0.1745 64.77 1:(0.00,4.00) 2494.2 1.4532 7.47 2:(0.00,2.00) 2647.1 1.4531 66.1 3:(0.00,0.00) 2715.1 1.4529 50.62 4:(0.00,-2.00) 2785.8 1.4531 19.55 5:(0.00,-4.00) 2906.7 1.4524 67.23 6:(-4.00,0.00) 2679.6 1.4501 75.66 7:(-2.00,0.00) 2720.3 1.4517 76.85 8:(2.00,0.00) 2692.9 1.4529 74.19 9:(4.00,0.00) 2571.4 1.4552 44.36 back boat wafer7 Average: 2701.6 1.4524 54.304 Minimum: 2494.8 1.4494 7.32 Maximum: 2919.5 1.4545 94.69 Std Dev: 118.82 0.001628 29.876 % Range: 7.8615 0.17489 80.445 1:(0.00,4.00) 2494.8 1.4538 7.32 2:(0.00,2.00) 2654.4 1.453 68.44 3:(0.00,0.00) 2725.2 1.4531 45.49 4:(0.00,-2.00) 2805.1 1.4531 8.7 5:(0.00,-4.00) 2919.5 1.4508 58.26 6:(-4.00,0.00) 2662.8 1.4494 75.46 7:(-2.00,0.00) 2718.6 1.4511 76.25 8:(2.00,0.00) 2717.3 1.4526 94.69 9:(4.00,0.00) 2617.2 1.4545 54.13 back boat wafer 11 Average: 2712.6 1.4557 80.478 Minimum: 2502.7 1.4475 7.47 Maximum: 2893.6 1.4806 210.23 Std Dev: 113.09 0.0095747 56.028 % Range: 7.2068 1.1369 >100 1:(0.00,4.00) 2502.7 1.4539 7.47 2:(0.00,2.00) 2652.9 1.4537 71.1 3:(0.00,0.00) 2737.1 1.4534 53.24 4:(0.00,-2.00) 2834.9 1.4536 54.43 5:(0.00,-4.00) 2893.6 1.4806 210.23 6:(-4.00,0.00) 2684.2 1.4475 96.52 7:(-2.00,0.00) 2737.8 1.4514 88.67 8:(2.00,0.00) 2726 1.4526 93.08 9:(4.00,0.00) 2644.1 1.4548 49.56 From narii at snf.stanford.edu Tue May 5 23:22:57 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 5 May 2009 23:22:57 -0700 Subject: Problem tylanbpsg SNF 2009-05-05 23:22:56: Problem with tylan computer - unable to load pump recipe Message-ID: It shows`ed 'Host task in progress' message and freezed. Unable to load pump recipe. From masaharu at snf.stanford.edu Wed May 6 02:28:18 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 6 May 2009 02:28:18 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-06 02:28:17: Boat cannot go in Message-ID: After my first run, LTO300, I couldn't push the boat in completely. It seems that there is something inside the tube and the boat is stuck. Please inspect. From masaharu at snf.stanford.edu Wed May 6 02:30:18 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 6 May 2009 02:30:18 -0700 Subject: Comment tylanbpsg SNF 2009-05-06 02:30:18: Pull out a little bit Message-ID: Just in case, I manually pull out the boat a little bit so that boat won't hurt the tube inside, by pusing button manual/fast. From seymour at snf.stanford.edu Wed May 6 09:09:06 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 6 May 2009 09:09:06 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-06 02:28:17: Boat cannot go in Message-ID: found rear baffle off loader and laying in tube. rempved baffle and replaced rear baffle with modified baffle and checked loader position in tube. watched/listened to load/unload and there was no scrapping. pumped tube and checkled leak rate both good. left tube in pump11. From seymour at snf.stanford.edu Wed May 6 09:11:21 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 6 May 2009 09:11:21 -0700 Subject: Problem tylanbpsg SNF 2009-05-05 23:22:56: Problem with tylan computer - unable to load pump recipe Message-ID: I used tycom to load pump11 and it worked ok. From skoh at snf.stanford.edu Mon May 11 13:04:45 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Mon, 11 May 2009 13:04:45 -0700 Subject: Problem tylanbpsg SNF 2009-05-11 13:04:44: Load End Temperature consistently low Message-ID: Ran LTO300 recipe today. Despite holding the tube in the temperature stabilization step for more than 20min, the TEMPL never got close to 300C. It was varying, but tends to stay at about 290C. TEMPS also tended to be somewhat higher than it should be. From king at snf.stanford.edu Tue May 12 16:47:20 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 12 May 2009 16:47:20 -0700 Subject: Comment tylanbpsg SNF 2009-05-12 16:47:19: Is LTO working? Message-ID: Thank you. From masaharu at snf.stanford.edu Thu May 14 03:52:06 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 14 May 2009 03:52:06 -0700 Subject: Problem tylanbpsg SNF 2009-05-14 03:52:06: Metal vacuum tweezer broken Message-ID: I found that the metal vacuum tweezer was nicely broken. From tberg at snf.stanford.edu Thu May 14 06:49:25 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 May 2009 06:49:25 -0700 Subject: Problem tylanbpsg SNF 2009-05-14 03:52:06: Metal vacuum tweezer broken Message-ID: Replaced vacuum wand tip assy From seymour at snf.stanford.edu Fri May 15 15:08:14 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 May 2009 15:08:14 -0700 Subject: Comment tylanbpsg SNF 2009-05-15 15:08:14: oil change completed Message-ID: From seymour at snf.stanford.edu Fri May 15 15:09:42 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 May 2009 15:09:42 -0700 Subject: Comment tylanbpsg SNF 2009-04-24 14:37:51: pump oil changed Message-ID: noted From gth at snf.stanford.edu Fri May 15 18:19:22 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 15 May 2009 18:19:22 -0700 Subject: Problem tylanbpsg SNF 2009-05-15 18:19:22: Temperature not unform. Message-ID: Running LTO400PC Step 75, Temp L - 390C TempC - 397 TempS - 402 please calibrate the temperature. thanks ~gaurav From wessmith at snf.stanford.edu Tue May 19 23:44:53 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Tue, 19 May 2009 23:44:53 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-19 23:44:53: Won't PUMP Message-ID: There is a large crack in one of the cantilever sheaths and the tube won't pump when a program is run. I tried running the Pump11 program, and I got the same MFS Alarm that I got when I tried to run my program. From tberg at snf.stanford.edu Wed May 20 06:30:09 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 May 2009 06:30:09 -0700 Subject: Comment tylanbpsg SNF 2009-05-20 06:30:08: temp cal after repair Message-ID: From seymour at snf.stanford.edu Thu May 21 17:36:42 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 May 2009 17:36:42 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-19 23:44:53: Won't PUMP Message-ID: tube is pumping ok. Temp cal completed to 450 From seymour at snf.stanford.edu Thu May 21 17:37:17 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 May 2009 17:37:17 -0700 Subject: Comment tylanbpsg SNF 2009-05-20 06:30:08: temp cal after repair Message-ID: temp cal stopped at 500 after completing 450 From seymour at snf.stanford.edu Fri May 22 08:23:50 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 22 May 2009 08:23:50 -0700 Subject: Comment tylanbpsg SNF 2009-05-22 08:23:49: oil change completed Message-ID: From rostam at snf.stanford.edu Fri May 22 18:24:31 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 22 May 2009 18:24:31 -0700 Subject: Problem tylanbpsg SNF 2009-05-22 18:24:31: cantilever shaking / brokent pieces Message-ID: after i loaded my wafers and pressed alarmackn, the cantilever was shaking while it was going in. maybe the speed in is too high. there were lots and lots of broken wafer pieces in boat 1 and 4. From skoh at snf.stanford.edu Sat May 23 12:34:03 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 23 May 2009 12:34:03 -0700 Subject: Comment tylanbpsg SNF 2009-05-23 12:34:03: Need more nonmetal dummies Message-ID: There were not enough dummies in the boat or in the box. From skoh at snf.stanford.edu Sat May 23 18:58:00 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 23 May 2009 18:58:00 -0700 Subject: Comment tylanbpsg SNF 2009-05-23 18:57:59: lto300 recipe Message-ID: Had to hold the tube in step45 for about 18min, before the temperature stabilized at about 298-300C. From skoh at snf.stanford.edu Sat May 23 19:02:34 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 23 May 2009 19:02:34 -0700 Subject: Problem tylanbpsg SNF 2009-05-23 19:02:33: Loader cable looks shredded at one point Message-ID: The plastic covering at one point looked burnt/melted, and the wire underneath looks shredded - almost broken. The affected area in hidden behind the metal casing when the tube is closed. The tube managed to close OK and is pumped down, but I am not sure if the tube is usable at this point. From rshyam at snf.stanford.edu Mon May 25 23:44:21 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 25 May 2009 23:44:21 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-25 23:44:21: found loader wire broken Message-ID: From tberg at snf.stanford.edu Tue May 26 07:10:05 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 26 May 2009 07:10:05 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-25 23:44:21: found loader wire broken Message-ID: Replaced loader cable and checked operation in pump program From tberg at snf.stanford.edu Tue May 26 07:10:15 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 26 May 2009 07:10:15 -0700 Subject: Problem tylanbpsg SNF 2009-05-23 19:02:33: Loader cable looks shredded at one point Message-ID: Replaced loader cable and checked operation in pump program From tberg at snf.stanford.edu Tue May 26 07:10:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 26 May 2009 07:10:30 -0700 Subject: Problem tylanbpsg SNF 2009-05-22 18:24:31: cantilever shaking / brokent pieces Message-ID: Replaced loader cable and checked operation in pump program From tberg at snf.stanford.edu Wed May 27 06:46:08 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 May 2009 06:46:08 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-27 06:46:08: Process tube is chipped and will not Pump Message-ID: Process tube is chipped and will not Pump. Shutdown for pull From seymour at snf.stanford.edu Thu May 28 11:08:27 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 May 2009 11:08:27 -0700 Subject: Shutdown tylanbpsg SNF 2009-05-27 06:46:08: Process tube is chipped and will not Pump Message-ID: replaced chipped tube. cold leak check good. heating up to do a tube coat. From seymour at snf.stanford.edu Thu May 28 11:08:50 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 May 2009 11:08:50 -0700 Subject: Problem tylanbpsg SNF 2009-05-28 11:08:49: needs a coat and a test after repair Message-ID: From maurice at snf.stanford.edu Thu May 28 15:56:20 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 May 2009 15:56:20 -0700 Subject: Problem tylanbpsg SNF 2009-05-28 11:08:49: needs a coat and a test after repair Message-ID: coat and test complete expected 2728A (center wafer of nonmetal boat) actual 2860A From wessmith at snf.stanford.edu Thu May 28 21:00:48 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Thu, 28 May 2009 21:00:48 -0700 Subject: Comment tylanbpsg SNF 2009-05-28 21:00:47: More Non-metal Dummies Needed Message-ID: There are not enough non-metal dummies to swap out when the dummies are being stripped. Please provide some more. From till at snf.stanford.edu Fri May 29 16:42:07 2009 From: till at snf.stanford.edu (till at snf.stanford.edu) Date: Fri, 29 May 2009 16:42:07 -0700 Subject: Comment tylanbpsg SNF 2009-05-29 16:42:06: dummys are running low (nonmetal) Message-ID: just 6 wafers left for exchange